JPS62180933U - - Google Patents
Info
- Publication number
- JPS62180933U JPS62180933U JP6874186U JP6874186U JPS62180933U JP S62180933 U JPS62180933 U JP S62180933U JP 6874186 U JP6874186 U JP 6874186U JP 6874186 U JP6874186 U JP 6874186U JP S62180933 U JPS62180933 U JP S62180933U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vapor phase
- growth apparatus
- phase growth
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 10
- 238000006243 chemical reaction Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6874186U JPS62180933U (th) | 1986-05-09 | 1986-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6874186U JPS62180933U (th) | 1986-05-09 | 1986-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180933U true JPS62180933U (th) | 1987-11-17 |
Family
ID=30908836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6874186U Pending JPS62180933U (th) | 1986-05-09 | 1986-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180933U (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355840A (ja) * | 1989-07-25 | 1991-03-11 | Tokyo Electron Sagami Ltd | 縦型処理装置における処理方法 |
-
1986
- 1986-05-09 JP JP6874186U patent/JPS62180933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355840A (ja) * | 1989-07-25 | 1991-03-11 | Tokyo Electron Sagami Ltd | 縦型処理装置における処理方法 |