JPH0539520Y2 - - Google Patents

Info

Publication number
JPH0539520Y2
JPH0539520Y2 JP16898085U JP16898085U JPH0539520Y2 JP H0539520 Y2 JPH0539520 Y2 JP H0539520Y2 JP 16898085 U JP16898085 U JP 16898085U JP 16898085 U JP16898085 U JP 16898085U JP H0539520 Y2 JPH0539520 Y2 JP H0539520Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
support rod
cylinder
case
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16898085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6276699U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16898085U priority Critical patent/JPH0539520Y2/ja
Publication of JPS6276699U publication Critical patent/JPS6276699U/ja
Application granted granted Critical
Publication of JPH0539520Y2 publication Critical patent/JPH0539520Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Particle Accelerators (AREA)
JP16898085U 1985-10-31 1985-10-31 Expired - Lifetime JPH0539520Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16898085U JPH0539520Y2 (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16898085U JPH0539520Y2 (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Publications (2)

Publication Number Publication Date
JPS6276699U JPS6276699U (enrdf_load_stackoverflow) 1987-05-16
JPH0539520Y2 true JPH0539520Y2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=31102364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16898085U Expired - Lifetime JPH0539520Y2 (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPH0539520Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6276699U (enrdf_load_stackoverflow) 1987-05-16

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