JP2016016485A - Composite chamfering apparatus and chamfering method for ingot block - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a composite chamfering apparatus of a small footprint ingot print, and a chamfering method using the apparatus.SOLUTION: In a composite chamfering apparatus 1, two loader/unloader mechanisms 13 and 13' are positioned in parallel at the front central part. A pair of coarse grinding axes and a pair of finishing grinding axes in a conventional composite chamfering apparatus are made into grindstone axis head structures 10 and 10 of a composite structure of a pair of a course grindstone axis and a finish grindstone axis having a common grindstone axis, so that an ingot block of a length of 600 to 1,000 mm can be chamfered without augmenting a foot print.SELECTED DRAWING: Figure 1

Description

  In the present invention, four sides of a cylindrical ingot block sandwiched by a first clamp mechanism comprising a headstock and a tailstock are cut off by a pair of rotating blades to form a square columnar block, and this square columnar block is delivered. The mechanism is transferred to and held by a second clamping mechanism comprising a headstock and a tailstock, and then the four sides are flattened by rough grinding and finish polishing with a grinding device having a pair of composite grinding wheel shafts. The present invention relates to a composite chamfering apparatus and a chamfering method for an ingot. A rectangular substrate obtained by wire-cutting the flattened rectangular columnar ingot block is used as a substrate for a solar battery.

  An apparatus for chamfering a cylindrical ingot block into a square columnar ingot block is sold by Okamoto Machine Tool Co., Ltd. of the present patent applicant from a SiSG 156H machine (trade name). Details of the chamfering apparatus and the chamfering method are described in Japanese Patent No. 5,129,319 (Patent Document 1) (see FIG. 5). In addition, the dimension of the longitudinal direction of a SiSG156H machine is 8,225 mm.

Claim 1 of Patent Document 1
a) A pair of work tables (4, 4 ') provided so as to be able to reciprocate in the left-right direction on guide rails (3, 3) provided in the left-right direction on the machine frame (2),
b) a first clamp mechanism and a second clamp mechanism (7, 7 ') comprising a pair of headstock (7a) and tailstock (7b) mounted separately on the left and right on the pair of work tables;
c) A drive mechanism (7am) for reciprocating the work table (4, 4 ') carrying the work supported (clamped) by the first clamp mechanism (7) and the second clamp mechanism (7') in the left-right direction. ),
d) A direction in which the work table (4, 4 ′) is viewed from the front side of the composite chamfering device (1) and from the right side to the left side.
e) Cylindrical silicon ingot block loading stage (8R),
f) a standby position stage (70) of the first clamping mechanism (7) provided behind the loading stage;
g) A pair of rotary cutting blades (91a, 91b) are provided in front of and behind the guide rail (3, 3) so that the diameter surfaces of the rotary cutting blades face each other across the workpiece support shaft of the first clamp mechanism. Side-slicing slicing stage (90) of the cylindrical silicon ingot block formed,
h) Ingot block delivery stage (80) provided on the left lateral side of the slicing stage,
i) A pair of cup wheel type grindstones (11g, 11g) that are supported by a pair of grindstone shafts (11a, 11b) that can move back and forth and can be moved up and down, with a work table sandwiched between them so that the grindstone surfaces face each other. Rough grinding stage (11) provided before and after the table,
j) A pair (10g, 10g) of a cup wheel type grindstone supported in parallel with a pair of grindstone shafts (10a, 10b) which are provided parallel to the left lateral side of the rough grinding stage and which can be moved back and forth. A finish grinding stage (10) provided before and after the work table with the work table sandwiched so that the grindstone surfaces face each other,
k) a left side position of the finish grinding stage, and a standby position stage 60 of the second clamp mechanism (7 ′) comprising a pair of headstock (7a) and tailstock (7b);
and,
l) Unloading stage (8L) of a prismatic silicon ingot block provided on the front side of the standby position stage of the second clamp mechanism (7 ′),
A composite chamfering processing apparatus (1) for a silicon ingot block is provided.

A second aspect of the present invention proposes a method of chamfering a cylindrical silicon ingot block into a prismatic silicon ingot block through the following steps using the composite chamfering apparatus.
(1) Using a loading mechanism on the loading stage, the cylindrical silicon ingot block, which is a workpiece, is loaded between a headstock with an encoder and a tailstock having a function of rotating around the rotation C axis of the first clamping mechanism. Then, the tailstock is advanced to clamp the cylindrical silicon ingot block between the first clamp mechanisms.
(2) The C-axis drive motor of the head stock of the first clamp mechanism is operated to center the cutting start position of the cylindrical silicon ingot block with respect to the pair of rotary cutting blades.
(3) The work table on which the first clamp mechanism is mounted is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades.
(4) Next, the C axis of the cylindrical silicon ingot block is rotated by 90 degrees.
(5) The work table carrying the first clamp mechanism is moved in the direction of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the cylindrical silicon ingot block are cut by the pair of rotating cutting blades to form a rectangular column shape. Get a silicon ingot block.
(6) The work table on which the first clamp mechanism is mounted is moved toward the delivery stage of the ingot block, the robot hand is advanced to the delivery stage, the gripping claws of the robot hand are closed, and the square columnar silicon ingot block is gripped. Then, after the tailstock of the first clamp mechanism is retracted to release the holding of the square pillar-shaped silicon ingot block, the robot hand is retracted to the standby position. Thereafter, the work table on which the first clamp mechanism is mounted is returned to the standby position stage position of the first clamp mechanism, and then the robot hand is advanced to the delivery stage.
(7) The work table on which the second clamp mechanism at the standby position stage position of the second clamp mechanism is moved to the right and moved to the robot hand position of the delivery stage. Next, after the tailstock of the second clamp mechanism is advanced to hold the square columnar silicon ingot block between the spindle base and the tailstock of the second clamp mechanism, the gripping claw of the robot hand is opened to The quadrangular silicon ingot block is released, and the robot hand is retracted to the standby position.
(8) The work table on which the second clamp mechanism for sandwiching the quadrangular columnar silicon ingot block is mounted is moved leftward, and the quadrangular columnar silicon ingot block is carried into the rough grinding stage.
(9) The pair of paired rotating corners of the quadrangular columnar silicon ingot block is moved by moving a work table on which the second clamp mechanism is mounted between the pair of cup wheel type rough grinding wheels. Cylindrical grinding with a cup wheel type rough grinding wheel.
(10) C-axis centering at the start of chamfering of the square columnar silicon ingot block relative to the surface in the radial direction of a pair of cup wheel type rough grinding wheels by rotating the C axis of the cylindrically ground square columnar silicon ingot block I do.
(11) The square columnar silicon is moved by moving the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel rough grinding wheels and moving the pair of cup wheel rough grinding wheels forward. A chamfering process is performed on the front and rear surfaces of the rectangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the ingot block.
(12) The C-axis of the quadrangular columnar silicon ingot block is rotated 90 degrees to perform centering to fix the processing side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type rough grinding wheels.
(13) Move the work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type rough grinding wheels, and advance the pair of cup wheel type rough grinding wheels in the C-axis direction. Rough chamfering is performed to chamfer the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(14) The work table on which the second clamp mechanism for sandwiching the square columnar silicon ingot block having been subjected to the rough chamfering process is moved leftward, and the square columnar silicon ingot block is carried into the finish grinding stage.
(15) The pair of cups rotating the four corner R corners of the rotating quadrangular columnar silicon ingot block by moving the work table on which the second clamp mechanism is mounted between the pair of cup wheel type finishing grinding wheels. Cylindrical grinding with a wheel-type finish grinding wheel.
(16) The C-axis of the cylindrically grounded square columnar silicon ingot block is rotated to center the grinding start positioning with respect to the surface in the blade diameter direction of the pair of cup wheel type finishing grinding wheels.
(17) The square columnar silicon ingot is moved by moving a work table on which the second clamp mechanism is mounted between the pair of rotating cup wheel type finishing grinding wheels and moving the pair of cup wheel type finishing grinding wheels forward. Chamfering is performed on the front and rear surfaces of the quadrangular columnar silicon ingot block by moving the work table while cutting the front and rear surfaces of the block.
(18) Next, the C-axis of the quadrangular columnar silicon ingot block is rotated by 90 degrees to center the processed side surface position of the quadrangular columnar silicon ingot block with respect to the blade radial direction surface of the pair of cup wheel type finishing grinding wheels.
(19) Move the work table mounted with the second clamp mechanism between the pair of rotating cup wheel type finishing grinding wheels, and advance the pair of cup wheel type finishing grinding wheels in the C-axis direction. Finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block is performed by moving the work table while cutting the front and rear surfaces of the quadrangular columnar silicon ingot block.
(20) After finishing chamfering of the front and rear surfaces of the quadrangular columnar silicon ingot block, the work table having the second clamp mechanism for clamping the quadrangular columnar silicon ingot block that has been chamfered is moved to the left. Return to the standby position stage position of the second clamp mechanism.
(21) Hold the four side surfaces and the bottom surface of the quadrangular columnar silicon ingot block at the standby position stage position of the second clamp mechanism by the gripping claws of the transport mechanism in the unloading stage. Then, the tailstock of the second clamp mechanism is retracted to release the quadrangular columnar silicon ingot block from being clamped by the second clamp mechanism.
(22) A rectangular columnar silicon ingot block in which the gripping claws of the transport mechanism are transferred out of the housing of the composite chamfering device, and the above-mentioned four side surfaces and four corner R corners are finish-ground on the block stocker shelf in the unloading stage. Is placed.

