JPH054282Y2 - - Google Patents

Info

Publication number
JPH054282Y2
JPH054282Y2 JP1984184188U JP18418884U JPH054282Y2 JP H054282 Y2 JPH054282 Y2 JP H054282Y2 JP 1984184188 U JP1984184188 U JP 1984184188U JP 18418884 U JP18418884 U JP 18418884U JP H054282 Y2 JPH054282 Y2 JP H054282Y2
Authority
JP
Japan
Prior art keywords
plate
processing chamber
mounting table
chuck ring
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984184188U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6197841U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984184188U priority Critical patent/JPH054282Y2/ja
Publication of JPS6197841U publication Critical patent/JPS6197841U/ja
Application granted granted Critical
Publication of JPH054282Y2 publication Critical patent/JPH054282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1984184188U 1984-12-04 1984-12-04 Expired - Lifetime JPH054282Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Publications (2)

Publication Number Publication Date
JPS6197841U JPS6197841U (enrdf_load_stackoverflow) 1986-06-23
JPH054282Y2 true JPH054282Y2 (enrdf_load_stackoverflow) 1993-02-02

Family

ID=30741673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984184188U Expired - Lifetime JPH054282Y2 (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPH054282Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0272142B1 (en) * 1986-12-19 1994-09-07 Applied Materials, Inc. Magnetic field enhanced plasma etch reactor
JP2673538B2 (ja) * 1988-05-02 1997-11-05 東京エレクトロン株式会社 エッチング装置及びエッチング方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741064A (en) * 1980-08-25 1982-03-06 Nec Corp Digital board trunk
JPS58178533A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd ウエ−ハ押上げ装置

Also Published As

Publication number Publication date
JPS6197841U (enrdf_load_stackoverflow) 1986-06-23

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