JPH05309535A - Machine tool - Google Patents

Abstract

PURPOSE:To provide a cup wheel type cutter head which makes machining processes shorter, can machine any material hard or soft, can perform twin machining, and can perform ultra precision machining in micron. CONSTITUTION:A cup wheel type grinding stone 4 is mounted onto one shaft of a spindle 3 capable of being slid, a plural number of cutters 7 are fixed on the other shafts of the spindle 3 while being projected toward the circular top face of a base table 6, and a cup wheel type cutter 5 is also so mounted that each cutting edge is located at places different in radius from its center, and each inner cutting edge is disposed while being projected ahead beyond each outer cutting edge. The cutting edges of each of paired cutters within the cutter 5 are disposed at places identical in radius from its center, each cutting edge of the other cutters is disposed at places different in radius from its center, and each inner cutting edge is concurrently projected ahead beyond each outer cutting edge. A work W is mounted onto the rotating vacuum chucks of a rotary table 12 which is intermittently rotated. The aforementioned machine tool is also equipped with a supply/delivery and transshipping mechanism for the work W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to highly accurate flat surface machining,
Hard and soft metals that require exact concave and convex surfaces,
The present invention relates to a machine tool that performs ultra-precision processing on a workpiece such as glass, synthetic resin, or semiconductor, and uses a cup wheel type cutter for finishing after rough grinding with a cup wheel type grindstone.

[0002]

BACKGROUND OF THE INVENTION There is a remarkable technological innovation in the present time, and due to the development of its advanced technology, various excellent product groups have been sent out.

In particular, the development of electronic-related equipment such as computers and microcomputers seems to be advancing day by day, and the equipment equipped with such equipment, or optical equipment, medical equipment, etc., are developed into more advanced application technologies. It is in the actual condition of sharpening the hoho.

[0004]

[Prior art and its problems] However, high-precision flat surface processing, high-precision spherical surface processing, uneven surface processing such as aspherical surface processing, etc. are required for parts of excellent products by these advanced technologies. In addition, ultra-thinning due to miniaturization, and diameter expansion from the viewpoint of productivity are required, but currently, such processing is performed with lathes, grinding machines, lapping machines, polishing machines, etc. This is the current state of operation, and its processing speed and processing accuracy are limited.

That is, in the conventional lathe, the cutter is fixed and the work is rotated for turning. However, since the work is rotated, the machining accuracy is uneven due to the peripheral speed. In the vicinity of the center point of, the peripheral speed is zero and it is almost impossible to machine, so the protrusion remains, and an additional machining process is required to remove this protrusion, and the machining accuracy is different. Had a point.

Further, in the grinding machine, a cup-shaped base is ground by a grindstone in which hard abrasive grains such as diamond or zirconia are bound with a binder, but the respective abrasive grains are bound in random directions. However, even if the surface is apparently flat, when it is magnified, the processing surface has various scratches of various sizes, and it is difficult to process a soft work, and there is a problem in accuracy.

Further, the lapping machine and the polishing machine are polishing processes, so that the processing speed is slow, it takes time, and there is a problem in workability.

Therefore, when the pressing force against the work is increased, the frictional resistance is increased, which causes damage or breakage of the work which requires ultra-thinning and diameter expansion.
The friction heat of the frictional resistance causes the work or peripheral members to expand thermally, resulting in a decrease in accuracy.In addition, the work heat creates a degenerated layer (damage) from the surface to the inside, which is a major cause of warpage and distortion after processing. However, even if it appears to be a flat surface, when it is magnified, a number of distorted surface-like spots are found everywhere, which significantly impairs the accuracy of mirror-finishing and is a difficulty in efficiency and efficiency. Etc. had occurred.

[0009]

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention, as a result of diligent research, performed rough grinding with a cup wheel type grindstone,
Finishing processing after rough grinding is excellent for technologies such as gliding, lapping, polishing, etc., and it is not a turning machine that breaks the current limit, neither grinding nor polishing. The purpose of the invention is to provide a machine tool using the invention.

