JPH0194455U - - Google Patents

Info

Publication number
JPH0194455U
JPH0194455U JP18968087U JP18968087U JPH0194455U JP H0194455 U JPH0194455 U JP H0194455U JP 18968087 U JP18968087 U JP 18968087U JP 18968087 U JP18968087 U JP 18968087U JP H0194455 U JPH0194455 U JP H0194455U
Authority
JP
Japan
Prior art keywords
tubular
target connector
vacuum chamber
target
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18968087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543091Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18968087U priority Critical patent/JPH0543091Y2/ja
Publication of JPH0194455U publication Critical patent/JPH0194455U/ja
Application granted granted Critical
Publication of JPH0543091Y2 publication Critical patent/JPH0543091Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18968087U 1987-12-14 1987-12-14 Expired - Lifetime JPH0543091Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18968087U JPH0543091Y2 (enrdf_load_stackoverflow) 1987-12-14 1987-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18968087U JPH0543091Y2 (enrdf_load_stackoverflow) 1987-12-14 1987-12-14

Publications (2)

Publication Number Publication Date
JPH0194455U true JPH0194455U (enrdf_load_stackoverflow) 1989-06-21
JPH0543091Y2 JPH0543091Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=31480699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18968087U Expired - Lifetime JPH0543091Y2 (enrdf_load_stackoverflow) 1987-12-14 1987-12-14

Country Status (1)

Country Link
JP (1) JPH0543091Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0543091Y2 (enrdf_load_stackoverflow) 1993-10-29

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