JPH0346353Y2 - - Google Patents

Description

[Detailed description of the invention] (Field of industrial application) This invention relates to a device for moving minute substances into and out of vacuum chambers used for nuclear reaction experiments and for positioning them.

(Prior Art) For example, in nuclear reaction experiments, there is a demand for placing a minute substance such as an X-ray source at a predetermined position within a vacuum chamber. Conventionally, a gear mechanism or the like was used to determine the position from outside the vacuum chamber.
The structure is complicated, and it is necessary to open the vacuum chamber to add new minute substances, which is troublesome.
Workability was low.

(Purpose of the invention) This invention has a simple structure, allows the positioning of minute substances within the vacuum chamber, and also allows the minute substances to be easily taken in and out of the vacuum chamber. The purpose of this invention is to provide a device for taking in and out and positioning.

(Disclosure of the invention) In order to achieve the above-mentioned purpose, this invention
Inside a case airtightly provided in a vacuum chamber, a cylindrical body is swingably supported by a universal bearing such as a gimbal mechanism and hermetically sealed against the case. A support rod is movable in and out of the case and is hermetically fitted into the cylindrical body, a valve box is airtightly interposed in the middle of the cylindrical body, and an on-off valve is provided within the valve box. The opening/closing valve is characterized in that an operating means external to the vacuum chamber is linked, and the cylinder body is configured to be swung by a cylinder position adjusting means provided outside the vacuum chamber. .

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows the overall configuration of a device for moving microscopic substances into and out of a vacuum chamber 1 used for nuclear reaction experiments and for positioning the vacuum chamber 1. is connected.

3 is a case, which is provided with a mounting flange 3a on its base end side (left side in FIG. 1), and is inserted into the interior through the mounting hole 1a of the vacuum chamber 1;
A sealing member 4 is interposed between the mounting flange 3a and the vacuum chamber 1, and the mounting flange 3a and the vacuum chamber 1 are hermetically fastened with bolts 5.

A cylindrical body 6 is fitted with a support rod 7, and is divided by a valve box 8 into a front member 6a and a rear member 6b. The front member 6a is swingably supported inside the case 3 via a universal bearing 9. On the other hand, a front support member 11 that is allowed to move slightly by a bellows joint 10 is formed at the front end of the case 3, and the front end of the front member 6a is airtightly connected to the front support member 11 via a seal member 23. Supported. Near the valve box 8 of the rear member 6b, there is an exhaust pipe 1 for eliminating air in gaps around the support rod 7 that communicates with the inside of the valve box 8.
2 is open. The exhaust pipe 12 is extended to the outside of the case 3 and connected to a second vacuum pump 13. Note that a bellows joint 14 is interposed in the middle of the exhaust pipe 12.

An inner cylinder 15 is further fitted into the rear member 6b of the cylinder 6. That is, the inner cylinder 15 is airtightly sealed to the rear member 6b by the seal member 16, and the inner cylinder 15 is sealed to the rear member 6b by the pin 17.
Although the mutual rotation is held against the rear member 6
By screwing together with a female threaded member 18 which is rotatably loosely fitted to b, the inner cylinder 15 can be moved forward and backward by rotation of the female threaded member 18.

The vicinity of the rear end of the inner cylinder 15 is kept airtight with the support rod 7 by a seal member 19. Thus, when the on-off valve 20 is closed, the inside of the valve box 8, the gap between the rear member 6b communicating with the inside of the valve box 8, and the inner cylinder 15, and the gap between the inner cylinder 15 and the support rod 7 are filled by the seal member 16. , 19, and a vacuum is created by the second vacuum pump 13. Also,
A set bolt 21 is provided at the rear end of the inner cylinder 15 to prevent the support rod 7 from coming off. Further, the rear ends of the support rod 7 and the inner cylinder 15 are connected to each other by a chain 22 to prevent the support rod 7 from slipping out unnecessarily. Thus, by rotating the female threaded member 18, the inner cylinder 1
5 and the set bolt 21 to finely adjust the longitudinal position of the support rod 7 fixed to the inner cylinder 15.

A collection chuck 24 is provided at the front end of the support rod 7. A holding needle 25 is attached to the collecting chuck 24, and a minute substance (for example, an X-ray source) is attached to the tip of the holding needle 25.