  In addition, Shindong Funing Pagoda Co., Ltd., China published patent No. 1015463 (Patent Document 2) describes a rectangular columnar ingot block (w) as a claw (273, first loader / unloader mechanism (25)). 273) is placed on the work table by lifting and fixing the block with a jig, and then the work table is advanced to make a pair of rough grinding wheels (11A, 11A) and a pair of finish grinding wheels (11B, 11B), a pair of R rough grinding roll grindstones (12A, 12A) and a pair of R finish grinding grindstones (12B, 12B) are brought into contact with each other to grind the left and right side surfaces and the upper surface R corner portion of the square columnar ingot block. The square columnar ingot block having been finished is lifted by the claws (233, 233) of the second loader / unloader mechanism (22), and then the work conveying belt ( ) Discloses chamfering apparatus shown in FIG. 6 for transporting to the top (M).

On the other hand, Japanese Patent Laid-Open No. 2014-42950 (Patent Document 3) discloses a holding table that rotatably holds a workpiece (disk-shaped wafer), and a grinding unit that grinds the workpiece held by the holding table. A grinding apparatus comprising:
The grinding means includes a finish grinding wheel including a finish grinding wheel having a diameter equal to or larger than the diameter of the work piece, and a diameter of the work piece including a rough grinding wheel concentrically disposed on the outer peripheral side of the finish grinding wheel. And a grinding surface of the finish grinding wheel is formed vertically above the grinding surface of the rough grinding wheel, and the radius of the coarse grinding wheel And a composite wheel having the same grinding wheel axis having a double wheel in which the difference between the radius of the finish grinding wheel and the radius of the workpiece is equal to or greater than the radius of the workpiece, and a spindle on which the double wheel is mounted to rotate the double wheel A grinding wheel head with a structure;
Vertical movement means for moving the grinding means in the vertical direction;
The workpiece which has passed the rough grinding wheel while moving the holding table holding the workpiece under the rough grinding wheel positioned at a predetermined height in the horizontal direction to perform rough grinding on the workpiece. Horizontal moving means for moving the holding table so that the outer periphery of the finish grinding wheel is positioned at the center of
A grinding apparatus characterized by comprising:

Patent No. 5,129,319 China published patent No. 1015463 specification JP 2014-42950 A

  The appearance of an apparatus capable of chamfering a cylindrical ingot block having a chamfered length of 250 mm or 500 mm to 600 mm or 1,000 mm from a conventional SiSG 156H machine is desired by a photovoltaic cell substrate processing manufacturer. As a delivery condition of the apparatus, there is a demand for the chamfering apparatus to have a left-right direction (longitudinal direction) dimension that is equal to or slightly larger than the SiSG 156H machine (within 200 mm).

  In the chamfering apparatus described in Patent Document 1, the present inventors provide (i). A loader and a transfer machine (unloader) are juxtaposed and positioned at the center of the front surface of the apparatus, and a pair of rough grinding wheel shafts and a pair of finish grinding wheel shafts are (ii). It has been found that if a grinding wheel head structure having a composite structure of a rough grinding wheel shaft and a finish grinding wheel shaft having a pair of identical grinding wheel shaft centers satisfies the dimensional conditions of the photovoltaic substrate processing manufacturer, the present invention has been conceived.

The invention of claim 1
a) A pair of work tables provided so as to be reciprocated in the left-right direction on a guide rail provided extending in the left-right direction on the machine frame;
b) a first clamp mechanism and a second clamp mechanism comprising a pair of headstock and tailstock mounted separately on the left and right on the pair of work tables;
c) A drive mechanism for reciprocating the work table carrying the work sandwiched between the headstock and the tailstock of the first clamp mechanism and the second clamp mechanism in the left-right direction;
d) A compound chamfering device that is a direction in which the left-right direction of the composite chamfering device is viewed from the front side and that is directed from the first clamp mechanism in the right direction of the composite chamfering device toward the second clamp mechanism in the left direction. Are divided into a cylindrical ingot block side-peeling slicing stage (s2), an ingot block (workpiece) loading / unloading stage (s1), and a square columnar ingot block grinding stage (s3).
e) The side-peeling slicing stage (s2) of the cylindrical ingot block includes a pair of rotary cutting blades sandwiching a work support shaft of a work sandwiched between the headstock and the tailstock of the first clamping mechanism. The cylindrical ingot clamped by the movement of the first clamp mechanism on the first work table in the left-right direction by a pair of rotary cutting blades provided at the front and rear of the guide rail so that the diameter surfaces of the rotary cutting blades face each other It is a slicing stage that peels off the four sides of a cylindrical ingot block that cuts the front and rear sides of the block to form a square columnar ingot block
f) The loading / unloading stage (s1) is configured such that a first loader / unloader mechanism and a second loader / unloader mechanism are installed in parallel on the front side of the central position of the composite chamfering apparatus, The first loader / unloader mechanism is used to hold the workpiece between the headstock and the tailstock of the first clamp mechanism, and the second loader / unloader mechanism holds the workpiece held between the first clamp mechanism and the first clamp mechanism. The work to transfer between the headstock and tailstock of the two clamp mechanism, and the work of unloading the square columnar workpiece sandwiched between the headstock and tailstock of the second clamp mechanism,
g) A grinding stage (s3) of the square columnar ingot block includes a second clamp mechanism, a cup wheel type rough grinding wheel supported by a first grinding wheel shaft that can move back and forth and move up and down, and the first grinding wheel. Each cup wheel type grindstone surface is composed of a pair of grindstone shaft head structures of a composite structure in which a cup wheel type finish grinding grindstone supported by a second grindstone shaft movable back and forth within the shaft is provided with the same grindstone axis center. Is a grinding stage of a square columnar ingot block provided before and after the work table with the work table sandwiched therebetween, and the grinding wheel edge diameter of the cup wheel type finishing grinding wheel is the grinding wheel of the cup wheel type rough grinding wheel The grinding wheel edge of the cup wheel type finishing grinding wheel is smaller than the inner diameter of the blade, and the inside of the grinding wheel edge of the cup wheel type rough grinding wheel is inside. And a grinding stage that performs rough grinding and finish grinding on the front and rear sides of the quadrangular columnar silicon ingot block sandwiched by the movement of the second clamp mechanism on the second work table in the left-right direction using a cup wheel type grinding wheel. This invention proposes an ingot block composite chamfering machine characterized by the above.

