JPH0535585B2 - - Google Patents

Info

Publication number
JPH0535585B2
JPH0535585B2 JP21283884A JP21283884A JPH0535585B2 JP H0535585 B2 JPH0535585 B2 JP H0535585B2 JP 21283884 A JP21283884 A JP 21283884A JP 21283884 A JP21283884 A JP 21283884A JP H0535585 B2 JPH0535585 B2 JP H0535585B2
Authority
JP
Japan
Prior art keywords
electrode
main
main electrode
ionization
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21283884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6190481A (ja
Inventor
Yukio Sato
Hitoshi Wakata
Takeo Haruta
Haruhiko Nagai
Hajime Nakatani
Toshio Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21283884A priority Critical patent/JPS6190481A/ja
Publication of JPS6190481A publication Critical patent/JPS6190481A/ja
Publication of JPH0535585B2 publication Critical patent/JPH0535585B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP21283884A 1984-10-09 1984-10-09 パルスレ−ザ発振器 Granted JPS6190481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21283884A JPS6190481A (ja) 1984-10-09 1984-10-09 パルスレ−ザ発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21283884A JPS6190481A (ja) 1984-10-09 1984-10-09 パルスレ−ザ発振器

Publications (2)

Publication Number Publication Date
JPS6190481A JPS6190481A (ja) 1986-05-08
JPH0535585B2 true JPH0535585B2 (en:Method) 1993-05-26

Family

ID=16629182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21283884A Granted JPS6190481A (ja) 1984-10-09 1984-10-09 パルスレ−ザ発振器

Country Status (1)

Country Link
JP (1) JPS6190481A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6484677A (en) * 1987-09-28 1989-03-29 Agency Ind Science Techn Gas laser oscillator
JPH04177773A (ja) * 1990-11-09 1992-06-24 Mitsubishi Electric Corp パルスレーザ用スイッチ

Also Published As

Publication number Publication date
JPS6190481A (ja) 1986-05-08

Similar Documents

Publication Publication Date Title
JP3353253B2 (ja) 気体パルスレーザーのプレイオン化装置
EP0283044B1 (en) Laser apparatus
US4468776A (en) Reinjection laser oscillator and method
JPH0535585B2 (en:Method)
JPH0237707B2 (en:Method)
JPS6343903B2 (en:Method)
JPS6364065B2 (en:Method)
JPH0528514B2 (en:Method)
JP3432854B2 (ja) パルスガスレーザ発振装置
JP3771690B2 (ja) パルスレーザの放電回路
JP2614231B2 (ja) ガスレーザ装置
JP2002151768A (ja) 露光用フッ素レーザ装置
JPH0337318B2 (en:Method)
JP2000077754A (ja) レーザ装置
JP3159528B2 (ja) 放電励起エキシマレーザ装置
JP2753088B2 (ja) パルスガスレーザ発振装置
JPS6281077A (ja) Ｘ線自動予備電離式放電型レ−ザ−
JPH01214180A (ja) パルスレーザ発振装置
JPH0276281A (ja) パルスレーザ発振装置
JPH02105477A (ja) パルスレーザ発振装置
JPS60187076A (ja) ガスレ−ザ装置
JPS6218781A (ja) レ−ザ発振器
JPS63217681A (ja) パルスガスレ−ザ装置
JPH0318072A (ja) パルスレーザ装置
JPH05259554A (ja) 高繰返しパルスレーザ電極

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees