JPH0336794B2 - - Google Patents

Info

Publication number
JPH0336794B2
JPH0336794B2 JP59233891A JP23389184A JPH0336794B2 JP H0336794 B2 JPH0336794 B2 JP H0336794B2 JP 59233891 A JP59233891 A JP 59233891A JP 23389184 A JP23389184 A JP 23389184A JP H0336794 B2 JPH0336794 B2 JP H0336794B2
Authority
JP
Japan
Prior art keywords
outer tube
tube
semiconductor wafer
insertion side
inner tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59233891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61111992A (ja
Inventor
Toshiro Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP23389184A priority Critical patent/JPS61111992A/ja
Publication of JPS61111992A publication Critical patent/JPS61111992A/ja
Publication of JPH0336794B2 publication Critical patent/JPH0336794B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP23389184A 1984-11-05 1984-11-05 減圧気相成長装置 Granted JPS61111992A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23389184A JPS61111992A (ja) 1984-11-05 1984-11-05 減圧気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23389184A JPS61111992A (ja) 1984-11-05 1984-11-05 減圧気相成長装置

Publications (2)

Publication Number Publication Date
JPS61111992A JPS61111992A (ja) 1986-05-30
JPH0336794B2 true JPH0336794B2 (en:Method) 1991-06-03

Family

ID=16962181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23389184A Granted JPS61111992A (ja) 1984-11-05 1984-11-05 減圧気相成長装置

Country Status (1)

Country Link
JP (1) JPS61111992A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101442050B1 (ko) * 2013-05-07 2014-09-18 (주)해피라이프 베개

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871783A (en:Method) * 1971-12-29 1973-09-28
JPS5628636A (en) * 1979-08-15 1981-03-20 Mitsubishi Electric Corp Cvd film forming apparatus
JPS58162634U (ja) * 1982-04-24 1983-10-29 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101442050B1 (ko) * 2013-05-07 2014-09-18 (주)해피라이프 베개

Also Published As

Publication number Publication date
JPS61111992A (ja) 1986-05-30

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