Further, claim 2 proposes a method of chamfering a cylindrical silicon ingot block into a prismatic ingot block through the following steps using the above-described composite chamfering apparatus.
(1) An encoder having a function of rotating a workpiece (cylindrical ingot block) w around the rotation C axis of the first clamp mechanism using the first loader / unloader mechanism in the loading / unloading stage (s1). Then, it is carried between the spindle head and the tailstock, and then the tailstock is moved forward so that the cylindrical ingot block is clamped (supported) between the spindle head and the tailstock of the first clamp mechanism.
(2) The C-axis drive motor of the headstock of the first clamp mechanism is operated to perform a centering (positioning) operation of the cutting start position of the cylindrical ingot block (workpiece) with respect to the pair of rotary cutting blades. Next, the robot claw of the first loader / unloader mechanism is released and returned to the standby position.
(3) Cutting the front and rear surfaces of the workpiece with the pair of rotary cutting blades by moving the first work table on which the first clamp mechanism is mounted in the direction (right direction) of the pair of rotating cutting blades rotating. I do.
(4) Next, the C axis of the cut ingot block is rotated 90 degrees.
(5) The first work table on which the first clamp mechanism is mounted is moved in the direction (left direction) of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the ingot block are cut by the pair of rotating cutting blades. To obtain a square columnar ingot block.
(6) The first work table on which the first clamp mechanism is mounted is moved in the loading / unloading stage (s1) direction, the robot hand of the second loader / unloader mechanism is advanced, and the gripping claws of the robot hand are closed. The square columnar ingot block is gripped, and then the tailstock of the first clamp mechanism is retracted to release the holding of the square columnar silicon ingot block, the robot hand is lifted, and the first clamp mechanism is Retract to the right standby position. Thereafter, the second clamp mechanism is moved to the right and returned to the loading / unloading stage (s1) position, and then the robot hand is lowered to align the square columnar ingot block with the headstock of the second clamp mechanism. It is located between the pedestals, and the tailstock is moved and moved forward to deliver (clamp) the square columnar ingot block to the second clamp mechanism.
(7) The C-axis at the start of chamfering of the square columnar ingot block with respect to the surface in the radial direction of the pair of cup wheel rough grinding wheels by rotating the C-axis of the square columnar ingot block on the head stock of the second clamp mechanism Perform centering. Next, the grasping claw of the robot hand is opened to release the square columnar ingot block, and the robot hand of the second loader / unloader mechanism is retracted to the standby position.
(8) A pair of composite grinding wheels are moved by moving a second work table mounted with a second clamp mechanism for holding the square columnar ingot block leftward into the grinding stage (s3) of the square columnar ingot block. Rough grinding is performed by applying a cup wheel type rough grinding wheel with a rotating head structure to the front and back surfaces of the ingot block.
(9) Next, the C-axis of the quadrangular columnar ingot block whose front and rear surfaces are roughly ground is rotated by 90 degrees.
(10) A square columnar ingot block grinding stage (s3) while moving a second worktable mounted with a second clamp mechanism for clamping the square columnar ingot block to the right side loading / unloading stage (s1) position side. ), A rotating cup wheel type rough grinding wheel of a pair of composite grinding wheel head structures is applied to the front and back surfaces of the ingot block to perform rough grinding.
(11) Next, the cup wheel type finish grinding wheel shaft of the composite grinding wheel head structure is advanced to the ingot block grinding start position, and then the wheel shaft is rotated.
(12) A pair of composite grinding wheels are moved by moving a second work table mounted with a second clamp mechanism for holding the square columnar ingot block into the grinding stage (s3) of the square columnar ingot block while moving it to the left. Finish grinding by applying a cup wheel type finishing grinding wheel with rotating head structure to the front and back surfaces of the ingot block.
(13) Next, the C-axis of the square columnar ingot block whose front and rear surfaces are finish-ground is rotated by 90 degrees.
(14) Grinding stage of the square columnar ingot block while moving the second work table mounted with the second clamp mechanism holding the square columnar ingot block to the loading / unloading stage (s1) position side located in the right direction. Within (s3), the cup wheel type finish grinding wheel rotating by the pair of composite grinding wheel head structures is applied to the front and back surfaces of the ingot block to perform finish grinding.
(15) If necessary, a second workpiece equipped with a second clamp mechanism for changing the height position of the rotating cup wheel type finishing grinding wheel of the pair of composite grinding stone head structures and sandwiching the square columnar ingot block. The table is moved to the left while moving into the grinding stage (s3) of the square columnar ingot block, and the cup wheel type finishing grinding wheel of the pair of composite grinding wheel head structures is rotated at the four corners R (corner) of the square columnar ingot block. ) Apply R finish grinding to the surface. At this time, the square columnar ingot block is rotated around the C axis by the headstock.
(16) The second work table on which the second clamp mechanism for sandwiching the square columnar ingot block is mounted is moved to the right side loading / unloading stage (s1) position side.
(17) Hold the bottom surface of the quadrangular columnar silicon ingot block at the loading / unloading stage (s1) position, which has been subjected to finish grinding, with the gripping claws of the robot of the second loader / unloader mechanism. Grasping is performed, and the tailstock of the second clamp mechanism is retracted to release the quadrangular columnar silicon ingot block from being clamped by the second clamp mechanism.
(18) Transfer the robot gripping claw out of the housing of the composite chamfering device.
(19) The second work table of the second clamp mechanism is moved to the left of the standby position.

  A grindstone head with a composite structure in which two loader / unloader mechanisms for the ingot block (workpiece) are installed in parallel, and the rough grinding wheel shaft and the finish grinding wheel shaft that can move in the front-rear direction are the same as the grinding wheel axis. By adopting a structure, even if the longitudinal dimension of the workpiece is doubled, the longitudinal dimension of the composite chamfering machine is the same as that of the conventional machine. Equipment in the factory building can be replaced with new equipment.

