JPH054155B2 - - Google Patents

Info

Publication number
JPH054155B2
JPH054155B2 JP62199796A JP19979687A JPH054155B2 JP H054155 B2 JPH054155 B2 JP H054155B2 JP 62199796 A JP62199796 A JP 62199796A JP 19979687 A JP19979687 A JP 19979687A JP H054155 B2 JPH054155 B2 JP H054155B2
Authority
JP
Japan
Prior art keywords
cleaning
steam
drying
vapor
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62199796A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6443384A (en
Inventor
Hideaki Kurokawa
Katsuya Ebara
Sankichi Takahashi
Harumi Matsuzaki
Hiroaki Yoda
Takehisa Nitsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19979687A priority Critical patent/JPS6443384A/ja
Publication of JPS6443384A publication Critical patent/JPS6443384A/ja
Publication of JPH054155B2 publication Critical patent/JPH054155B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP19979687A 1987-08-12 1987-08-12 Steam washing method and washer Granted JPS6443384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19979687A JPS6443384A (en) 1987-08-12 1987-08-12 Steam washing method and washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19979687A JPS6443384A (en) 1987-08-12 1987-08-12 Steam washing method and washer

Publications (2)

Publication Number Publication Date
JPS6443384A JPS6443384A (en) 1989-02-15
JPH054155B2 true JPH054155B2 (enrdf_load_stackoverflow) 1993-01-19

Family

ID=16413763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19979687A Granted JPS6443384A (en) 1987-08-12 1987-08-12 Steam washing method and washer

Country Status (1)

Country Link
JP (1) JPS6443384A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4829937B2 (ja) 2008-07-28 2011-12-07 東京エレクトロン株式会社 半導体製造装置のパーツに付着した堆積物またはパーティクルを除去する洗浄装置及び洗浄方法
JP6246973B1 (ja) * 2017-07-11 2017-12-13 ジャパン・フィールド株式会社 被洗浄物の脱脂及び溶剤除去洗浄方法
CN112474589B (zh) * 2020-10-28 2022-01-11 哈尔滨工程大学 一种基于仿生瞬膜的移动机器人摄像头视野综合清洁装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS60246638A (ja) * 1984-05-22 1985-12-06 Matsushita Electric Ind Co Ltd 高圧ジエツト洗浄装置
JPS6123324A (ja) * 1984-07-11 1986-01-31 Hitachi Ltd 乾燥装置
JPS61129019A (ja) * 1984-11-26 1986-06-17 Hitachi Ltd 吸収式温度回生器
JPS61138582A (ja) * 1984-12-12 1986-06-26 島田理化工業株式会社 有機溶剤蒸気乾燥方法

Also Published As

Publication number Publication date
JPS6443384A (en) 1989-02-15

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