JPH0531263B2 - - Google Patents
Info
- Publication number
- JPH0531263B2 JPH0531263B2 JP58099063A JP9906383A JPH0531263B2 JP H0531263 B2 JPH0531263 B2 JP H0531263B2 JP 58099063 A JP58099063 A JP 58099063A JP 9906383 A JP9906383 A JP 9906383A JP H0531263 B2 JPH0531263 B2 JP H0531263B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- scanning
- period
- output
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 4
- 238000003705 background correction Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 7
- 238000005070 sampling Methods 0.000 description 6
- 238000007493 shaping process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58099063A JPS59224038A (ja) | 1983-06-02 | 1983-06-02 | 荷電粒子線走査型分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58099063A JPS59224038A (ja) | 1983-06-02 | 1983-06-02 | 荷電粒子線走査型分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59224038A JPS59224038A (ja) | 1984-12-15 |
JPH0531263B2 true JPH0531263B2 (fr) | 1993-05-12 |
Family
ID=14237297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58099063A Granted JPS59224038A (ja) | 1983-06-02 | 1983-06-02 | 荷電粒子線走査型分析装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59224038A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2418061B (en) * | 2004-09-03 | 2006-10-18 | Zeiss Carl Smt Ltd | Scanning particle beam instrument |
US8125518B2 (en) | 2008-12-15 | 2012-02-28 | Hitachi High-Technologies Corporation | Scanning electron microscope |
JP6298601B2 (ja) * | 2013-07-12 | 2018-03-20 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1983
- 1983-06-02 JP JP58099063A patent/JPS59224038A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59224038A (ja) | 1984-12-15 |
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