JPH0539473Y2 - - Google Patents
Info
- Publication number
- JPH0539473Y2 JPH0539473Y2 JP1986196419U JP19641986U JPH0539473Y2 JP H0539473 Y2 JPH0539473 Y2 JP H0539473Y2 JP 1986196419 U JP1986196419 U JP 1986196419U JP 19641986 U JP19641986 U JP 19641986U JP H0539473 Y2 JPH0539473 Y2 JP H0539473Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- pressure sensor
- circuit network
- substrate
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000008188 pellet Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 230000008646 thermal stress Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986196419U JPH0539473Y2 (US07816562-20101019-C00012.png) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986196419U JPH0539473Y2 (US07816562-20101019-C00012.png) | 1986-12-19 | 1986-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399252U JPS6399252U (US07816562-20101019-C00012.png) | 1988-06-27 |
| JPH0539473Y2 true JPH0539473Y2 (US07816562-20101019-C00012.png) | 1993-10-06 |
Family
ID=31155223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986196419U Expired - Lifetime JPH0539473Y2 (US07816562-20101019-C00012.png) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539473Y2 (US07816562-20101019-C00012.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS61230383A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体センサ |
-
1986
- 1986-12-19 JP JP1986196419U patent/JPH0539473Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS61230383A (ja) * | 1985-04-05 | 1986-10-14 | Yokogawa Electric Corp | 半導体センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6399252U (US07816562-20101019-C00012.png) | 1988-06-27 |
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