[0010]

According to the first aspect of the present invention, there is provided a work,
Delivery side cassette, delivery side transfer mechanism, temporary table, delivery side transfer arm, chuck mechanism, rotary table, storage side transfer arm, cleaning / drying mechanism, storage side transfer mechanism, storage side cassette A machine tool comprising at least a biaxial spindle, a base shaft, and a base shaft, wherein a sliding mechanism is provided on the base and the base shaft, and a cup wheel type grindstone is mounted on at least one shaft of the spindle. The multiple spindles are fixed to the spindle of the cup-shaped base by projecting them to the annular top surface of the cup-shaped base, and the blade edges of the cutters are arranged at positions with different radii, and the blade edges located inside protrude from the edges located outside. A cup-wheel type cutter arranged as a unit is attached, and the configuration of claim 2 is a work, a delivery side cassette, a delivery side transfer mechanism, a temporary placement table, and a delivery side transfer arm. A machine tool including a chuck mechanism, a rotary table, a storage-side transfer arm, a cleaning / drying mechanism, a storage-side transfer mechanism, a storage-side cassette, at least a biaxial spindle, a spindle, and a spindle. , A slide mechanism is provided on the base and the base shaft, at least one shaft of the spindle is equipped with a cup wheel type grindstone, and for other spindles, a plurality of cutters are projected on the annular top surface of the cup-shaped base. The blade edges of at least one pair of cutters are arranged at the same radius, and the other blade edges are arranged at positions with different radii, and the blade tips located inside are projected so as to protrude from the blade edges located outside. It is the established structure.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A machine tool of the present invention which achieves the above object will be described with reference to the drawings of the embodiments.

FIG. 1 is a schematic plan view of the machine tool of the present invention, FIG. 2 is a schematic side view of the machine tool of the present invention, and FIG.
Is a bottom view of one embodiment of the cup wheel type cutter, FIG. 4 is a bottom view of the next embodiment of the cup wheel type cutter, FIG. 5 is an explanatory view showing a processing state, and FIG. 6 is a cutting edge of the cutter. FIG. 3 is a side view and a plan view of FIG.

The present invention is for subjecting a work W, such as hard and soft metal, glass, synthetic resin, and semiconductor, which requires high-precision flat surface processing and accurate concave and convex surfaces, to ultra-precision processing. The present invention relates to a machine tool 1 in which a cup wheel type cutter 5 is used for finishing after rough grinding with a model grindstone 4.
A delivery side cassette 8 accommodating a plurality of unprocessed works W, a delivery side transfer mechanism 10 for transferring the works W from the delivery side cassette 8 to the temporary placement table 9, and a transfer by the delivery side transfer mechanism 10. A temporary placement table 9 for cleaning and aligning the workpiece W, a delivery-side transfer arm 11 for transferring the workpiece W to the upper surface of the chuck mechanism 2, and a plurality of sets of chuck mechanisms 2 for vacuum-sucking and rotating the workpiece W. A rotary table 12 which arranges the chuck mechanisms 2 at equal intervals and repeats intermittent rotation stop, and a storage-side transfer arm 14 which transfers the processed work W from the chuck mechanism 2 to the cleaning / drying mechanism 13. A cleaning / drying mechanism 13 for cleaning and drying the work W transferred by the storage-side transfer arm 14.
And the work W of the cleaning / drying mechanism 13 on the storage side cassette 1
5, a storage-side transfer mechanism 16 for transferring the plurality of works W to the storage-side transfer mechanism 16, and a storage-side cassette 15 for accumulating and storing a plurality of works W, and at least two shafts disposed above the arbitrary chuck mechanism 2. A machine tool comprising a spindle 3, a respective base shaft 17 for carrying the respective spindles 3, and a base 18 on which the respective base shafts 17 are erected is provided, and the base 18 and the respective base shafts 17 are provided. A sliding mechanism 19 for horizontally sliding the spindle 3 is provided. A cup wheel type grindstone 4 is attached to the lower end of at least one shaft of the spindle 3 and a cup-shaped grindstone is attached to the lower ends of the other spindles 3. A plurality of cutters 7 are projected and fixed to the annular top surface 6a of the base 6, and the cutting edges 7a of the respective cutters 7 are arranged at positions where the radii from the center 6b of the cup-shaped base 6 are different from each other. With The cup wheel type cutter 5 is mounted so that the blade edge 7a located on the side protrudes from the blade edge 7a located on the outer side. Claim 2 claims that the work W and a plurality of pre-processed work W A delivery-side cassette 8 in which the work W is accumulated and stored, a delivery-side transfer mechanism 10 that transfers the work W from the delivery-side cassette 8 to the temporary placing table 9, and a temporary cleaning and alignment of the work W transferred by the delivery-side transfer mechanism 10. A table 9, a delivery-side transfer arm 11 for transferring the temporary table 9 to the upper surface of the chuck mechanism 2, and a plurality of sets of chuck mechanisms 2 for vacuum-sucking and rotating the work W.
A rotary table 12 which arranges the chuck mechanisms 2 at equal intervals and repeats intermittent rotation stop, a storage-side transfer arm 14 which transfers the processed work W from the chuck mechanism 2 to the cleaning / drying mechanism 13, Storage side transfer arm 14
The cleaning / drying mechanism 13 for cleaning and drying the work W transferred by the above, the storage-side transfer mechanism 16 for transferring the work W of the cleaning / drying mechanism 13 to the storage-side cassette 15, and the plurality of works by the storage-side transfer mechanism 16. A storage-side cassette 15 for accumulating and storing W, at least two spindles 3 respectively disposed above the arbitrary chuck mechanism 2, respective base shafts 17 carrying the respective spindles 3, and respective base shafts 1
The machine tool 1 comprises a base 18 on which the spindle 7 is erected, and a sliding mechanism 19 for horizontally sliding the spindle 3 is provided on the base 18 and the respective base shafts 17, and the spindle 3 A cup wheel type grindstone 4 is attached to the lower end of at least one shaft of the above, and a plurality of cutters 7 are attached to the annular top surface 6a of the cup-shaped base 6 to the lower end of the other spindle 3.
Are fixed so that at least one of the cutting edges 7a of the cutters 7 addressed to the pair has the same radius from the center 6b of the cup-shaped base 6, and the other cutting edges 7a are the cup-shaped base 6. The blade tip 7a is disposed at a position having a different radius from the center 6b of the blade and the blade tip 7a located inward is located outside.
Cup wheel type cutter 5 arranged so as to protrude from a
Is attached.

That is, normally, in the machine tool 1 of this type, as shown in FIGS. 1 and 2, a plurality of workpieces W before processing are integrated and stored in a cassette 8 on the delivery side which is partitioned by a crosspiece for each individual product. The delivery-side cassette 8 is placed on an elevator pedestal 8a, and the delivery-side transfer mechanism 1 provided on the lower side of the front opening of the delivery-side cassette 8 is moved up and down.
0 is transferred to the temporary stand 9, and in the embodiment, it is sequentially sent out by the conveyor belt and transferred to the temporary stand 9 by the sending side reversing arm or the like provided with the reversing mechanism and the vacuum pad at the tip. However, the sending-side transfer mechanism 10 is not limited to this as long as it can be variously considered and can be placed on the temporary placing table 9.

Next, the work W has its lower surface washed by the jet flow of the temporary placing table 9 and is aligned with a predetermined position of the temporary placing table 9 by an alignment mechanism such as a standing rib (not shown). Sending side transfer arm 11
It is adsorbed by the vacuum pad 11a provided at the tip of the, and guided to the upper surface of the chuck mechanism 2 by an accurate orbit in the horizontal direction to open the vacuum of the vacuum pad 11a.

The chuck mechanism 2 has an upper surface formed of a breathable member such as porous ceramics, and securely sucks the work W onto the upper surface by a vacuum suction mechanism in communication with a vacuum pump or the like. It rotates in a fixed direction by obtaining driving force such as the above, and serves as a mounting table for the work W during processing.

The disk-shaped rotary table 12
Indicates that a plurality of sets of the chuck mechanisms 2 are arranged at equal intervals. In the drawings of the embodiment, four sets of chuck mechanisms 2 are arranged at equal intervals, and the rotary table 12 automatically
/ 4 rotations are repeatedly rotated and stopped, that is, the chuck mechanism 2 moves from the mounting chuck position 21 conveyed from the temporary mounting table 9 to the rough machining chuck position 22 by rotating the rotary table 12. It is transferred and subjected to rough processing, and then the chucking position 23 for finishing is applied.
The chuck mechanism 2 is moved to the removal chuck position 24 to release the vacuum suction and then sucked by the vacuum pad 14a of the storage side transfer arm 14 to be removed. There are also six sets or the like, and in this case, the rotary table 12 repeats turning and stopping for 1/6 rotation, and the number of sets of the chuck mechanism 2 is not particularly limited.

The work W after processing is in the chuck position 2 for removal.
The storage side transfer arm 1 operates to reversely operate the delivery side, although the individual pieces are accumulated and stored in the storage side cassette 15 from 4
4 and the storage side transfer mechanism 16 are stored,
That is, the chuck mechanism 2 at the removal chuck position 24 is sucked by the vacuum pad 14a of the storage-side transfer arm 14 and transferred to the cleaning / drying mechanism 13, and further the storage-side transfer mechanism 1 such as the storage-side reversing arm and the storage-side conveyor belt.
The storage side cassette 15 is divided by the crosspiece 4 and is stored in an integrated manner for each individual product.

The machine tool 1 used in the present invention is constructed in this way, and the above-mentioned steps are regularly repeated, and the respective works W automatically sent out from the sending side cassette 8 are
Chuck positions 21.22.23.24 that are sequentially movable
Guided to, processed, washed, storage side cassette 15
This is a mechanism in which each individual item is integrated and stored.

On the other hand, the spindles 3 arranged above the arbitrary chuck mechanism 2 are carried by the respective base shafts 17 standing on the base 18 of the machine tool 1 and mechanically connected to the motors M etc. It is assembled so as to be movable and rotatable, and the axis of the spindle 3 is arranged to be offset from the axis of the chuck mechanism 2 so that the entire upper surface of the work W is machined evenly. A slide that rotates in the same direction or rotates in the opposite direction. A rail and a rail receiving member are provided on the base 18 and the base shaft 17 to enable the spindle 3 driven by a screw or the like to slide in the horizontal direction. A moving mechanism is provided.

The rotary table 12 is repeatedly rotated and stopped at a constant low speed, and each chuck mechanism 2 is rotated.
Each of the workpieces W is vacuum chucked and machined, but the present invention is directed to a plurality of spindles 3 of the machine tool 1.
At least one of the spindles is equipped with a cup wheel type grindstone 4 using hard abrasive grains such as diamond or zirconia at the lower end and a cup wheel type cutter 5 at the lower end of any other number of spindles 3. The spindle 3 and the cup-shaped base 6 are mounted by known appropriate means.

A chuck mechanism 2 for sucking the work W,
Also, the spindle 3 is rotating with respect to each other, and the upper surface of the work W is processed by lowering the spindle 3 and sliding the base shaft 17. Chuck mechanism 2 on which work W is placed
The cup wheel type grindstone 4 or the cup wheel type cutter 5 is constantly arranged in a circular arc shape in the forward direction of the cup-shaped base 6,
The outer peripheral positions of the grindstone 4a and the machining blade of the cutter 7 move at least beyond the center point of the chuck mechanism 2, that is, the workpiece W, and the chuck mechanism 2 and the spindle 3 rotate together and are machined with their axes shifted. Therefore, there is no place where the peripheral speed becomes zero, and processing is performed uniformly.

The cup wheel type cutter 5 projects and fixes a plurality of cutters 7 on the annular top surface 6a of the cup-shaped base 6, and the cutting edges 7a at the tips of the respective cutters 7 are cup-shaped bases. The radii from the center 6b of the base 6 are arranged at positions different from each other, and in addition, the respective cutting edges 7a are such that the inner cutting edges 7a project more than the outer cutting edges 7a. .

That is, as shown in FIGS. 3 and 5, in the embodiment, four cutters 7 are arranged at positions having different radii and at symmetrical positions, and the inner cutting edge 7a is projected. The cutter 71 located at the outermost side performs the first stage processing, and the next cutter 72
The second and third steps are processed by the inner cutter 73 and the cutter 73 inside thereof, and the fourth step is processed by the cutter 74 located on the innermost side, and several steps are processed by one processing. And each cutter 71.72.7.
The interval of 3.74 is also free, but in the case of ultra-high precision machining, the cutting edge 7a of the cutter 71 located on the outermost side and the cutting edge 7a of the cutter 74 located on the innermost side can be set to about 8 microns. The cutting depth can be set to about 5 to 10 μm.

Further, in claim 2, a plurality of cutters 71.7 are provided.
Among 1.72.72.73.73.73.474, at least one pair of cutters 71.71 are arranged at the same radius (see FIG. 4) from the center 6b of the cup-shaped base 6, and The cutters 72.72.73.73.73.474 of the above are arranged at positions with different radii, but the number of the cutters shown in the figure is four, but the number of the cutters 7 and the number of rows are not particularly limited. However, the arrangement at symmetrical positions is not limited to any particular one, because the balance during rotation of the cup-shaped base 6 is taken into consideration.

The cutter 7 of the cup wheel type cutter 5 of the present invention has a blade base 7b having a rectangular cross section, and the annular top surface 6 of the cup-shaped base 6 is attached to the blade base 7b.
In order to project and fix it to a, a concave portion is formed in the vertical direction on the outer peripheral surface or the inner peripheral surface of the annular top surface 6a of the cup-shaped base 6, and a corner portion is formed in the vertical direction in the concave portion. A small hole is formed so as to be fixed to the work W at right angles to the corners of the cup W by means of a fastener such as a rivet screw to the corner, and the circumference of the annular top surface 6a of the cup-shaped base 6 is formed. A screw hole for screwing the stud screw or the like is formed in the concave portion formed on the side surface, but the fixing means of the cup-shaped base 6 and the cutter 7 may be various other means and is particularly limited. Not a thing.

The blade edge 7a extending from the blade base 7b is inclined on both side surfaces 7c. 7c is formed, and the slopes 7c. A rounded portion 7d is formed at the tip of the mixing of 7c, and a frontward inclined surface 7e and a rearward inclined surface 7f are respectively formed on the front portion and the rear side of the machining direction where the cutter 7 advances to the rounded portion 7d of the tip. However, the corners where the front side inclined surface 7e and the rear side inclined surface 7f intersect form a cutting edge 7a having an obtuse angle, and the front side inclined surface 7e forms an angle within 45 degrees with respect to the front side surface 7g. The rear inclined surface 7f is formed at an angle of 45 degrees or more with respect to the rear side surface 7h, and this angle is the work W to be machined.
The cutting edge 7a is formed of a hard material such as artificial or natural diamond, which differs depending on the hardness of the material and the cut amount to be processed.

The blade edge 7a of the cutter 7 used in the present invention is a bilateral inclined surface 7c. Which is symmetrically inclined to both side surfaces along the circumferential direction of the cup-shaped base 6c. 7c, and the slopes 7 on both sides
c. The apex of the tip where the 7c intersects with each other forms a rounded portion 7d. Further, the rounded portion 7d is formed with a front side inclined surface 7e and a rear side inclined surface 7f respectively in the front side and the rear side in the processing direction. The front inclined surface 7e is formed so as to form an angle within 45 degrees with respect to the front side surface 7g, and the rear inclined surface 7f is formed.
Is formed at an angle of 45 degrees or more with respect to the rear side surface 7h. In the case of processing a silicon wafer, the front side inclined surface 7e is about 25 degrees with respect to the front side surface 7g, and the rear side inclined surface 7f. When formed at about 1.5 degrees with respect to the rear side surface 7h, both the processing accuracy and the processing speed are good, and from the above calculation, the angle of the cutting edge 7a where the front sloped surface 7e and the rear sloped surface 7f are mixed is always It is an obtuse angle.

The cutting edge 7 formed with the respective angles as described above.
By forming a by a hard material such as artificial or natural diamond, it is possible to perform processing that sharply cuts the frictional resistance to a minimum, and further, it is possible to perform high-precision processing by cutting while rotating the cutter 7 at high speed. This is possible, and since it is possible to perform processing in a plurality of steps at the same time, processing can be performed in a short time, and the work steps can be shortened.

Further, the cup wheel type grindstone 4 and the cup wheel type cutter 5 of the present invention fix the cup-shaped base 6 by inclining it, that is, by inclining the spindle 3, it is possible to perform concave surface processing and convex surface processing. That is, the flat surface processing is performed between the concave surface processing and the convex surface processing.

[0031]

As described above, in the machine tool of the present invention, rough grinding is performed with a highly efficient cup wheel type grindstone, and finishing is performed with a cup wheel type cutter capable of performing ultra-precision machining. In addition, by appropriately setting the angle of the blade edge of the cutter, the degree of protrusion and the interval between blade edges, it is possible to process from hard to soft ones,
Furthermore, since the frictional resistance is extremely reduced, continuous processing can be performed, and there is no damage to the work W after processing. Therefore, there is no unevenness in flatness accuracy and ultra-precision processing in micron units is possible. This is an epoch-making one that has immeasurable and significant effects such as widespread use.

[0032]

[Brief description of drawings]

FIG. 1 is a schematic plan view of a machine tool of the present invention.

FIG. 2 is a schematic side view of a machine tool of the present invention.

FIG. 3 is a bottom view of an embodiment of the cup wheel type cutter.

FIG. 4 is a bottom view of the next embodiment of the cup wheel type cutter.

FIG. 5 is an explanatory view showing a processed state.

FIG. 6 is a side view and a plan view of a cutting edge of a cutter.

