JPS6244229Y2 - - Google Patents

Description

[Detailed description of the invention] This invention temporarily supplies and discharges a desired fluid to a work head installed on a moving body such as a rotary table at a predetermined position where the work head moves. The present invention relates to a connecting device for connecting fluid passages.

Conventionally, in order to process a large number of objects in a vacuum atmosphere or a specified gas atmosphere, or to fill the objects with a specified gas, a plurality of work heads are provided around the periphery of a rotary table and the work heads are sequentially processed. There is an apparatus in which articles are placed on the work heads and each article is processed or treated in a predetermined manner while each work head makes one revolution. In such devices, when the work head reaches a predetermined rotational position, fluid is sequentially supplied and discharged, but in order to supply and discharge the fluid, a pump, cylinder, etc. is installed, and the fluid supply and discharge source is piped to each work head. Therefore, there was a problem in that the rotary table was configured to support a large amount of weight, and its drive device also required a large output.

For this reason, this idea does not install the fluid supply/drainage source on a moving body such as a rotary table.
For example, even if installed in a fixed position, a fluid passage connection device that allows a fluid supply/discharge source to be easily connected to and disconnected from a work head on a movable body as needed is provided to solve the above problems. The purpose is to solve the problem.

The fluid passage connecting device of this invention includes a first on-off valve which closes the supply/discharge port by being pressed by a spring from inside the supply/discharge port of the supply/discharge portion to which fluid is supplied or discharged; A connecting part that is provided to be driven forward and backward relative to the opening, has an annular tip surface that makes airtight contact with the periphery of the supply/discharge port when moving, and has one end of a fluid passageway connected to a fluid supply/discharge source opened on the inside of the tip surface. and a closed position in which the opening of the connecting portion is brought into contact with and closed from the distal end side, and a closed position in which the opening is closed, and a movement from the closed position to the supply/discharge port side to open the opening and the first opening/closing. a second on-off valve provided so that the valve can be pushed to take an open position in which the supply/discharge port is opened;
The drive unit is coupled to the second on-off valve and provided at the connecting portion so as to move the second on-off valve forward and backward between the closed position and the open position.

In this device, in a disconnected state, the supply/discharge port of the supplied/discharged part is closed by the first on-off valve, and the fluid passage of the connecting part is closed by the second on-off valve. When supplying or discharging fluid to or from the supplied/discharged part, the annular tip surface of the connecting part is brought into airtight contact with the periphery of the supply/discharge port, and the second on-off valve is moved from its closed position to its open position by the driving part. As a result, both the first and second on-off valves are opened, resulting in a connected state in which the fluid passage of the connecting portion and the supplied/discharged portion are in communication. To change from this connected state to a disconnected state, the second on-off valve may be moved from the open position to the closed position by the drive unit. Since both the first and second on-off valves are in the closed state, even if the connection part is retracted, the supply/discharge part and the fluid passage will remain in the first and second on-off valves, respectively.
It is isolated from the outside by an on-off valve, and no fluid flows out or outside air flows into the inside.

Next, one embodiment of this invention will be described with reference to the drawings.

In the figure, 1 is the first on-off valve, 2 is the connection part, and 3
is the second on-off valve.

The first on-off valve 1 is provided with respect to a fluid supply/discharge port 12 of a work head 11 which is a fluid supply/discharge portion provided on the rotary table 10 . A member 14 forming the supply/discharge port 12 is fixed to the table 10, and the peripheral portion of the supply/discharge port 12 is formed into a flat surface 15. The first on-off valve 1 is pressed from inside the supply/discharge port 12 by a spring 16 to close the supply/discharge port 12 .

The connecting portion 2 is provided facing the supply/discharge port 12 corresponding to a predetermined stopping position of the work head 11 . The distal end surface 17 of the connecting portion 2 is formed into a flat surface having an airtight seal 18, and one end of a fluid passage 19 is provided as an opening 19a in the center. This fluid passage 19 is connected to a suitable fluid supply/drainage source 20, and is connected from the connecting portion 12 by a pipe 21. In the figure, 22 is a pipe joint, and 23 is a bellows. This connection part 2 is a guide 2 provided at a fixed position.
5, the lower end of the figure is connected to an air cylinder separately provided on the stationary side, and the air cylinder moves forward and backward along the guide 25 by the operation of the air cylinder. ing. During its advancement, the distal end surface 17 becomes the plane 15.
are pressed against each other, and are in airtight contact with each other by the airtight seal 18 interposed therebetween. In the figure, 27 is the piston rod of the air cylinder. The configuration in which the bellows 23 described above is provided is to allow the tip portion 2a of the connecting portion 2 to be slightly tilted to ensure airtight contact.
The tip portion 2a is supported by a plurality of bolts 28 when movable, and receives a pressing force via a coil spring 29.

