JPH0543088Y2 - - Google Patents
Info
- Publication number
- JPH0543088Y2 JPH0543088Y2 JP1987062980U JP6298087U JPH0543088Y2 JP H0543088 Y2 JPH0543088 Y2 JP H0543088Y2 JP 1987062980 U JP1987062980 U JP 1987062980U JP 6298087 U JP6298087 U JP 6298087U JP H0543088 Y2 JPH0543088 Y2 JP H0543088Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- dust collector
- thin film
- door
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 description 14
- 239000007789 gas Substances 0.000 description 10
- 238000007740 vapor deposition Methods 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062980U JPH0543088Y2 (ar) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062980U JPH0543088Y2 (ar) | 1987-04-24 | 1987-04-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170456U JPS63170456U (ar) | 1988-11-07 |
| JPH0543088Y2 true JPH0543088Y2 (ar) | 1993-10-29 |
Family
ID=30897775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062980U Expired - Lifetime JPH0543088Y2 (ar) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543088Y2 (ar) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133336A (ja) * | 1982-10-22 | 1984-07-31 | メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル | 精錬工程中に金属浴に気体および固体物質を供給する装置 |
-
1987
- 1987-04-24 JP JP1987062980U patent/JPH0543088Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133336A (ja) * | 1982-10-22 | 1984-07-31 | メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル | 精錬工程中に金属浴に気体および固体物質を供給する装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63170456U (ar) | 1988-11-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5933911Y2 (ja) | クライオポンプ | |
| WO1994025863A3 (de) | Verfahren zum abscheiden einer ganzflächigen schicht durch eine maske und optionalem verschliessen dieser maske | |
| JPH0543088Y2 (ar) | ||
| JPS6236634B2 (ar) | ||
| CA2044976A1 (en) | Vacuum vapor deposition apparatus | |
| US5372693A (en) | Vacuum coating apparatus | |
| US3854442A (en) | Vapor-deposition apparatus | |
| KR960000010B1 (ko) | 분무 흡수기 | |
| JPH0364477A (ja) | 常圧処理装置 | |
| JPH0137729Y2 (ar) | ||
| US3457655A (en) | Process of and apparatus for the desorption of extraneous molecules | |
| JP3057909B2 (ja) | 表示管の製造装置 | |
| JPS61101029A (ja) | 塗布装置 | |
| JP2803156B2 (ja) | ワーク乾燥方法 | |
| JPS5770273A (en) | Method for fixing mask for vapor deposition | |
| US2776022A (en) | Spraying booth installation employing filters | |
| JPS5965685A (ja) | 弁体の駆動装置 | |
| JPH0480733B2 (ar) | ||
| JPS6277456A (ja) | レ−ザ蒸着装置 | |
| JP2967795B2 (ja) | 半導体製造装置 | |
| JPH1199326A (ja) | 真空ゲートバルブ及びこれを用いた真空処理装置 | |
| JPS60253225A (ja) | 真空処理装置 | |
| JPS6320474A (ja) | 帯状物連続真空蒸着処理装置 | |
| JP2929641B2 (ja) | スピン塗布装置用のチャンバ装置及び塗膜形成方法 | |
| JPH0243864Y2 (ar) |