FIG. 1 is a plan view of a composite chamfering apparatus for an ingot block, showing a state in which a workpiece is loaded on a first clamp mechanism. FIG. 2 is a plan view of the ingot block complex chamfering apparatus, and shows a state in which the workpiece sandwiched by the second clamp mechanism is returned to the unloading position. FIG. 3 is a partial cross-sectional view showing a grindstone shaft head structure having a composite structure. FIG. 4 is a view showing a state in which the finish grinding wheel of the composite structure grinding wheel shaft head is polishing the four corners of the workpiece. FIG. 5 is a plan view of a composite chamfering apparatus (known). FIG. 6 is a plan view of another aspect of the composite chamfering apparatus (known).

  The composite chamfering processing apparatus 1 of the present invention shown in FIG. 1 and FIG. 2 uses a single crystal silicon ingot block having a diameter of 200 mm and a length of 600 mm as a workpiece (w). , 8,095 mm. This composite chamfering apparatus 1 includes a four-side cutting stage (s2) including a first clamp mechanism and a rotary cutting blade, a workpiece loading, unloading stage (s1), a second clamp mechanism 7 ', and a composite grinding wheel. Three stages of rough grinding and finish grinding (s3) on both sides of the workpiece having the shaft head structure are provided.

The composite chamfering apparatus 1 of the present invention is
a) A pair of work tables 4, 4 ′ provided so as to be reciprocated in the left-right direction on the guide rails 3, 3 provided extending in the left-right direction on the machine frame 2.
b) a first clamp mechanism 7 and a second clamp mechanism 7 'each comprising a pair of headstock 7a and tailstock 7b mounted separately on the left and right on the pair of work tables;
c) The work tables 4 and 4 ′ carrying the work (w) sandwiched between the headstock 7a and the tailstock 7b of the first clamp mechanism 7 and the second clamp mechanism 7 ′ are reciprocated in the left-right direction. Drive mechanism 7am, 7am,
d) The three work stages are directions in which the left and right direction of the composite chamfering apparatus 1 is viewed from the front side, and the second clamp mechanism on the left side of the first clamp mechanism 7 on the right side of the composite chamfering apparatus. Towards 7 ', the work stage of the composite chamfering apparatus is a side-peeling slicing stage (s2) of a cylindrical ingot block, a loading / unloading stage (s1) of an ingot block (workpiece), and grinding of a square columnar ingot block It is divided into stages (s3).

e) The side-peeling slicing stage (s2) of the cylindrical ingot block sandwiches the workpiece support shaft (C-axis) of the workpiece sandwiched between the headstock 7a and the tailstock 7b of the first clamping mechanism 7. The pair of rotary cutting blades 91a provided on the front and rear of the guide rails 3 and 3 so that the diameters of the rotary cutting blades 91a and 91b are opposed to each other. , 91b, the four side surfaces of the cylindrical ingot block for cutting the front and rear side surfaces of the cylindrical ingot block w sandwiched by the movement of the first clamping mechanism 7 on the first work table 4 in the left-right direction are peeled off, thereby forming a square columnar ingot block. It is a slicing stage with w.

  The first work table 4 is provided so as to reciprocate in the left-right direction on a pair of guide rails 3, 3 laid on the machine frame 2 so as to extend in the left-right direction. The work table 4 is reciprocated left and right by rotating by a ball screw 6 (not shown) driven by a servo motor 5 (not shown), and a fixed base 6a screwed to the ball screw 6 is moved to the left. By moving in the direction or the right direction, the work table 4 having the back surface of the work table 4 fixed to the surface of the fixed base advances in the left direction or the right direction. The advancement of the work table 4 in the left direction or the right direction depends on whether the rotation shaft of the servo motor 5 is clockwise or counterclockwise.

  Accompanying the movement of the first work table 4 in the left direction or the right direction, the first clamp mechanism 7 also moves in the left direction or the right direction, and the headstock center support shaft and the tailstock center support shaft of the clamp mechanism 7 are moved. It is possible to move the workpiece w suspended in the suspended state to the side-peeling slicing stage s3 or the loading / unloading stage (s1) position.

  The clamp mechanisms 7 and 7 'are known chuck mechanisms, and are widely used in a cylindrical grinder. The headstock 7a rotates the worktable (workpiece) 360 degrees continuously by rotating the headstock center support shaft with a servo motor 7am, or rocks and rotates it with an angular width of 20 to 45 degrees, thereby turning the four corners R of the work piece. The corner portion has a function of chamfering or centering by turning 45 degrees or 90 degrees. The tailstock 7b is provided on a movable table that can move left and right on the guide rails 3 and 3 by air cylinder drive. After the work piece is supported by the clamp mechanism 7, the work table 4 is fixed by pushing down the lever. This prevents the moving table on which the tailstock 7b is mounted from moving.

  When the rotary cutting blades 91a and 91b are moved back and forth, the tool tables 94 and 94 mounted with servo motors 93m and 93m for rotating the spindle shaft that supports the rotary cutting blades 91a and 91b are rotated by a motor-driven ball screw (not shown). Is done. The forward or backward movement direction of the tool table 94 depends on whether the rotation axis of the motor is clockwise or counterclockwise.

The pair of rotary cutting blades 91a and 91b are supported by a pair of spindle shafts 92a and 92b. The spindle shafts are rotated by drive motors 93m and 93m, so that the rotary cutting blades 91a and 91b are processed (w). Are rotated in the same clockwise direction at a rotational speed of 50 to 7,500 min ⁻¹ (the rotation directions of both spindle shafts are opposite to each other). The spindle shafts 92a and 92b can be moved to the ingot block surface peeling processing position by moving the tool tables 94 and 94 back and forth. The work table 4 can move at a speed of 5 to 200 mm / min, and the rotary shafts 92a and 92b can move up and down to 100 mm. As the rotary cutting blade, a diamond cutter in which diamond fine particles are electrodeposited on the outer peripheral edge (thickness 1.3 to 4.5 mm) of a steel sheet having a diameter of 450 to 500 mm and a thickness of 1 to 2 mm is used.

By moving the first work table 4 on which the first clamp mechanism 7 for holding the C-axis of the workpiece (w) in the horizontal direction is moved to the left, the front and back of the workpiece end face are paired with a rotary cutting blade 91a, Both-side chamfering is performed in which the front surface and the rear surface of the cylindrical workpiece are peeled off in an arc shape by these rotating cutting blades. When the surface peeling of the front and rear surfaces of the workpiece is completed, the support shaft of the headstock 7a of the first clamp mechanism 7 is rotated 90 degrees, and the arc surface of the workpiece that has not been surface-stripped is centered at the front and rear positions. Next, the first work table 4 is moved, and the pair of rotary cutting blades 91a and 91b are rotated by the drive motors 93m and 93m, and the remaining side surfaces are stripped (cut).

  f) In the loading / unloading stage (s1), the first loader / unloader mechanism 13 and the second loader / unloader mechanism 13 ′ are arranged in parallel on the front side of the central position of the composite chamfering apparatus 1. The first loader / unloader mechanism 13 is used to hold the workpiece between the headstock and the tailstock of the first clamp mechanism 7, and the second loader / unloader mechanism 13 ' Work to be transferred between the headstock and the tailstock of the second clamp mechanism 7 ′ and the work piece that has been sandwiched between the clamp mechanism 7 and the headstock and the tailstock of the second clamp mechanism 7 ′. The work of unloading the square columnar workpiece (workpiece) that has been performed is performed.