[0033]

[Explanation of symbols]

 W Work 1 Machine tool 2 Chuck mechanism 21 Mounting chuck position 22 Roughing chuck position 23 Finishing chuck position 24 Removing chuck position 3 Spindle 4 Cup wheel type grindstone 4a Grinding stone 5 Cup wheel type cutter 6 Cup base 6a Annular top surface 6b Center 7 Cutter 7a Blade edge 7b Blade base 7c Both side slopes 7d Earl section 7e Front sloped surface 7f Rear sloped surface 7g Front side surface 7h Rear side surface 8 Delivery side cassette 8a Elevator stand 9 Delivery side transfer mechanism 11 Delivery Side Transfer Arm 11a Vacuum Pad 12 Rotary Table 13 Cleaning / Drying Mechanism 14 Storage Side Transfer Arm 14a Vacuum Pad 15 Storage Side Cassette 16 Storage Side Transfer Mechanism 17 Base Spindle 18 Base 19 Sliding Mechanism

Claims (2)

[Claims] 1. A work, a delivery side cassette accommodating a plurality of unprocessed works, a delivery side transfer mechanism for transferring the work from the delivery side cassette to a temporary table, and a transfer side transfer mechanism. A temporary placement table for cleaning and aligning the work, a delivery-side transfer arm for transferring the work from the temporary placement table to the upper surface of the chuck mechanism, a plurality of sets of chuck mechanisms for vacuum-sucking and rotating the work, and a plurality of sets of the chuck mechanisms. A rotary table that is arranged at the same interval and repeats intermittent rotation stop, a storage side transfer arm that transfers the processed work from the chuck mechanism to the cleaning / drying mechanism, and cleaning of the work transferred by the storage side transfer arm And a cleaning / drying mechanism for drying, a storage-side transfer mechanism for transferring the work of the cleaning / drying mechanism to the storage-side cassette, and a plurality of works by the storage-side transfer mechanism. A storage-side cassette for stacking and storing, at least two spindles respectively arranged above the arbitrary chuck mechanism, respective base shafts for carrying the respective spindles, and a base for vertically arranging the respective base shafts. A machine tool comprising a sliding mechanism that allows a spindle to slide horizontally on the base and respective base shafts, and a cup wheel type grindstone is mounted on the lower end of at least one shaft of the spindle. Along with the lower ends of the other spindles, a plurality of cutters are projected and fixed to the annular top surface of the cup-shaped base, and the cutting edges of the respective cutters are located at different radii from the center of the cup-shaped base. A machine tool characterized in that a cup wheel type cutter is mounted so that the blade edge located inside and the blade edge located inside protrudes from the blade edge located outside. 2. A work, a delivery-side cassette accommodating and accommodating a plurality of unprocessed works, a delivery-side transfer mechanism for transferring the work from the delivery-side cassette to a temporary placement table, and a transfer by the delivery-side transfer mechanism. A temporary placement table for cleaning and aligning the work, a delivery-side transfer arm for transferring the work from the temporary placement table to the upper surface of the chuck mechanism, a plurality of sets of chuck mechanisms for vacuum-sucking and rotating the work, and a plurality of sets of the chuck mechanisms. A rotary table that is arranged at the same interval and repeats intermittent rotation stop, a storage side transfer arm that transfers the processed work from the chuck mechanism to the cleaning / drying mechanism, and cleaning of the work transferred by the storage side transfer arm And a cleaning / drying mechanism for drying, a storage-side transfer mechanism for transferring the work of the cleaning / drying mechanism to the storage-side cassette, and a plurality of works by the storage-side transfer mechanism. A storage-side cassette for stacking and storing, at least two spindles respectively arranged above the arbitrary chuck mechanism, respective base shafts for carrying the respective spindles, and a base for vertically arranging the respective base shafts. A machine tool comprising a sliding mechanism that allows a spindle to slide horizontally on the base and respective base shafts, and a cup wheel type grindstone is mounted on the lower end of at least one shaft of the spindle. At the same time, a plurality of cutters are fixed to the lower end of the other spindle by projecting a plurality of cutters on the annular top surface of the cup-shaped base, and each cutting edge of at least one pair of cutters has the same radius from the center of the cup-shaped base. The other cutting edges are arranged at positions having different radii from the center of the cup-shaped base, and the cutting edges located inside are projected from the cutting edges located outside. Machine tool characterized by being fitted with the wheel-type cutter.