JPH0544418B2 - - Google Patents
Info
- Publication number
- JPH0544418B2 JPH0544418B2 JP61284774A JP28477486A JPH0544418B2 JP H0544418 B2 JPH0544418 B2 JP H0544418B2 JP 61284774 A JP61284774 A JP 61284774A JP 28477486 A JP28477486 A JP 28477486A JP H0544418 B2 JPH0544418 B2 JP H0544418B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- temperature
- glass substrate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 229910001887 tin oxide Inorganic materials 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28477486A JPS63139033A (ja) | 1986-11-28 | 1986-11-28 | プラズマディスプレイ用透明導電膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28477486A JPS63139033A (ja) | 1986-11-28 | 1986-11-28 | プラズマディスプレイ用透明導電膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63139033A JPS63139033A (ja) | 1988-06-10 |
| JPH0544418B2 true JPH0544418B2 (pt) | 1993-07-06 |
Family
ID=17682839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28477486A Granted JPS63139033A (ja) | 1986-11-28 | 1986-11-28 | プラズマディスプレイ用透明導電膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63139033A (pt) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55130842A (en) * | 1979-02-14 | 1980-10-11 | Siv Soc Italiana Vetro | Method and device for continuously depositing solid substance layer on surface of substrate with high temperature |
-
1986
- 1986-11-28 JP JP28477486A patent/JPS63139033A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55130842A (en) * | 1979-02-14 | 1980-10-11 | Siv Soc Italiana Vetro | Method and device for continuously depositing solid substance layer on surface of substrate with high temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63139033A (ja) | 1988-06-10 |
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