JPH0531825B2 - - Google Patents
Info
- Publication number
- JPH0531825B2 JPH0531825B2 JP60235757A JP23575785A JPH0531825B2 JP H0531825 B2 JPH0531825 B2 JP H0531825B2 JP 60235757 A JP60235757 A JP 60235757A JP 23575785 A JP23575785 A JP 23575785A JP H0531825 B2 JPH0531825 B2 JP H0531825B2
- Authority
- JP
- Japan
- Prior art keywords
- trench
- silicon
- deposited
- film
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23575785A JPS6294955A (ja) | 1985-10-21 | 1985-10-21 | 素子分離方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23575785A JPS6294955A (ja) | 1985-10-21 | 1985-10-21 | 素子分離方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294955A JPS6294955A (ja) | 1987-05-01 |
| JPH0531825B2 true JPH0531825B2 (enrdf_load_html_response) | 1993-05-13 |
Family
ID=16990781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23575785A Granted JPS6294955A (ja) | 1985-10-21 | 1985-10-21 | 素子分離方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294955A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105431376B (zh) * | 2013-07-26 | 2018-08-31 | 3M创新有限公司 | 制备纳米结构和纳米结构化制品的方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5513904A (en) * | 1978-07-17 | 1980-01-31 | Hitachi Ltd | Semiconductor device and its manufacturing method |
-
1985
- 1985-10-21 JP JP23575785A patent/JPS6294955A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6294955A (ja) | 1987-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |