JPH0399763U

JPH0399763U -

Info

Publication number: JPH0399763U
Application number: JP912190U
Authority: JP
Priority date: 1990-02-01
Filing date: 1990-02-01
Publication date: 1991-10-18

Description

[Brief explanation of the drawing]

第１図は、本考案の実施例を示す縦断面図、第
２図は、同横断面図、第３図は、従来のものを示
す縦断面図、第４図は、同横断面図である。尚、図中１１は真空チヤンバー、１２は扉、１
３は治具台車、１４は固定バー、１５は集電板、
１６は固定シリンダー、１７はフツク、１８は軸
、１９はアーム、２０は集電コレクター、２１は
ストツパー、２２は真空弁、２３は真空ポンプで
ある。 Fig. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, Fig. 2 is a cross-sectional view of the same, Fig. 3 is a longitudinal cross-sectional view of the conventional one, and Fig. 4 is a cross-sectional view of the same. be. In the figure, 11 is a vacuum chamber, 12 is a door, and 1
3 is a jig cart, 14 is a fixed bar, 15 is a current collector plate,
16 is a fixed cylinder, 17 is a hook, 18 is a shaft, 19 is an arm, 20 is a collector, 21 is a stopper, 22 is a vacuum valve, and 23 is a vacuum pump.

Claims

[Scope of Claim for Utility Model Registration] In a jig trolley fixing and voltage application mechanism that introduces a jig trolley into a vacuum chamber, fixes it in a fixed position, and applies voltage, the rotational drive source is provided outside the chamber. a hook connected to the rotary drive source and rotatably installed in the chamber; a fixing bar provided to rotationally lock the hook on the jig cart; a stopper installed to stop the cart at a fixed position; a current collector plate provided on the jig cart; and a current collector plate when the jig cart is fixed in the fixed position in the chamber by the hook. A jig trolley fixing and voltage application mechanism, comprising: a current collector installed so as to be pressed by voltage application contact pressure;