JPH0542398B2 - - Google Patents
Info
- Publication number
- JPH0542398B2 JPH0542398B2 JP61120587A JP12058786A JPH0542398B2 JP H0542398 B2 JPH0542398 B2 JP H0542398B2 JP 61120587 A JP61120587 A JP 61120587A JP 12058786 A JP12058786 A JP 12058786A JP H0542398 B2 JPH0542398 B2 JP H0542398B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- diamond
- phase synthesis
- reaction chamber
- crystalline carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 229910052799 carbon Inorganic materials 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 238000003786 synthesis reaction Methods 0.000 claims description 11
- 239000012808 vapor phase Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 21
- 239000010432 diamond Substances 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 12
- 229910003460 diamond Inorganic materials 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 150000002430 hydrocarbons Chemical class 0.000 description 8
- 125000001153 fluoro group Chemical group F* 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 238000001308 synthesis method Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12058786A JPS62278193A (ja) | 1986-05-26 | 1986-05-26 | 結晶性炭素の気相合成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12058786A JPS62278193A (ja) | 1986-05-26 | 1986-05-26 | 結晶性炭素の気相合成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62278193A JPS62278193A (ja) | 1987-12-03 |
| JPH0542398B2 true JPH0542398B2 (fr) | 1993-06-28 |
Family
ID=14789964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12058786A Granted JPS62278193A (ja) | 1986-05-26 | 1986-05-26 | 結晶性炭素の気相合成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62278193A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071677A (en) * | 1990-05-24 | 1991-12-10 | Houston Advanced Research Center | Halogen-assisted chemical vapor deposition of diamond |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930709A (ja) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | 炭素膜及び／又は炭素粒子の製造方法 |
| JPS61222915A (ja) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | ダイヤモンドの気相合成方法 |
-
1986
- 1986-05-26 JP JP12058786A patent/JPS62278193A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5930709A (ja) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | 炭素膜及び／又は炭素粒子の製造方法 |
| JPS61222915A (ja) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | ダイヤモンドの気相合成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62278193A (ja) | 1987-12-03 |
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