JPH0537469Y2 - - Google Patents

Info

Publication number
JPH0537469Y2
JPH0537469Y2 JP1990106361U JP10636190U JPH0537469Y2 JP H0537469 Y2 JPH0537469 Y2 JP H0537469Y2 JP 1990106361 U JP1990106361 U JP 1990106361U JP 10636190 U JP10636190 U JP 10636190U JP H0537469 Y2 JPH0537469 Y2 JP H0537469Y2
Authority
JP
Japan
Prior art keywords
cup
waste liquid
rotating
rotary
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990106361U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463633U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990106361U priority Critical patent/JPH0537469Y2/ja
Publication of JPH0463633U publication Critical patent/JPH0463633U/ja
Application granted granted Critical
Publication of JPH0537469Y2 publication Critical patent/JPH0537469Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990106361U 1990-10-08 1990-10-08 Expired - Lifetime JPH0537469Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990106361U JPH0537469Y2 (pm) 1990-10-08 1990-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990106361U JPH0537469Y2 (pm) 1990-10-08 1990-10-08

Publications (2)

Publication Number Publication Date
JPH0463633U JPH0463633U (pm) 1992-05-29
JPH0537469Y2 true JPH0537469Y2 (pm) 1993-09-22

Family

ID=31852423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990106361U Expired - Lifetime JPH0537469Y2 (pm) 1990-10-08 1990-10-08

Country Status (1)

Country Link
JP (1) JPH0537469Y2 (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7793610B2 (en) * 2006-04-18 2010-09-14 Tokyo Electron Limited Liquid processing apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59120270A (ja) * 1982-12-27 1984-07-11 Fujitsu Ltd スピン塗布装置
JPH02219213A (ja) * 1989-02-20 1990-08-31 Fujitsu Ltd レジスト塗布装置

Also Published As

Publication number Publication date
JPH0463633U (pm) 1992-05-29

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