JPH0539520Y2 - - Google Patents

Description

[Detailed description of the invention] (Industrial field of application) This invention relates to a device for moving microscopic substances into and out of a vacuum chamber used for nuclear reaction experiments and the like.

(Prior art) For example, in nuclear reaction experiments, there are cases where it is desired to place a minute substance such as an X-ray source in a vacuum chamber. However, during this process, there is a risk that the tip may come into contact with the wall surrounding the passage and be damaged, and the insertion process requires great care and skill, and the workability has been affected. There was a problem.

(Problems to be Solved by the Invention) This invention is capable of easily inserting and removing minute substances into and out of the vacuum chamber without causing the minute substances to come into contact with the walls of the passage. , to improve workability.

(Means for Solving the Problem) The means for solving the problem of this invention is that a cylindrical body is airtightly supported inside a case provided in a vacuum chamber, and the cylinder body is airtightly supported in the case. A protective guide is fitted in a manner that can be installed and removed airtightly within the body, and a support rod is fitted airtightly into and out of the protective guide.
The apparatus is characterized in that the protective guide is attached to and removed from the cylindrical body while housed in the protective guide.

(Function) The protective guide can be attached to and removed from the cylindrical body while the tip end of the support rod is housed within the protective guide.

(Example) Hereinafter, an example of this invention will be described in detail with reference to the drawings.

FIGS. 1 and 2 show a central longitudinal side view of a device for transferring microscopic substances into and out of a vacuum chamber 1 used for nuclear reaction experiments.
A first vacuum pump 2 and a valve 2a for evacuating the inside are connected in series.

The case 3, which serves as a base for supporting a support rod 7 (described later), is provided with a mounting flange 3a on its rear proximal end side (on the left side in FIGS. 1 and 2), and the chamber 3 is provided with a mounting flange 3a from the mounting hole 1a of the vacuum chamber 1. 1, and the mounting flange 3a
A seal member 4 is interposed between the vacuum chamber 1 and the vacuum chamber 1, and the bolts 5 are used to connect the vacuum chamber 1 in an airtight manner. Furthermore, the mounting flange 3a has a
A handle 3b is provided.

A cylindrical body 6 is housed in the case 3, and a support rod 7 is fitted in the cylindrical body from front to back, and is divided by a valve box 8 into a front member 6a and a rear member 6b. The front member 6a is swingably supported inside the front end of the case 3 via a universal bearing 9. On the other hand, a bellows joint 10 is formed on the front inside of the case 3 so as to airtightly isolate the front member 6a from the inside of the case 3 while allowing some movement. A protruding member 6d is provided to protrude in front of the. An exhaust pipe 11 is connected to the inside of the valve box 8 for removing air from gaps around the inside of the valve box 8 and the outside of the support rod 7 communicating therewith. The exhaust pipe 11 is extended to the outside of the case 3 and connected to a second vacuum pump 12. Note that a joint 13 and a stop valve 14 are interposed in the exhaust pipe 11 in the middle thereof.

A protective guide 1 is further provided on the rear member 6b of the cylinder body 6.
5 is fitted. That is, a flange 6c is formed at the rear end of the rear member 6b on the outside of the case 3, whereas a flange 15a of the protective guide 15 is hermetically sealed by a sealing member 16, and both flanges 6c and 15a are connected with bolts. Mounted by 5.

Furthermore, a support rod 7 is fitted in the protective guide 15 airtightly and slidably back and forth by a sealing member 17. A target support needle 7a is attached.

A rear member 15b extends from the rear of the protective guide 15, and a spring housing cylinder 18 is slidably provided surrounding the rear outer periphery of the rear member. A compression spring 19 is fitted in the spring housing tube 18 between it and a terminal member 15c provided at the rear end of the protective guide 15, and biases the spring housing tube 18 forward with respect to the protective guide 15. It is configured as follows. A screw means 20 is attached to the side of the spring housing cylinder 18 in the front-rear direction. The screw means 20 has a structure similar to that of a well-known micrometer in which a spindle 20b is moved back and forth by rotating a knob 20a. The tip of the spindle 20b is in contact with the rear surface of the flange 15a of the protection guide 15. On the other hand, a handle 21 is fixed to the rear end of the support rod 7.
The spring storage cylinder 18 and the handle 21 are configured to be fixed by screwing in the set screw 18b, or separated by unscrewing the set screw 18b, so that the spring storage cylinder 18 and the handle 21 can be separated by unscrewing the set screw 18b.
By rotating the knob 20a and moving the spindle 20b forward and backward while the support rod 7 is fixed, the longitudinal position of the support rod 7 with respect to the protection guide 15, that is, with respect to the cylinder body 6, can be finely adjusted. A chain 18a is connected between the spring storage tube 18 and the handle 21 to restrict the support rod 7 from being pulled out from the protection guide 15.

Another screw means 22 and a pressing means 23 are attached to the mounting flange 3 in a direction perpendicular to the axis of the flange 6c.
A is provided to constitute a cylindrical body angle adjusting means. In the pressing means 23, a spindle 23b is urged by the spring force of a compression spring 23a compressed and fitted inside, and this spindle 23b is always in contact with the circumferential surface of the flange 6c, and the screw means 2
By moving the spindle 22b forward and backward through the operation in step 2, the horizontal and vertical positions of the flange 6c in FIG. It is.

