JPH0543879B2 - - Google Patents

Info

Publication number
JPH0543879B2
JPH0543879B2 JP61273609A JP27360986A JPH0543879B2 JP H0543879 B2 JPH0543879 B2 JP H0543879B2 JP 61273609 A JP61273609 A JP 61273609A JP 27360986 A JP27360986 A JP 27360986A JP H0543879 B2 JPH0543879 B2 JP H0543879B2
Authority
JP
Japan
Prior art keywords
rotor
bearing
magnetic bearing
pump
emergency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61273609A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63129191A (ja
Inventor
Masami Kakinuma
Yoshio Yamaguchi
Tomoaki Urano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP27360986A priority Critical patent/JPS63129191A/ja
Publication of JPS63129191A publication Critical patent/JPS63129191A/ja
Publication of JPH0543879B2 publication Critical patent/JPH0543879B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP27360986A 1986-11-17 1986-11-17 タ−ボ分子ポンプ Granted JPS63129191A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27360986A JPS63129191A (ja) 1986-11-17 1986-11-17 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27360986A JPS63129191A (ja) 1986-11-17 1986-11-17 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS63129191A JPS63129191A (ja) 1988-06-01
JPH0543879B2 true JPH0543879B2 (enrdf_load_stackoverflow) 1993-07-02

Family

ID=17530133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27360986A Granted JPS63129191A (ja) 1986-11-17 1986-11-17 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS63129191A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2536512B2 (ja) * 1987-03-25 1996-09-18 株式会社島津製作所 タ−ボ分子ポンプの磁気軸受装置
JP2525848Y2 (ja) * 1990-02-22 1997-02-12 セイコー精機株式会社 真空ポンプ
DE4427153A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513883B2 (enrdf_load_stackoverflow) * 1971-08-24 1976-02-06
JPS6192790U (enrdf_load_stackoverflow) * 1984-11-22 1986-06-16

Also Published As

Publication number Publication date
JPS63129191A (ja) 1988-06-01

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