JPH0539871Y2 - - Google Patents
Info
- Publication number
- JPH0539871Y2 JPH0539871Y2 JP9847089U JP9847089U JPH0539871Y2 JP H0539871 Y2 JPH0539871 Y2 JP H0539871Y2 JP 9847089 U JP9847089 U JP 9847089U JP 9847089 U JP9847089 U JP 9847089U JP H0539871 Y2 JPH0539871 Y2 JP H0539871Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- plate
- substrate
- plates
- surface area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 117
- 239000000758 substrate Substances 0.000 claims description 20
- 229920005989 resin Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 229920003002 synthetic resin Polymers 0.000 claims description 5
- 239000000057 synthetic resin Substances 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9847089U JPH0539871Y2 ( ) | 1989-08-25 | 1989-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9847089U JPH0539871Y2 ( ) | 1989-08-25 | 1989-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0339532U JPH0339532U ( ) | 1991-04-16 |
| JPH0539871Y2 true JPH0539871Y2 ( ) | 1993-10-08 |
Family
ID=31647568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9847089U Expired - Lifetime JPH0539871Y2 ( ) | 1989-08-25 | 1989-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539871Y2 ( ) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11283909A (ja) * | 1998-03-31 | 1999-10-15 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
-
1989
- 1989-08-25 JP JP9847089U patent/JPH0539871Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339532U ( ) | 1991-04-16 |
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