JPH0530030Y2 - - Google Patents

Info

Publication number
JPH0530030Y2
JPH0530030Y2 JP1987060741U JP6074187U JPH0530030Y2 JP H0530030 Y2 JPH0530030 Y2 JP H0530030Y2 JP 1987060741 U JP1987060741 U JP 1987060741U JP 6074187 U JP6074187 U JP 6074187U JP H0530030 Y2 JPH0530030 Y2 JP H0530030Y2
Authority
JP
Japan
Prior art keywords
suction
wafer
wafers
chuck body
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987060741U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63167418U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987060741U priority Critical patent/JPH0530030Y2/ja
Publication of JPS63167418U publication Critical patent/JPS63167418U/ja
Application granted granted Critical
Publication of JPH0530030Y2 publication Critical patent/JPH0530030Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1987060741U 1987-04-23 1987-04-23 Expired - Lifetime JPH0530030Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060741U JPH0530030Y2 (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060741U JPH0530030Y2 (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Publications (2)

Publication Number Publication Date
JPS63167418U JPS63167418U (enrdf_load_stackoverflow) 1988-11-01
JPH0530030Y2 true JPH0530030Y2 (enrdf_load_stackoverflow) 1993-07-30

Family

ID=30893428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060741U Expired - Lifetime JPH0530030Y2 (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPH0530030Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569175Y2 (ja) * 1991-08-31 1998-04-22 山形日本電気株式会社 ベローズ形ウェーハ真空チャック

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957498A (enrdf_load_stackoverflow) * 1972-10-04 1974-06-04
JPS6088548U (ja) * 1983-11-22 1985-06-18 三菱電機株式会社 半導体ウエ−ハの真空吸着具

Also Published As

Publication number Publication date
JPS63167418U (enrdf_load_stackoverflow) 1988-11-01

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