JPH0399763U - - Google Patents
Info
- Publication number
- JPH0399763U JPH0399763U JP912190U JP912190U JPH0399763U JP H0399763 U JPH0399763 U JP H0399763U JP 912190 U JP912190 U JP 912190U JP 912190 U JP912190 U JP 912190U JP H0399763 U JPH0399763 U JP H0399763U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- cart
- chamber
- current collector
- hook
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第1図は、本考案の実施例を示す縦断面図、第
2図は、同横断面図、第3図は、従来のものを示
す縦断面図、第4図は、同横断面図である。
尚、図中11は真空チヤンバー、12は扉、1
3は治具台車、14は固定バー、15は集電板、
16は固定シリンダー、17はフツク、18は軸
、19はアーム、20は集電コレクター、21は
ストツパー、22は真空弁、23は真空ポンプで
ある。
Fig. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, Fig. 2 is a cross-sectional view of the same, Fig. 3 is a longitudinal cross-sectional view of the conventional one, and Fig. 4 is a cross-sectional view of the same. be. In the figure, 11 is a vacuum chamber, 12 is a door, and 1
3 is a jig cart, 14 is a fixed bar, 15 is a current collector plate,
16 is a fixed cylinder, 17 is a hook, 18 is a shaft, 19 is an arm, 20 is a collector, 21 is a stopper, 22 is a vacuum valve, and 23 is a vacuum pump.
Claims (1)
に固定するとともに電圧を印加する治具台車の固
定及び電圧印加機構において、 前記チヤンバー外部に設けられた回転駆動源と
、 前記チヤンバー内に前記回転駆動源に連結され
て回転可能に設置されたフツクと、 前記治具台車に前記フツクが回転係止するよう
設けられた固定バーと、 前記チヤンバー内に前記治具台車を定位置で停
止するよう設置されたストツパーと、 前記治具台車に設けられた集電板と、 前記チヤンバー内に前記治具台車が前記フツク
により定位置に固定されたとき前記集電板が電圧
印加接点圧で押付けられるよう設置された集電コ
レクターとを備えてなることを特徴とする治具台
車の固定及び電圧印加機構。[Scope of Claim for Utility Model Registration] In a jig trolley fixing and voltage application mechanism that introduces a jig trolley into a vacuum chamber, fixes it in a fixed position, and applies voltage, the rotational drive source is provided outside the chamber. a hook connected to the rotary drive source and rotatably installed in the chamber; a fixing bar provided to rotationally lock the hook on the jig cart; a stopper installed to stop the cart at a fixed position; a current collector plate provided on the jig cart; and a current collector plate when the jig cart is fixed in the fixed position in the chamber by the hook. A jig trolley fixing and voltage application mechanism, comprising: a current collector installed so as to be pressed by voltage application contact pressure;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP912190U JPH0399763U (en) | 1990-02-01 | 1990-02-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP912190U JPH0399763U (en) | 1990-02-01 | 1990-02-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0399763U true JPH0399763U (en) | 1991-10-18 |
Family
ID=31512726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP912190U Pending JPH0399763U (en) | 1990-02-01 | 1990-02-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0399763U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010036051A (en) * | 2008-07-31 | 2010-02-18 | Hitachi Koki Co Ltd | Centrifugal separator |
-
1990
- 1990-02-01 JP JP912190U patent/JPH0399763U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010036051A (en) * | 2008-07-31 | 2010-02-18 | Hitachi Koki Co Ltd | Centrifugal separator |
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