An on-off valve 24 is rotatably supported within the valve box 8 by a shaft 24a. The shaft 24a is supported in a hermetically sealed manner on the valve body 8. One side of this shaft 24a projects outside the valve box 8, and a worm wheel 25 is integrally provided on that part. Furthermore, the worm 2 that meshes with this worm wheel 25
6 is rotatably supported on the outside of the valve box 8, and an operation shaft 27 integrated with the worm 26 extends to the rear outside of the case 3 via a universal joint 28, and an operation knob 27a is provided at the rear end. ing. Thus, by rotating the operating knob 27a from the outside of the vacuum chamber 1, the worm 26 is rotated, and the worm wheel 25 and the on-off valve 24 are accordingly rotated, so that the on-off valve 24 is in the open state (see the solid line diagram) and The on-off valve 24 is brought into contact with a valve seat 8a that is integrated with the valve box 8 to be in a closed state (see the chain line diagram).

If configured as above, first, set screw 18
By loosening b, the support rod 7 fitted in the protective guide 15 can be pulled out. At this time, the target support needle 7a at the front end of the support rod 7 is left in the state (see chain line illustration) in the protection guide 15, and the protection guide 15
Remove the bolt 5 fixing the support rod 7, and pull out the protection guide 15 with the support rod 7 housed to the rear from the cylinder body 6. Then, the front end portion of the support rod 7 is brought out from the protection guide 15, and a minute substance (for example, an X-ray source) is attached to the target support needle 7a.

Next, move the operation knob 27a to the vacuum chamber 1.
By closing the on-off valve 24 by operating from the outside, the inside of the rear member 6b of the cylinder 6 is hermetically closed (see the chain line in FIG. 1). Then, open the valve 2a and the first
The vacuum pump 2 is operated to evacuate the inside of the vacuum chamber 1. At this time, the protective guide 15 with the distal end of the support rod 7 housed in the protective guide 15 is inserted into the cylinder body 6, and the bolt 5 is inserted into the cylinder body 6.
Attach by fastening. In this state, the valve box 8
The second vacuum pump 1
2 and stop valve 14 to create a vacuum.

Then, operate the operation knob 27a to close the on-off valve 24.
Open the support rod 7, push the support rod 7 forward, and tighten the set screw 18b to integrate it with the spring housing cylinder 18. Furthermore, by operating the screw means 20 provided in the spring housing cylinder 18, the support rod 7 is removed.
Finely adjust the front and back position of the mounting flange 3.
The target support needle 7 can be adjusted by finely adjusting the swing angle of the cylinder 6, that is, the swing angle of the support rod 7, by operating the screw means 22 provided in the
The position of the microscopic substance attached to a in the vacuum chamber 1 is adjusted.

Preparations for the nuclear reaction experiment are now complete, and the experiment can be carried out as appropriate.

In addition, when taking out the support rod 7 for exchanging minute substances, etc., first pull the support rod 7 out into the protection guide 15 in the same way as above, close the on-off valve 24, and then remove the support rod 7 from the protection guide. If the vacuum chamber 1 is pulled out together with the vacuum chamber 15, the inside of the vacuum chamber 1 remains in a vacuum state. Then, when reinserting the support rod 7 into the vacuum chamber 1, the above-described operation may be repeated.

(Effects of the invention) Since this invention is configured as described above, it has a simple structure and can be stored in the protective guide when positioning the target support needle with minute substances attached to it in the vacuum chamber and when taking it in and out of the vacuum chamber. Since the work can be carried out in a closed state, there is no risk of contact with the surrounding walls of the passage during the loading and unloading work, and the workability is improved.

[Brief explanation of drawings]

The drawings all show embodiments of this invention.
Figures 1 and 2 are longitudinal sectional side views of a device for introducing and extracting microscopic substances into the vacuum chamber, Figure 3 is a view taken in the direction of the arrows in Figures 1 and 2, and Figure 4 is a view of the apparatus for introducing and taking minute substances into and out of the vacuum chamber.
It is a sectional view taken along the - line in the figure. 1... Vacuum chamber, 3... Case, 6...
Cylindrical body, 7...Support rod, 15...Protection guide.

Claims (1)

[Claims for Utility Model Registration] (1) A case that is inserted into a vacuum chamber and installed in an airtight manner, a cylindrical body that is airtightly supported to the case inside this case, and an airtight structure that is installed inside this cylindrical body. a protective guide fitted in a removable manner, and a support rod fitted airtightly into and retractable into the protective guide and having a microscopic substance adhered to its tip; 1. A device for taking minute substances into and out of a vacuum chamber, characterized in that the protective guide can be attached to and removed from the cylindrical body while housed in the guide. (2) The cylinder is swingably supported relative to the case by a universal bearing, and is equipped with a cylinder angle adjustment means that is linked to the cylinder and adjusts the swing angle of the cylinder. A device for transferring minute substances into and out of a vacuum chamber as set forth in claim 1.