  As the loader / unloader mechanisms 13 and 13 ′, the work loading device 13 described in Patent Document 1 may be used, or the loader / unloader mechanisms 22 and 25 described in Patent Document 2 may be used. Also, other types of loader / unloader mechanisms may be obtained from the market.

  g) A grinding stage (s3) of the square columnar ingot block w includes a second clamp mechanism 7 ', a cup wheel type rough grinding wheel 10g supported by a first grinding wheel shaft 10a that can be moved back and forth and moved up and down, and A pair of grinding wheel shaft head structures 10 having a composite structure in which a cup wheel type finishing grinding wheel 11g supported by a second grinding wheel shaft 11a that can move back and forth within the first grinding wheel shaft is provided as the same grinding wheel axis gc. This is a grinding stage of square columnar ingot blocks provided before and after the second work table 4 ′ with the second work table 4 ′ sandwiched so that the cutting edge surfaces of the cup wheel type grindstones 10g, 10g, 11g, and 11g face each other.

  As shown in FIG. 3, the outer diameter of the grinding wheel edge of the cup wheel type finishing grinding wheel 11g (175 mm when the diameter of the ingot is 155 mm) is larger than the outer diameter (220 mm) of the grinding wheel 10g of the cup wheel type rough grinding wheel. The grindstone edge of the small cup wheel type finish grinding wheel 11g is located inside the grindstone edge of the cup wheel type coarse grinding wheel 10g. The first grindstone shaft 10a and the second grindstone shaft 11a are rotated around the grindstone axis gc by drive motors 10m and 10m. Further, it can be moved in the front-rear direction by ball screw driving of the tool tables 10t, 10t. Further, the second grindstone shaft 11a provided in the first grindstone shaft 10a moves forward when the compressed air supplied from the air inlet 10in is supplied to the pedestal 11d installation upper part of the cup wheel type finishing grinding wheel 11g. Moreover, it has a structure which can be retreated by being supplied to the base 11d installation lower part of the cup wheel type finishing grinding wheel 11g. 10out is an air discharge hole. The forward / backward movement of the second grindstone shaft 11a is not limited to the air cylinder method described above, and the second grindstone shaft 11a provided in the first grindstone shaft 10a is connected to a linear motor and an electromagnetic wave. You may employ | adopt the structure which receives a magnetic bearing with a coil.

When the diameter of the single crystal silicon ingot is 155 mm, the cup wheel type rough grinding wheel 10 g uses a vitrified bond grinding wheel (# 300 to # 600 grinding wheel), and the rotational speed of the grinding wheel is 1,800 to 3,000 min. ^-1 is preferred. Moreover, the cup wheel type finish grinding wheel 11g is preferably a vitrified bond grinding wheel (# 8,000 to # 12,000 grinding number), and the rotational speed of the grinding wheel is preferably 1,000 to 2,800 min- ¹ .

The square columnar ingot block grinding stage (s3) includes cup wheel type grinding of the front and rear sides of the square columnar ingot block sandwiched by the lateral movement of the second clamp mechanism 7 'on the second work table 4'. This is a grinding stage that performs rough grinding and finish grinding with 10 g and 11 g of a grindstone. In addition, in order to prevent the material of the object to be ground from being damaged by chipping from the corner R portion when cutting a thin square plate into a large number by the wire cut saw in the next process, such as a single crystal silicon ingot, It is also possible to perform finish grinding of the four corners R with a cup wheel type finish grinding wheel 11g.

Examples of the workpiece w include a single crystal silicon ingot, a polycrystalline silicon ingot, a SiC ingot, a Si ₃ N ₂ ingot, and a germanium ingot.

  The step of chamfering the cylindrical silicon ingot block of the workpiece w into the prismatic silicon ingot block using the composite chamfering apparatus 1 is performed as follows.

  (1) The loader / unloader mechanism 13 in the loading / unloading stage (s1) is used to rotate the cylindrical silicon ingot block as the workpiece w around the rotation C axis of the first clamp mechanism 7. It is carried in between the spindle head 7a with an encoder and the tailstock 7b, and then the tailstock 7b is advanced to hold the cylindrical silicon ingot block between the first clamp mechanism 7.

    (2) The C-axis drive motor 7am of the headstock 7a of the first clamp mechanism 7 is operated to perform the centering (positioning) operation of the cutting start position of the cylindrical ingot block with respect to the pair of rotary cutting blades 91a and 91b. . Next, the robot claw of the first loader / unloader mechanism 13 is released, and the claw is returned to the standby position.

  (3) Cutting the front and rear surfaces of the cylindrical ingot block by moving the first work table on which the first clamp mechanism is mounted in the direction (right direction) of the pair of rotating cutting blades rotating. Processing.

  (4) Next, the C axis of the cut ingot block is rotated 90 degrees.

  (5) The first work table 4 on which the first clamp mechanism 7 is mounted is moved to the left of the pair of rotating cutting blades 91a and 91b to move the workpiece back and forth by the pair of rotating cutting blades 91a and 91b. Surface cutting is performed to obtain a square columnar ingot block (workpiece).

  (6) The first work table 4 on which the first clamp mechanism 7 is mounted is moved in the direction of the loading / unloading stage (s1), and the robot hand of the second loader / unloader mechanism 13 ′ is advanced to move the robot hand The gripping claw is closed to grip the square columnar ingot block, and then the tailstock 7b of the first clamp mechanism 7 is retracted to move the workpiece (w) by the claw of the robot hand of the square columnar silicon ingot block. After releasing the clamping, the robot hand is raised and the first clamp mechanism 7 is retracted to the right standby position. Thereafter, the second clamp mechanism 7 ′ is moved rightward to return to the loading / unloading stage (s1) position, and then the robot hand is lowered to place the square columnar ingot block w into the second clamp mechanism 7 ′. The headstock 7a is positioned between the tailstock 7a and the tailstock 7b, and the tailstock 7b is moved forward to deliver (hold) the square columnar ingot block to the second clamp mechanism 7 ′.

(7) The chamfering of the square columnar ingot block with respect to the surface in the blade diameter direction of the pair of cup wheel type rough grinding wheels 10g, 10g by rotating the C axis of the square columnar ingot block on the headstock 7a of the second clamp mechanism 7 '. Performs C-axis centering at the start of machining. Next, the grasping claw of the robot hand is opened to release the square columnar ingot block, and the robot hand of the second loader / unloader mechanism 13 ′ is retracted to the standby position.

(8) While moving the second work table 4 ′ on which the second clamp mechanism 7 ′ holding the square columnar ingot block is moved in the left direction, it is moved into the grinding stage (s 3) of the square columnar ingot block. The rotating grindstone 10g, 10g of the rotating grinding wheel head structure 10 is applied to the front and rear surfaces of the ingot block to perform rough grinding. On the other hand, during this rough grinding process, the cylindrical silicon ingot block (w), which is a workpiece, is moved to the first clamping mechanism 7 using the loader / unloader mechanism 13 returned to the loading / unloading stage (s1). Is carried between the spindle head 7a with an encoder having a function of rotating around the rotation C axis and the tailstock 7b, and then the tailstock 7b is advanced to hold the cylindrical silicon ingot block between the first clamp mechanism 7 (Support).

  (9) Next, the C-axis of the square columnar ingot block (w) whose front and rear surfaces are roughly ground is rotated by 90 degrees.

