JPH01140816U - - Google Patents

Info

Publication number
JPH01140816U
JPH01140816U JP3738188U JP3738188U JPH01140816U JP H01140816 U JPH01140816 U JP H01140816U JP 3738188 U JP3738188 U JP 3738188U JP 3738188 U JP3738188 U JP 3738188U JP H01140816 U JPH01140816 U JP H01140816U
Authority
JP
Japan
Prior art keywords
compound semiconductor
vapor phase
phase growth
susceptor
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3738188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0621235Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988037381U priority Critical patent/JPH0621235Y2/ja
Publication of JPH01140816U publication Critical patent/JPH01140816U/ja
Application granted granted Critical
Publication of JPH0621235Y2 publication Critical patent/JPH0621235Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988037381U 1988-03-22 1988-03-22 化合物半導体気相成長装置 Expired - Lifetime JPH0621235Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988037381U JPH0621235Y2 (ja) 1988-03-22 1988-03-22 化合物半導体気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988037381U JPH0621235Y2 (ja) 1988-03-22 1988-03-22 化合物半導体気相成長装置

Publications (2)

Publication Number Publication Date
JPH01140816U true JPH01140816U (th) 1989-09-27
JPH0621235Y2 JPH0621235Y2 (ja) 1994-06-01

Family

ID=31263962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988037381U Expired - Lifetime JPH0621235Y2 (ja) 1988-03-22 1988-03-22 化合物半導体気相成長装置

Country Status (1)

Country Link
JP (1) JPH0621235Y2 (th)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02109321A (ja) * 1988-10-18 1990-04-23 Furukawa Electric Co Ltd:The 半導体薄膜気相成長装置
JP2013058741A (ja) * 2011-08-17 2013-03-28 Hitachi Cable Ltd 金属塩化物ガス発生装置、ハイドライド気相成長装置、及び窒化物半導体テンプレート
JP2015153983A (ja) * 2014-02-18 2015-08-24 東京エレクトロン株式会社 基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421916A (en) * 1987-07-16 1989-01-25 Sony Corp Vapor growth apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421916A (en) * 1987-07-16 1989-01-25 Sony Corp Vapor growth apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02109321A (ja) * 1988-10-18 1990-04-23 Furukawa Electric Co Ltd:The 半導体薄膜気相成長装置
JP2013058741A (ja) * 2011-08-17 2013-03-28 Hitachi Cable Ltd 金属塩化物ガス発生装置、ハイドライド気相成長装置、及び窒化物半導体テンプレート
JP2015153983A (ja) * 2014-02-18 2015-08-24 東京エレクトロン株式会社 基板処理装置

Also Published As

Publication number Publication date
JPH0621235Y2 (ja) 1994-06-01

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