JPH0539627Y2 - - Google Patents
Info
- Publication number
- JPH0539627Y2 JPH0539627Y2 JP1987040133U JP4013387U JPH0539627Y2 JP H0539627 Y2 JPH0539627 Y2 JP H0539627Y2 JP 1987040133 U JP1987040133 U JP 1987040133U JP 4013387 U JP4013387 U JP 4013387U JP H0539627 Y2 JPH0539627 Y2 JP H0539627Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- heater block
- pressure chemical
- wafer
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 239000006200 vaporizer Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 13
- 239000010409 thin film Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987040133U JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987040133U JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63147814U JPS63147814U (th) | 1988-09-29 |
| JPH0539627Y2 true JPH0539627Y2 (th) | 1993-10-07 |
Family
ID=30853945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987040133U Expired - Lifetime JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539627Y2 (th) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887814A (ja) * | 1981-11-20 | 1983-05-25 | Seiko Epson Corp | 非晶質半導体膜製造装置 |
-
1987
- 1987-03-18 JP JP1987040133U patent/JPH0539627Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887814A (ja) * | 1981-11-20 | 1983-05-25 | Seiko Epson Corp | 非晶質半導体膜製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63147814U (th) | 1988-09-29 |
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