  (10) While moving the second work table 4 ′ mounted with the second clamp mechanism 7 ′ holding the square columnar ingot block to the right side loading / unloading stage (s1) position side, the square columnar ingot block In the grinding stage (s3), the cup wheel type rough grinding wheels 10g, 10g of the pair of composite grinding wheel head structures 10 are applied to the front and rear surfaces of the ingot block w to perform rough grinding.

  (11) Next, after the cup wheel type finish grinding wheel shafts 11a, 11a of the composite grinding wheel head structure 10 are advanced to the ingot block grinding start position, the wheel shafts 11a, 11a are rotated.

  (12) Move the second work table 4 ′, which is mounted with the second clamp mechanism 7 ′ holding the square columnar ingot block w, to the left while moving it into the grinding stage (s 3) of the square columnar ingot block, The rotating cup wheel type finishing grinding wheels 11g, 11g of the pair of composite grinding wheel head structures 10 are moved forward to finish grinding by hitting the front and rear surfaces of the ingot block.

  (13) Next, the C-axis of the square columnar ingot block whose front and rear surfaces are finish-ground is rotated by 90 degrees.

  (14) A quadrangular columnar ingot while moving a second work table 4 ′ mounted with a second clamp mechanism 7 ′ sandwiching the quadrangular columnar ingot block to the loading / unloading stage (s1) position located in the right direction. In the grinding stage (s3) of the block, the cup wheel type finishing grinding wheels 11g, 11g rotating the pair of composite grinding wheel head structures 10 are moved forward and applied to the front and rear surfaces of the ingot block to perform finish grinding.

  (15) Next, the height positions of the rotating cup wheel type finishing grinding wheels 11g, 11g of the pair of composite grinding wheel head structures 10 are changed (see FIG. 4), and the square columnar ingot block (w) is sandwiched. A cup wheel type in which a pair of composite grinding wheel head structures are rotated by moving a second work table 4 'on which a two-clamp mechanism 7' is mounted into a grinding stage (s3) of a square columnar ingot block while moving leftward. The finish grinding wheel 11g, 11g is applied to four or two faces of the four corner R corner faces (R1, R2, R3, R4) of the quadrangular columnar ingot block to perform R finish grinding. At this time, the quadrangular columnar ingot block is rotated 360 degrees around the C axis or 0-30 degrees swinging by the motor 7am of the headstock 7a.

  (16) The second work table 4 ′ on which the second clamp mechanism 7 ′ holding the square columnar ingot block (w) is mounted is moved to the right side loading / unloading stage (s 1) position side.

  (17) The bottom surface of the quadrangular columnar silicon ingot block at the loading / unloading stage (s1) position subjected to the finish grinding of the four side surfaces and the four corner R corners is gripped by the robot's gripping claws of the second loader / unloader mechanism 13 ′. Then, the tailstock 7b of the second clamp mechanism is retracted, and the holding (supporting) of the quadrangular columnar silicon ingot block by the second clamp mechanism is released.

  (18) The robot gripping claw of the second loader / unloader mechanism 13 'is transferred to the standby position outside the housing of the composite chamfering apparatus 1, and the processed ingot block is lowered.

  (19) The second work table 4 ′ of the second clamp mechanism 7 ′ is moved to the left of the standby position.

  The composite chamfering apparatus 1 of the present invention is in an existing factory building because the longitudinal dimension of the composite chamfering apparatus 1 is the same as that of the conventional machine even if the longitudinal dimension of the workpiece is doubled. The chamfering apparatus can be installed by replacing it with the new composite chamfering apparatus of the present invention.

DESCRIPTION OF SYMBOLS 1 Compound chamfering processing apparatus w Workpiece s1 Loading / unloading stage 13 1st loader / unloader mechanism 13 '2nd loader / unloader mechanism s2 Cylindrical ingot block side-peeling slicing stage s3 Square column ingot block grinding stage 2 Machine frame 3 Guide rail 4 Work table 5 Work table moving motor 7 Clamp mechanism 7a Spindle base 7b Tailstock 7m Drive motor C Work support shaft center 9 Cutting device 91a, 91b Rotary cutting blade 10 Combined structure grinding wheel head structure 10a First grinding wheel shaft 10g Cup wheel type rough grinding wheel 10in, 10out Pressure air flow path 11a Second grinding wheel shaft 11g Cup wheel type finishing grinding wheel gc Grinding wheel shaft center

The invention of claim 1
A composite chamfering processing apparatus (1) for an ingot block for peeling a side surface of a cylindrical ingot block, which is a workpiece (w), into a square columnar ingot block, and further grinding the four side surfaces of the square columnar ingot block. This composite chamfering device (1)
a). A pair of work tables (4, 4 ') provided so as to be reciprocated in the left-right direction on guide rails (3, 3) provided extending in the left-right direction on the machine frame (2 ) ;
b). A first clamp mechanism (7) and a second clamp mechanism ( a pair of a headstock (7a) and a tailstock (7b) mounted separately on the left and right on the pair of work tables (4, 4 ') ( 7 ')
c). The work table (4 ) on which the workpiece (w) sandwiched between the headstock (7a) and the tailstock (7b) of the first clamping mechanism (7) and the second clamping mechanism (7 ′ ) is placed . 4 ′) drive mechanism (5, 5) for reciprocating left and right direction ,
d). The work table (4) on which the work stage (s) of the composite chamfering device (1) is mounted with the second clamp mechanism (7 ') from the right side of the work table (4) on which the first clamp mechanism (7) is mounted. ') In the left direction , the cylindrical ingot block is divided into a side-peeling slicing stage (s2), a workpiece (w) loading / unloading stage (s1), and a square columnar ingot block grinding stage (s3).
e). The side-peeling slicing stage (s2) of the cylindrical ingot block includes a cutting device (9, 9) having a pair of rotary cutting blades (91a, 91b) and a headstock (7a) of the first clamping mechanism (7). Composite chamfering so that the rotary cutting blade diameter surfaces of the pair of rotary cutting blades (91a, 91b) face each other across the workpiece support shaft of the workpiece (w) held between the tailstock (7b) a pair of rotary cutting blades (91a, 91b) of the cutting device provided on the front side and rear side of the guide rail of the processing apparatus (1) (3) (9,9) by the on the first work table (4) of one clamping mechanism (7) in the lateral direction the workpiece which is the nipped by the movement of the (w) of the slicing stage which forms a square pillar ingot block is stripped four sides of a cylindrical ingot block for cutting the front and rear sides (w) ( Is 2),
f). The loading / unloading stage (s1), said composite chamfering apparatus (1) of the workpiece in the central portion position (w) machine frame with respect to the front (2) first loader / unloader before side of the outer The mechanism (13) and the second loader / unloader mechanism (13 ′) are installed in parallel, and the workpiece (w) is moved to the first clamp mechanism (7) by the first loader / unloader mechanism (13 ). The second loader / unloader mechanism (13 ') is clamped between the headstock (7a) and the tailstock (7b) , and the second loader / unloader mechanism (13') is clamped by the first clamp mechanism (7) ( w) a second clamping mechanism (7 'headstock) (7a) and tailstock (7b) working pass between, and, second clamping mechanism (7' headstock) and (7a) tailstock (7b) Square columnar ingot block sandwiched between (7 ) Work to unload
g). The quadrangular columnar ingot grinding stage block (w) (s3) includes a second clamping mechanism (7 '), the workpiece (w) first grinding wheel axis is movable to and vertically lifting the front and rear with respect to the side surface of the ( And a cup wheel type rough grinding wheel (10g) supported by 10a) and a second grinding wheel shaft (11a) which can be moved back and forth by supplying linear air into the first grinding wheel shaft (10a) or by a linear motor of a magnetic bearing. A pair of wheel head head structures (10, 10) having a composite structure in which the wheel wheel center (gc, gc) of the cup wheel type finish grinding wheel (11g) that has been supported so that both wheel axes (gc, gc) are the same are provided for each cup wheel. across the work table (4 ') as the mold grinding surfaces opposing grinding stage composite chamfering apparatus (1) of the front side and the rear side is provided a square pillar-shaped ingot block (w) s3) a and, grinding the blade outer diameter of the cup wheel type finishing grindstone (11g) is smaller than the grinding blades inner diameter of the cup wheel type rough grinding (10 g), grinding the cutting edge of the cup wheel type finishing grindstone (11g) Is located inside the grindstone cutting edge of the cup wheel type rough grinding grindstone (10 g) , and is sandwiched by the lateral movement of the second clamp mechanism (7 ′) on the second work table (4 ′). a cup-wheel grinding wheel before and after sides of the columnar Lee emissions ingot block (w) (10g, 11g) by rough grinding and finish grinding to grinding stage (s3),
It is intended to provide a composite chamfering device of the ingot block (1), characterized in.