The second on-off valve 3 has an opening 19a at the tip of the connection part 2.
It is provided so as to be closed from the distal end side, and has a drive section 31 connected via a rod 30. The driving part 31 is an air cylinder formed in the connecting part 2, and in the figure, 32 is a piston, 33, 34
is the air supply/discharge pipe connection. As the piston 32 moves forward, the second on-off valve 3 is moved forward via the rod 30 and is opened.
The second on-off valve 3 is large enough to fit into the supply/discharge port 12, and when the connecting portion 2 is advanced, the second on-off valve 3
When the valve is moved forward, the first on-off valve 1 is opened and the opening 19a is also opened, so that the two communicate with each other.

The fluid passage connecting device configured in this way is
For example, when evacuating the work head 11 side, at a predetermined stop position of the work head 11 of the turntable 10 that rotates intermittently, the supply/discharge port 1 is opened.
2, the connecting portion 2 is placed in an advanced state so that the tip end surface 17 is aligned with the flat surface 15 as shown in the figure, and a vacuum pump is connected as a fluid supply/discharge source 20. Furthermore, prior to the rotation of the turntable 10, the second on-off valve 3 is brought into the closed state as shown in the figure, and then,
The connecting portion 2 is moved back from the forward position shown in the figure to the standby position. The connection operation is performed each time the work head 11 sequentially moves to that position.
advances along the guide 25 to reach the state shown in the figure, and then the second on-off valve 3 is advanced by the drive unit 31 and pushes the first on-off valve 1, so that both are in the open state and the work head 11 and the vacuum are connected. It communicates with the pump. After the second on-off valve 3 is retracted by the drive unit 31 after exhausting for a predetermined time, the connecting portion 2 is retracted to the standby position.
Then, the turntable 10 rotates one pitch.
When the second on-off valve 3 retreats, the first on-off valve 1 is activated by the spring 1.
Since the work head 11 is closed by the action of 6, the work head 11 which has been brought into a vacuum state is maintained in that state until it reaches the next rotational position and undergoes a predetermined process.

In addition, when using this fluid passage connection device to supply a predetermined gas to the work head 11 side, for example, the work head 11 side is evacuated by the above-mentioned means and then connected to another connection point at the next position. The gas supply source may be connected through the gas supply/discharge port 2, but in this case, since air is contained in the supply/discharge port 12 shown in the figure, it may be necessary to remove the air. In such a case, a vacuum exhaust passage 40 and a vacuum exhaust source 41 shown in phantom lines in the figure are provided at the tip 2a of the connecting portion 2.
may be provided, and a predetermined gas supply source may be provided as the fluid supply/discharge source 20. By doing this, the inside of the supply/discharge port 12 is evacuated in advance, and when the second on-off valve 3 is moved forward, a predetermined gas is supplied to the work head 11 side.

As mentioned above, when using this fluid passage connecting device, fluid can be supplied and discharged by connecting a vacuum exhaust source or a fluid supply source to the work head 11 at a specific position, and after the fluid is supplied and discharged, the The connection is severed. Therefore, in the conventional construction of a workbench in which a work head is provided on a turntable, there is no need to mount a vacuum exhaust source, a fluid supply source, etc. on the turntable, and the turntable can be made compact.
Can be driven with small power. Further, even when a work head is installed on a moving body such as a conveyor other than a turntable, fluid can be supplied and discharged.

As described above, when this invention is used, the side to which fluid is supplied and discharged and the fluid supply and discharge source move relative to each other, and the relative movement is stopped for a certain period of time. Since the fluid passage can be connected and disconnected during the period when the machine is stopped, it is particularly applicable to devices that supply and discharge fluid to and from a mobile work head, so that the fluid supply and discharge source is separate from the mobile work head side. Therefore, there is no need to provide a fluid supply/discharge source on the movable body that moves while supporting the work head, and it is possible to reduce the size and weight of a movable body such as a turntable on which the work head is installed, and to reduce the weight of the movable body. It is possible to provide a fluid passage connection device that is very effective in downsizing the drive unit of a moving body.

[Brief explanation of the drawing]

The figure is a longitudinal sectional side view of the main part of one embodiment of this invention. 1...First on-off valve, 2...Connection part, 3...Second
Opening/closing valve, 11... Working head (supply/discharge part), 12
... Supply and discharge port, 17 ... Tip surface, 18 ... Airtight seal, 19 ... Fluid passage, 20 ... Fluid supply and discharge source, 3
1... Drive unit.

Claims (1)

[Scope of utility model registration request] A first on-off valve that is pressed by a spring from inside the supply/discharge port of the supply/discharge portion to which fluid is supplied or discharged to close the supply/discharge port, and a first on-off valve provided to be driven forward and backward with respect to the supply/discharge port. A connecting part has an annular tip surface that comes into airtight contact with the periphery of the supply/discharge port as it advances, and one end of the fluid passage connected to the fluid supply/discharge source is opened on the inside of the tip surface, and the opening of the connecting part is connected to the tip. A closed position in which the opening is closed by abutment from the side, and a closed position in which the opening is closed by moving toward the supply/discharge port side to open the opening and pushing the first on-off valve to open the supply/discharge port. a second on-off valve provided so as to be able to take an open position; and a drive provided on the connecting portion so as to be coupled to the second on-off valve and move the second on-off valve forward and backward between the closed position and the open position. The connection position of the fluid passage between the two parts.