JPH0539520Y2 - - Google Patents
Info
- Publication number
- JPH0539520Y2 JPH0539520Y2 JP16898085U JP16898085U JPH0539520Y2 JP H0539520 Y2 JPH0539520 Y2 JP H0539520Y2 JP 16898085 U JP16898085 U JP 16898085U JP 16898085 U JP16898085 U JP 16898085U JP H0539520 Y2 JPH0539520 Y2 JP H0539520Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- support rod
- cylinder
- case
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001681 protective effect Effects 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 14
- 238000002474 experimental method Methods 0.000 description 5
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Landscapes
- Manipulator (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Sampling And Sample Adjustment (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16898085U JPH0539520Y2 (enrdf_load_stackoverflow) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16898085U JPH0539520Y2 (enrdf_load_stackoverflow) | 1985-10-31 | 1985-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6276699U JPS6276699U (enrdf_load_stackoverflow) | 1987-05-16 |
JPH0539520Y2 true JPH0539520Y2 (enrdf_load_stackoverflow) | 1993-10-06 |
Family
ID=31102364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16898085U Expired - Lifetime JPH0539520Y2 (enrdf_load_stackoverflow) | 1985-10-31 | 1985-10-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0539520Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-10-31 JP JP16898085U patent/JPH0539520Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6276699U (enrdf_load_stackoverflow) | 1987-05-16 |
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