JPH0532184B2 - - Google Patents

Info

Publication number
JPH0532184B2
JPH0532184B2 JP61114647A JP11464786A JPH0532184B2 JP H0532184 B2 JPH0532184 B2 JP H0532184B2 JP 61114647 A JP61114647 A JP 61114647A JP 11464786 A JP11464786 A JP 11464786A JP H0532184 B2 JPH0532184 B2 JP H0532184B2
Authority
JP
Japan
Prior art keywords
dielectric film
processed
covering member
workpiece
electrostatic chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61114647A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61257733A (ja
Inventor
Kosuke Ooshio
Osamu Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd, Nippon Telegraph and Telephone Corp filed Critical Shibaura Engineering Works Co Ltd
Priority to JP11464786A priority Critical patent/JPS61257733A/ja
Publication of JPS61257733A publication Critical patent/JPS61257733A/ja
Publication of JPH0532184B2 publication Critical patent/JPH0532184B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP11464786A 1986-05-21 1986-05-21 静電チヤツク Granted JPS61257733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11464786A JPS61257733A (ja) 1986-05-21 1986-05-21 静電チヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11464786A JPS61257733A (ja) 1986-05-21 1986-05-21 静電チヤツク

Publications (2)

Publication Number Publication Date
JPS61257733A JPS61257733A (ja) 1986-11-15
JPH0532184B2 true JPH0532184B2 (enrdf_load_html_response) 1993-05-14

Family

ID=14643037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11464786A Granted JPS61257733A (ja) 1986-05-21 1986-05-21 静電チヤツク

Country Status (1)

Country Link
JP (1) JPS61257733A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743692Y2 (ja) * 1987-03-31 1995-10-09 株式会社ニコン 顕微鏡ステ−ジ
JPH03187240A (ja) * 1989-12-18 1991-08-15 Nikon Corp 静電チヤツク
JP2577093Y2 (ja) * 1991-04-04 1998-07-23 日本カーボン株式会社 研磨用バキュームチャック
JPH05200642A (ja) * 1992-01-22 1993-08-10 Shin Etsu Chem Co Ltd 半導体基板研磨機

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139641A (ja) * 1983-01-31 1984-08-10 Fujitsu Ltd 静電吸着装置の製造方法

Also Published As

Publication number Publication date
JPS61257733A (ja) 1986-11-15

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