JPH0545885Y2 - - Google Patents
Info
- Publication number
- JPH0545885Y2 JPH0545885Y2 JP11874287U JP11874287U JPH0545885Y2 JP H0545885 Y2 JPH0545885 Y2 JP H0545885Y2 JP 11874287 U JP11874287 U JP 11874287U JP 11874287 U JP11874287 U JP 11874287U JP H0545885 Y2 JPH0545885 Y2 JP H0545885Y2
- Authority
- JP
- Japan
- Prior art keywords
- link
- shaft
- fixed
- motor
- rotatably supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 9
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874287U JPH0545885Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874287U JPH0545885Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6424756U JPS6424756U (enrdf_load_stackoverflow) | 1989-02-10 |
| JPH0545885Y2 true JPH0545885Y2 (enrdf_load_stackoverflow) | 1993-11-29 |
Family
ID=31363352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11874287U Expired - Lifetime JPH0545885Y2 (enrdf_load_stackoverflow) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0545885Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-07-31 JP JP11874287U patent/JPH0545885Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6424756U (enrdf_load_stackoverflow) | 1989-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1978154B (zh) | 工业用机器人 | |
| US5584647A (en) | Object handling devices | |
| US5064340A (en) | Precision arm mechanism | |
| JP5133860B2 (ja) | ロボットアーム構造、ワークピース処理システム、及びロボットアーム構造とセンサアレイとを備えたシステム | |
| US6558107B1 (en) | Robot arm mechanism | |
| JPH09323276A (ja) | 搬送装置及びロボットアーム | |
| JP2002166376A (ja) | 基板搬送用ロボット | |
| KR20020038501A (ko) | 더블아암 기판 반송장치 | |
| JP2005032942A (ja) | 2アーム式搬送ロボット | |
| JPH1133950A (ja) | 2アーム方式の搬送用ロボット装置 | |
| JPH10329059A (ja) | 2アーム方式の搬送用ロボット装置 | |
| JP2000042954A (ja) | 搬送用ロボット装置 | |
| EP0066394A2 (en) | Pick and place robot | |
| EP1249318A2 (en) | A robot arm mechanism comprising a plurality of handling members | |
| US20010033144A1 (en) | Robot system | |
| JPH0545885Y2 (enrdf_load_stackoverflow) | ||
| JPH0871965A (ja) | 移載装置 | |
| JPH0642602A (ja) | 同軸駆動部を有する平行リンクロボット | |
| JP2016147315A (ja) | 産業用ロボット | |
| JP2003094376A (ja) | ワーク搬送用ロボット | |
| JPH03281183A (ja) | 多関節搬送装置 | |
| JP4489999B2 (ja) | 搬送装置及び真空処理装置 | |
| JPH04300190A (ja) | 産業用ロボットの手首装置 | |
| JPH0533011Y2 (enrdf_load_stackoverflow) | ||
| JPH08161049A (ja) | 位置決め装置 |