JPH0535217B2 - - Google Patents

Info

Publication number
JPH0535217B2
JPH0535217B2 JP3111886A JP3111886A JPH0535217B2 JP H0535217 B2 JPH0535217 B2 JP H0535217B2 JP 3111886 A JP3111886 A JP 3111886A JP 3111886 A JP3111886 A JP 3111886A JP H0535217 B2 JPH0535217 B2 JP H0535217B2
Authority
JP
Japan
Prior art keywords
deposited
reactive gas
vapor
deposition apparatus
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3111886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188774A (ja
Inventor
Hiromoto Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3111886A priority Critical patent/JPS62188774A/ja
Publication of JPS62188774A publication Critical patent/JPS62188774A/ja
Publication of JPH0535217B2 publication Critical patent/JPH0535217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3111886A 1986-02-13 1986-02-13 蒸着装置 Granted JPS62188774A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3111886A JPS62188774A (ja) 1986-02-13 1986-02-13 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3111886A JPS62188774A (ja) 1986-02-13 1986-02-13 蒸着装置

Publications (2)

Publication Number Publication Date
JPS62188774A JPS62188774A (ja) 1987-08-18
JPH0535217B2 true JPH0535217B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=12322489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3111886A Granted JPS62188774A (ja) 1986-02-13 1986-02-13 蒸着装置

Country Status (1)

Country Link
JP (1) JPS62188774A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03245523A (ja) * 1990-02-22 1991-11-01 Mitsubishi Electric Corp 量子井戸構造の製造方法

Also Published As

Publication number Publication date
JPS62188774A (ja) 1987-08-18

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