JPS62129060U - - Google Patents
Info
- Publication number
- JPS62129060U JPS62129060U JP1782586U JP1782586U JPS62129060U JP S62129060 U JPS62129060 U JP S62129060U JP 1782586 U JP1782586 U JP 1782586U JP 1782586 U JP1782586 U JP 1782586U JP S62129060 U JPS62129060 U JP S62129060U
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- gas
- film manufacturing
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782586U JPS62129060U (th) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782586U JPS62129060U (th) | 1986-02-10 | 1986-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62129060U true JPS62129060U (th) | 1987-08-15 |
Family
ID=30810935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1782586U Pending JPS62129060U (th) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62129060U (th) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57187033A (en) * | 1981-05-12 | 1982-11-17 | Seiko Epson Corp | Vapor phase chemical growth device |
| JPS6050168A (ja) * | 1983-08-29 | 1985-03-19 | Yoshihiro Hamakawa | 光ｃｖｄによる固体薄膜の製造方法 |
-
1986
- 1986-02-10 JP JP1782586U patent/JPS62129060U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57187033A (en) * | 1981-05-12 | 1982-11-17 | Seiko Epson Corp | Vapor phase chemical growth device |
| JPS6050168A (ja) * | 1983-08-29 | 1985-03-19 | Yoshihiro Hamakawa | 光ｃｖｄによる固体薄膜の製造方法 |