The invention of claim 2, using a composite chamfering device of the claim 1, wherein (1), through the following steps, a cylindrical Lee emissions ingot block as a workpiece (w) to the prismatic ingot block the method of chamfering is to provide.
1). Using the first loader / unloader mechanism (13) in the loading / unloading stage (s1), the work piece (w) is transferred to the headstock (7a) and the tailstock (7b) of the first clamp mechanism (7 ). Then, the tailstock (7b) is moved forward to hold the cylindrical ingot block (w) between the headstock (7a) and the tailstock (7b) of the first clamp mechanism (7). .
2) The spindle (7b) center support shaft of the first clamp mechanism ( 7) is rotated by a servo motor (7m) to cut the workpiece (w) with respect to a pair of rotary cutting blades (91a, 91b) . Perform centering work at the start position.
3). The first work table (4) on which the first clamp mechanism (7) is mounted is moved to the right of the pair of rotating cutting blades (91a, 91b) that the cutting device (9) rotates to move the pair of rotating cutting blades. The front and rear surfaces of the workpiece (w) are cut by the rotation of.
4). The axis (C) of the cut workpiece (w) is rotated 90 degrees.
5). According to the pair of rotary cutting blades (91a, 91b) which rotates leftward in a first work table (4) the pair of rotary cutting blades by moving the mounting first clamping mechanism (7) of (91a, 91b) Cutting of the front and back surfaces of the workpiece (w) is performed to obtain a square columnar ingot block (w) .
6). Said moving first clamping mechanism (7) said first work table (4) for mounting to the loading / unloading stage (s1) direction, the square pillar with a second loader / unloader mechanism (13 ') after the ingot block (w) was released from the holding of the first clamping mechanism (7) is retracted to the standby position located first clamping mechanism (7) in the right side direction. Thereafter, the second clamp mechanism (7 ′) is moved to the right and returned to the loading / unloading stage (s1) position, and then the square columnar ingot block is moved by the second loader / unloader mechanism (13 ′). (W) is positioned between the headstock (7a) and the tailstock (7b ) of the second clamp mechanism (7 ') and is sandwiched.
7). A center axis (C) of the square columnar ingot block (w) is rotated by a servo motor (7 m) with a spindle support center support shaft of the second clamp mechanism (7 '), and a pair of cup wheel type rough grinding wheels (10 g , 10g) C-axis centering at the start of chamfering of the square columnar ingot block (w) with respect to the surface in the blade radial direction, and then the second loader / unloader mechanism (13 ') is moved to the square columnar ingot. The second loader / unloader mechanism (13 ′) is retracted to the standby position by releasing the block (w) from gripping.
8). Grinding stage (s3) of the square columnar ingot block (w) while moving the second work table (4 ′) mounting the second clamp mechanism (7 ′) holding the square columnar ingot block (w) to the left. The cup wheel type rough grinding wheel (10g, 10g) rotated by the pair of composite grinding wheel head structures (10, 10) is applied to the front and back surfaces of the square columnar ingot block (w) to perform rough grinding. .
9). Next, the axis (C) of the square columnar ingot block (w) whose front and rear surfaces are roughly ground is rotated by 90 degrees.
10). While moving the second work table (4 ′) mounting the second clamp mechanism (7 ′) holding the square columnar ingot block (w) to the right loading / unloading stage (s1) position side, the square is moved. Coarse grinding is performed by applying a cup wheel type rough grinding wheel (10g, 10g) of a pair of composite grinding wheel head structures (10 , 10) to the front and back surfaces of the ingot block (w) in a grinding stage (s3) of the columnar ingot block. Processing.
11). Next, after the cup wheel type finish grinding wheel shaft (11a) of the composite grinding wheel head structure (10, 10) is advanced to the ingot block grinding start position, the grinding wheel shaft (11a) is rotated.
12). The second work table (4 ′) on which the second clamp mechanism for sandwiching the square columnar ingot block (w) is mounted is moved to the left while moving into the grinding stage (s3) of the square columnar ingot block. The cup wheel type finish grinding wheel (11g, 11g) of the composite grinding wheel head structure (10, 10) is applied to the front and back surfaces of the ingot block (w) to perform finish grinding.
13). Next, the axis (C) of the square columnar ingot block (w) whose front and rear surfaces are finish-ground is rotated by 90 degrees.
14). The second work table (4 ′) on which the second clamp mechanism (7 ′) holding the square columnar ingot block (w) is mounted is moved to the loading / unloading stage (s1) position side located in the right direction. On the front and back surfaces of the square columnar ingot block (w) , the cup wheel type finishing grinding wheels (11g, 11g) of the pair of composite grinding wheel head structures (10, 10) rotating in the grinding stage (s3) of the square columnar ingot block are rotated. Apply finish grinding.
15). The second work table (4 ′) on which the second clamp mechanism (7 ′ ) that sandwiches the square columnar ingot block (w) is mounted is moved to the right loading / unloading stage (s1) position side.
16). A square columnar ingot block (w) whose four side surfaces at the loading / unloading stage (s1) position are ground is removed from the machine frame (2) of the composite chamfering device (1) using a second loader / unloader mechanism. Transport to.

The composite chamfering apparatus 1 of the present invention is
a) A pair of work tables 4, 4 ′ provided so as to be reciprocated in the left-right direction on the guide rails 3, 3 provided extending in the left-right direction on the machine frame 2.
b) a first clamp mechanism 7 and a second clamp mechanism 7 'each comprising a pair of headstock 7a and tailstock 7b mounted separately on the left and right on the pair of work tables;
c) The work tables 4 and 4 ′ carrying the work (w) sandwiched between the headstock 7a and the tailstock 7b of the first clamp mechanism 7 and the second clamp mechanism 7 ′ are reciprocated in the left-right direction. Drive mechanisms 5 and 5 ,
d) The three work stages are directions in which the left and right direction of the composite chamfering apparatus 1 is viewed from the front side, and the second clamp mechanism on the left side of the first clamp mechanism 7 on the right side of the composite chamfering apparatus. Towards 7 ', the work stage of the composite chamfering apparatus is a side-peeling slicing stage (s2) of a cylindrical ingot block, a loading / unloading stage (s1) of an ingot block (workpiece), and grinding of a square columnar ingot block It is divided into stages (s3).

