JPS63147814U - - Google Patents
Info
- Publication number
- JPS63147814U JPS63147814U JP4013387U JP4013387U JPS63147814U JP S63147814 U JPS63147814 U JP S63147814U JP 4013387 U JP4013387 U JP 4013387U JP 4013387 U JP4013387 U JP 4013387U JP S63147814 U JPS63147814 U JP S63147814U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- heater block
- vapor deposition
- atmospheric pressure
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987040133U JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987040133U JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63147814U true JPS63147814U (th) | 1988-09-29 |
| JPH0539627Y2 JPH0539627Y2 (th) | 1993-10-07 |
Family
ID=30853945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987040133U Expired - Lifetime JPH0539627Y2 (th) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539627Y2 (th) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887814A (ja) * | 1981-11-20 | 1983-05-25 | Seiko Epson Corp | 非晶質半導体膜製造装置 |
-
1987
- 1987-03-18 JP JP1987040133U patent/JPH0539627Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887814A (ja) * | 1981-11-20 | 1983-05-25 | Seiko Epson Corp | 非晶質半導体膜製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0539627Y2 (th) | 1993-10-07 |