JPH0541551Y2 - - Google Patents

Info

Publication number
JPH0541551Y2
JPH0541551Y2 JP1987021250U JP2125087U JPH0541551Y2 JP H0541551 Y2 JPH0541551 Y2 JP H0541551Y2 JP 1987021250 U JP1987021250 U JP 1987021250U JP 2125087 U JP2125087 U JP 2125087U JP H0541551 Y2 JPH0541551 Y2 JP H0541551Y2
Authority
JP
Japan
Prior art keywords
image
semiconductor wafer
microscope
wafer
dark field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987021250U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128730U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987021250U priority Critical patent/JPH0541551Y2/ja
Publication of JPS63128730U publication Critical patent/JPS63128730U/ja
Application granted granted Critical
Publication of JPH0541551Y2 publication Critical patent/JPH0541551Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987021250U 1987-02-16 1987-02-16 Expired - Lifetime JPH0541551Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987021250U JPH0541551Y2 (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987021250U JPH0541551Y2 (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Publications (2)

Publication Number Publication Date
JPS63128730U JPS63128730U (enrdf_load_stackoverflow) 1988-08-23
JPH0541551Y2 true JPH0541551Y2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=30817521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987021250U Expired - Lifetime JPH0541551Y2 (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Country Status (1)

Country Link
JP (1) JPH0541551Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2782473B2 (ja) * 1990-11-30 1998-07-30 三井金属鉱業株式会社 材料表面検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151544A (ja) * 1982-03-05 1983-09-08 Nippon Jido Seigyo Kk 暗視野像による欠陥検査装置
JPS58179304A (ja) * 1982-04-14 1983-10-20 Matsushita Electric Ind Co Ltd 表面欠陥抽出装置
JPS5910920A (ja) * 1982-07-09 1984-01-20 Mitsubishi Electric Corp パタ−ン検査用暗視野顕微鏡
JPS5977345A (ja) * 1982-10-27 1984-05-02 Toshiba Corp 表面きず検出方法
JPS5961142A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 欠陥検出装置
JPS6129712A (ja) * 1984-07-23 1986-02-10 Hitachi Ltd 微細パタ−ンの欠陥検出方法及びその装置
JPS6157837A (ja) * 1984-08-30 1986-03-24 Toshiba Corp 外観検査装置

Also Published As

Publication number Publication date
JPS63128730U (enrdf_load_stackoverflow) 1988-08-23

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