Claims (2)

a) A pair of work tables provided so as to be reciprocated in the left-right direction on a guide rail provided extending in the left-right direction on the machine frame;
b) a first clamp mechanism and a second clamp mechanism comprising a pair of headstock and tailstock mounted separately on the left and right on the pair of work tables;
c) A drive mechanism for reciprocating the work table carrying the work sandwiched between the headstock and the tailstock of the first clamp mechanism and the second clamp mechanism in the left-right direction;
d) A compound chamfering device that is a direction in which the left-right direction of the composite chamfering device is viewed from the front side and that is directed from the first clamp mechanism in the right direction of the composite chamfering device toward the second clamp mechanism in the left direction. Are divided into a cylindrical ingot block side-peeling slicing stage (s2), an ingot block (workpiece) loading / unloading stage (s1), and a square columnar ingot block grinding stage (s3).
e) The side-peeling slicing stage (s2) of the cylindrical ingot block includes a pair of rotary cutting blades sandwiching a work support shaft of a work sandwiched between the headstock and the tailstock of the first clamping mechanism. The cylindrical ingot clamped by the movement of the first clamp mechanism on the first work table in the left-right direction by a pair of rotary cutting blades provided at the front and rear of the guide rail so that the diameter surfaces of the rotary cutting blades face each other It is a slicing stage that peels off the four sides of a cylindrical ingot block that cuts the front and rear sides of the block to form a square columnar ingot block
f) The loading / unloading stage (s1) is configured such that a first loader / unloader mechanism and a second loader / unloader mechanism are installed in parallel on the front side of the central position of the composite chamfering apparatus, The first loader / unloader mechanism is used to hold the workpiece between the headstock and the tailstock of the first clamp mechanism, and the second loader / unloader mechanism holds the workpiece held between the first clamp mechanism and the first clamp mechanism. The work to transfer between the headstock and tailstock of the two clamp mechanism, and the work of unloading the square columnar workpiece sandwiched between the headstock and tailstock of the second clamp mechanism,
g) A grinding stage (s3) of the square columnar ingot block includes a second clamp mechanism, a cup wheel type rough grinding wheel supported by a first grinding wheel shaft that can move back and forth and move up and down, and the first grinding wheel. Each cup wheel type grindstone surface is composed of a pair of grindstone shaft head structures of a composite structure in which a cup wheel type finish grinding grindstone supported by a second grindstone shaft movable back and forth within the shaft is provided with the same grindstone axis center. Is a grinding stage of a square columnar ingot block provided before and after the work table with the work table sandwiched therebetween, and the grinding wheel edge diameter of the cup wheel type finishing grinding wheel is the grinding wheel of the cup wheel type rough grinding wheel The grinding wheel edge of the cup wheel type finishing grinding wheel is smaller than the inner diameter of the blade, and the inside of the grinding wheel edge of the cup wheel type rough grinding wheel is inside. Location, and the clamping has been quadrangular prism silicon rough grinding by a cup wheel grinding wheel before and after sides of the ingot block and finish grinding to grinding stage by the movement in the lateral direction of the second clamping mechanism on the second work table,
A composite chamfering device for ingot blocks, characterized in that A method for chamfering a cylindrical silicon ingot block into a prismatic ingot block using the composite chamfering apparatus according to claim 1 through the following steps.
(1) Using the first loader / unloader mechanism in the loading / unloading stage (s1), the workpiece is carried between the headstock and the tailstock of the first clamping mechanism, and then the tailstock is moved. The cylindrical ingot block is moved forward and is sandwiched between the headstock and the tailstock of the first clamp mechanism.
(2) The C-axis drive motor of the head stock of the first clamp mechanism is operated to perform the centering operation of the cutting start position of the workpiece with respect to the pair of rotary cutting blades.
(3) The first work table on which the first clamp mechanism is mounted is moved to the right of the pair of rotating cutting blades rotated by the cutting device, and the front and rear surfaces of the workpiece are cut by the pair of rotating cutting blades. Do.
(4) The C axis of the cut ingot block is rotated by 90 degrees.
(5) The first work table on which the first clamp mechanism is mounted is moved to the left of the pair of rotating cutting blades to rotate, and the front and rear surfaces of the ingot block are cut by the pair of rotating cutting blades. Get a columnar ingot block.
(6) The first work table on which the first clamp mechanism is mounted is moved in the loading / unloading stage (s1) direction, and the square columnar ingot block is moved to the first clamp mechanism using the second loader / unloader mechanism. After releasing from clamping, the first clamp mechanism is retracted to the right standby position. Thereafter, the second clamp mechanism is moved in the right direction to return to the loading / unloading stage (s1) position, and then the square columnar ingot block is moved by the second loader / unloader mechanism. And place it between the tailstock.
(7) The C-axis at the start of chamfering of the square columnar ingot block with respect to the surface in the radial direction of the pair of cup wheel rough grinding wheels by rotating the C-axis of the square columnar ingot block on the head stock of the second clamp mechanism Centering is performed, and then the second loader / unloader mechanism is released from gripping the square columnar ingot block, and the second loader / unloader mechanism is retracted to the standby position.
(8) A pair of composite grinding wheels are moved by moving a second work table mounted with a second clamp mechanism for holding the square columnar ingot block leftward into the grinding stage (s3) of the square columnar ingot block. Rough grinding is performed by applying a cup wheel type rough grinding wheel with a rotating head structure to the front and back surfaces of the ingot block.
(9) Next, the C-axis of the quadrangular columnar ingot block whose front and rear surfaces are roughly ground is rotated by 90 degrees.
(10) A square columnar ingot block grinding stage (s3) while moving a second worktable mounted with a second clamp mechanism for clamping the square columnar ingot block to the right side loading / unloading stage (s1) position side. ), A rotating cup wheel type rough grinding wheel of a pair of composite grinding wheel head structures is applied to the front and back surfaces of the ingot block to perform rough grinding.
(11) Next, the cup wheel type finish grinding wheel shaft of the composite grinding wheel head structure is advanced to the ingot block grinding start position, and then the wheel shaft is rotated.
(12) A pair of composite grinding wheels are moved by moving a second work table mounted with a second clamp mechanism for holding the square columnar ingot block into the grinding stage (s3) of the square columnar ingot block while moving it to the left. Finish grinding by applying a cup wheel type finishing grinding wheel with rotating head structure to the front and back surfaces of the ingot block.
(13) Next, the C-axis of the square columnar ingot block whose front and rear surfaces are finish-ground is rotated by 90 degrees.
(14) Grinding stage of the square columnar ingot block while moving the second work table mounted with the second clamp mechanism holding the square columnar ingot block to the loading / unloading stage (s1) position side located in the right direction. Within (s3), the cup wheel type finish grinding wheel rotating by the pair of composite grinding wheel head structures is applied to the front and back surfaces of the ingot block to perform finish grinding.
(15) The second work table on which the second clamp mechanism for sandwiching the square columnar ingot block is mounted is moved to the right side loading / unloading stage (s1) position side.
(16) The quadrangular columnar ingot block whose four side surfaces at the loading / unloading stage (s1) position are ground is transferred out of the housing of the composite chamfering device using the second loader / unloader mechanism.

Images