JPH0547364Y2 - - Google Patents

Info

Publication number
JPH0547364Y2
JPH0547364Y2 JP6619190U JP6619190U JPH0547364Y2 JP H0547364 Y2 JPH0547364 Y2 JP H0547364Y2 JP 6619190 U JP6619190 U JP 6619190U JP 6619190 U JP6619190 U JP 6619190U JP H0547364 Y2 JPH0547364 Y2 JP H0547364Y2
Authority
JP
Japan
Prior art keywords
turntable
probe
sample
microscope
measurement point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6619190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424009U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6619190U priority Critical patent/JPH0547364Y2/ja
Publication of JPH0424009U publication Critical patent/JPH0424009U/ja
Application granted granted Critical
Publication of JPH0547364Y2 publication Critical patent/JPH0547364Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP6619190U 1990-06-22 1990-06-22 Expired - Lifetime JPH0547364Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6619190U JPH0547364Y2 (enrdf_load_stackoverflow) 1990-06-22 1990-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6619190U JPH0547364Y2 (enrdf_load_stackoverflow) 1990-06-22 1990-06-22

Publications (2)

Publication Number Publication Date
JPH0424009U JPH0424009U (enrdf_load_stackoverflow) 1992-02-27
JPH0547364Y2 true JPH0547364Y2 (enrdf_load_stackoverflow) 1993-12-14

Family

ID=31598689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6619190U Expired - Lifetime JPH0547364Y2 (enrdf_load_stackoverflow) 1990-06-22 1990-06-22

Country Status (1)

Country Link
JP (1) JPH0547364Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0424009U (enrdf_load_stackoverflow) 1992-02-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term