JPH0543091Y2 - - Google Patents
Info
- Publication number
- JPH0543091Y2 JPH0543091Y2 JP18968087U JP18968087U JPH0543091Y2 JP H0543091 Y2 JPH0543091 Y2 JP H0543091Y2 JP 18968087 U JP18968087 U JP 18968087U JP 18968087 U JP18968087 U JP 18968087U JP H0543091 Y2 JPH0543091 Y2 JP H0543091Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- vacuum chamber
- tubular
- wall
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004544 sputter deposition Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 description 13
- 239000011810 insulating material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18968087U JPH0543091Y2 (enrdf_load_stackoverflow) | 1987-12-14 | 1987-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18968087U JPH0543091Y2 (enrdf_load_stackoverflow) | 1987-12-14 | 1987-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0194455U JPH0194455U (enrdf_load_stackoverflow) | 1989-06-21 |
| JPH0543091Y2 true JPH0543091Y2 (enrdf_load_stackoverflow) | 1993-10-29 |
Family
ID=31480699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18968087U Expired - Lifetime JPH0543091Y2 (enrdf_load_stackoverflow) | 1987-12-14 | 1987-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543091Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-12-14 JP JP18968087U patent/JPH0543091Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0194455U (enrdf_load_stackoverflow) | 1989-06-21 |
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