JPH0531317B2 - - Google Patents
Info
- Publication number
- JPH0531317B2 JPH0531317B2 JP12709284A JP12709284A JPH0531317B2 JP H0531317 B2 JPH0531317 B2 JP H0531317B2 JP 12709284 A JP12709284 A JP 12709284A JP 12709284 A JP12709284 A JP 12709284A JP H0531317 B2 JPH0531317 B2 JP H0531317B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light emitting
- bonding pad
- electrode
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 22
- 230000000903 blocking effect Effects 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 239000007772 electrode material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 8
- 229910017401 Au—Ge Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59127092A JPS615585A (ja) | 1984-06-19 | 1984-06-19 | 発光半導体素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59127092A JPS615585A (ja) | 1984-06-19 | 1984-06-19 | 発光半導体素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS615585A JPS615585A (ja) | 1986-01-11 |
JPH0531317B2 true JPH0531317B2 (bg) | 1993-05-12 |
Family
ID=14951380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59127092A Granted JPS615585A (ja) | 1984-06-19 | 1984-06-19 | 発光半導体素子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS615585A (bg) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5309001A (en) * | 1991-11-25 | 1994-05-03 | Sharp Kabushiki Kaisha | Light-emitting diode having a surface electrode of a tree-like form |
JP2002515181A (ja) * | 1996-06-05 | 2002-05-21 | サーノフ コーポレイション | 発光半導体装置 |
US6087680A (en) * | 1997-01-31 | 2000-07-11 | Siemens Aktiengesellschaft | Led device |
US6430207B1 (en) | 1998-09-23 | 2002-08-06 | Sarnoff Corporation | High-power laser with transverse mode filter |
DE10056292A1 (de) * | 2000-11-14 | 2002-09-19 | Osram Opto Semiconductors Gmbh | Lumineszenzdiode |
CN100449805C (zh) * | 2006-11-08 | 2009-01-07 | 吴质朴 | 铝镓铟磷系化合物半导体发光器的制造方法 |
CN101286541B (zh) * | 2007-04-09 | 2012-04-11 | 晶元光电股份有限公司 | 具有叠合透明电极的半导体发光装置 |
JP6441999B2 (ja) * | 2017-06-14 | 2018-12-19 | ローム株式会社 | 半導体発光素子 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5361039A (en) * | 1976-11-01 | 1978-06-01 | Cook Electric Co | Circuit protector |
JPS579233A (en) * | 1980-06-19 | 1982-01-18 | Tokyo Shibaura Electric Co | Battery charging device |
-
1984
- 1984-06-19 JP JP59127092A patent/JPS615585A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5361039A (en) * | 1976-11-01 | 1978-06-01 | Cook Electric Co | Circuit protector |
JPS579233A (en) * | 1980-06-19 | 1982-01-18 | Tokyo Shibaura Electric Co | Battery charging device |
Also Published As
Publication number | Publication date |
---|---|
JPS615585A (ja) | 1986-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |