JPS6192790U - - Google Patents

Info

Publication number
JPS6192790U
JPS6192790U JP17671884U JP17671884U JPS6192790U JP S6192790 U JPS6192790 U JP S6192790U JP 17671884 U JP17671884 U JP 17671884U JP 17671884 U JP17671884 U JP 17671884U JP S6192790 U JPS6192790 U JP S6192790U
Authority
JP
Japan
Prior art keywords
turbo
pump
molecular pump
torr
deceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17671884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17671884U priority Critical patent/JPS6192790U/ja
Publication of JPS6192790U publication Critical patent/JPS6192790U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP17671884U 1984-11-22 1984-11-22 Pending JPS6192790U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17671884U JPS6192790U (enrdf_load_stackoverflow) 1984-11-22 1984-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17671884U JPS6192790U (enrdf_load_stackoverflow) 1984-11-22 1984-11-22

Publications (1)

Publication Number Publication Date
JPS6192790U true JPS6192790U (enrdf_load_stackoverflow) 1986-06-16

Family

ID=30734311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17671884U Pending JPS6192790U (enrdf_load_stackoverflow) 1984-11-22 1984-11-22

Country Status (1)

Country Link
JP (1) JPS6192790U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63129191A (ja) * 1986-11-17 1988-06-01 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63129191A (ja) * 1986-11-17 1988-06-01 Seiko Seiki Co Ltd タ−ボ分子ポンプ

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