A rotating shaft 20a integral with the on-off valve 20 is hermetically sealed by a sealing member 26 and supported by the valve box 8, passing through the valve box 8.
A worm wheel 27 is integrally provided on the outwardly projecting portion of the valve box 8. Further, a worm 28 that meshes with this worm wheel 27 is rotatably supported outside the valve box 8.
An operating shaft 29 integrated with the vacuum chamber 8 extends to the outside of the vacuum chamber 1, and an operating knob 30 as an operating means is provided at the outer end of the operating shaft 29. Thus, by rotating the operating knob 30 from outside the vacuum chamber 1 and rotating the operating shaft 29, the worm 28 is rotated, the worm wheel 7 is rotated, and the on-off valve 20 is oscillated to open and close. It's getting old.

A cylindrical surface 6c is formed in a portion of the rear member 6b of the cylindrical body 6 that protrudes to the outside of the case 3, and two screw means 31, 31 and one pressing means 32 are formed so as to contact this cylindrical surface 6c from three directions. is attached to the outer surface of the mounting flange 3a, and the screw means 31, 31 and the pressing means 32 constitute a cylindrical body position adjusting means 33. The screw means 31 has a structure similar to a well-known micrometer that moves the spindle back and forth, and by rotating the knob 34, the spindle 35 moves back and forth with the tip of the spindle 35 in contact with the cylindrical surface 6c. In the pressing means 32, a spindle 37 is biased by the spring force of a compression spring 36 compressed inside, so that the spindle 37 constantly contacts and presses the cylindrical surface 6c. The two screw means 31 can finely adjust the swing angle of the cylindrical body around the universal bearing 9 by moving each spindle 35 back and forth.
This makes it possible to position the minute substance at the tip of the support rod 7 on a spherical surface centered on the universal bearing 9.

A handle 38 is provided on the mounting flange 3a, and an operating knob 30 is connected to the handle 38 by a chain 39.

With the above configuration, first, the support rod 7 loosely fitted in the cylinder 6 is inserted into the vacuum chamber 1.
By retreating to the outside and taking it out, a minute substance (for example, an X-ray source) is attached to the tip of the support rod 7, that is, the holding needle 25.

Next, the operating knob 30 is operated from the outside of the vacuum chamber 1 to airtightly close the middle of the cylinder 6 using the on-off valve 20 (see the chain line in FIG. 1). After that, the inside of the vacuum chamber 1 is evacuated. At this time, the support rod 7 is simultaneously inserted into the cylinder body 6 up to the front of the valve box 8 (see the chain line in FIG. 1). In this state,
Inside the valve box 8, a rear member 6 communicating with the valve box 8
The gap between the inner tube 15 and the inner tube 15 and the gap between the inner tube 15 and the support rod 7 are kept in a vacuum.

Then, the operation knob 30 is operated to open the on-off valve 20, and the support rod 7 is advanced to a predetermined position within the vacuum chamber 1. Further, by adjusting the swing angle of the cylinder 6 by rotating the knob 34, the tip position of the support rod 7 loosely fitted within the cylinder 6 is adjusted to a predetermined position in the vacuum chamber 1.

Preparations for the nuclear reaction experiment are now complete, and the experiment can be carried out as appropriate.

In addition, when removing the support rod 7 for replacing minute substances, etc., first pull the support rod 7 out to the position in front of the valve box 8 (the position indicated by the chain line in Figure 1), close the on-off valve 20, and then remove the support rod 7. 7 to the outside, the inside of the vacuum chamber 1 remains in a vacuum state. Then, when reinserting the support rod 7 into the vacuum chamber 1, the above-described operations may be repeated.

(Effects of the invention) Since this invention is configured as described above, even with a simple structure, it can be used for positioning minute substances within a vacuum chamber and for exchanging minute substances while maintaining the vacuum in the vacuum chamber. The support rod can be taken in and out, improving the efficiency of experiments, etc.

[Brief explanation of drawings]

The drawings all show embodiments of this invention.
The figure is a longitudinal side view of a device for moving and positioning minute substances into and out of a vacuum chamber, FIG. 2 is a cross-sectional view taken along the - line in FIG. 1, and FIG. 3 is a front view taken in the direction of the arrow in FIG. 1... Vacuum chamber, 3... Case, 9...
Universal bearing, 6...Cylinder body, 7...Support rod, 8...Valve box.

Claims (1)

[Scope of utility model registration request] A case that is inserted into a vacuum chamber and installed airtightly, a cylinder that is rotatably supported on the inside of the case by a universal bearing and airtightly supported against the case, and a cylinder inside and outside of the case. A support rod that is freely movable and retractable and is fitted airtightly into the cylindrical body and has a minute substance adhered to its tip, and a vacuum chamber that is airtightly interposed in the middle of the cylindrical body and connected to an external operating means for opening and closing. 1. A device for moving microscopic substances into and out of a vacuum chamber and for positioning the same, comprising: a valve box having a valve; and a cylinder position adjusting means that is linked to the cylinder and swings the cylinder.