JPH0530352Y2 - - Google Patents

Info

Publication number
JPH0530352Y2
JPH0530352Y2 JP1985183933U JP18393385U JPH0530352Y2 JP H0530352 Y2 JPH0530352 Y2 JP H0530352Y2 JP 1985183933 U JP1985183933 U JP 1985183933U JP 18393385 U JP18393385 U JP 18393385U JP H0530352 Y2 JPH0530352 Y2 JP H0530352Y2
Authority
JP
Japan
Prior art keywords
reaction tube
manifold
ring
open door
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985183933U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6291433U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985183933U priority Critical patent/JPH0530352Y2/ja
Publication of JPS6291433U publication Critical patent/JPS6291433U/ja
Application granted granted Critical
Publication of JPH0530352Y2 publication Critical patent/JPH0530352Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985183933U 1985-11-28 1985-11-28 Expired - Lifetime JPH0530352Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (en:Method) 1985-11-28 1985-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (en:Method) 1985-11-28 1985-11-28

Publications (2)

Publication Number Publication Date
JPS6291433U JPS6291433U (en:Method) 1987-06-11
JPH0530352Y2 true JPH0530352Y2 (en:Method) 1993-08-03

Family

ID=31131125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985183933U Expired - Lifetime JPH0530352Y2 (en:Method) 1985-11-28 1985-11-28

Country Status (1)

Country Link
JP (1) JPH0530352Y2 (en:Method)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4459104A (en) * 1983-06-01 1984-07-10 Quartz Engineering & Materials, Inc. Cantilever diffusion tube apparatus and method
JPS6031000U (ja) * 1983-08-09 1985-03-02 ウシオ電機株式会社 光照射炉

Also Published As

Publication number Publication date
JPS6291433U (en:Method) 1987-06-11

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