JPH0529740A - Electrolytic copper foil for printed circuit board - Google Patents

Electrolytic copper foil for printed circuit board

Info

Publication number
JPH0529740A
JPH0529740A JP20229291A JP20229291A JPH0529740A JP H0529740 A JPH0529740 A JP H0529740A JP 20229291 A JP20229291 A JP 20229291A JP 20229291 A JP20229291 A JP 20229291A JP H0529740 A JPH0529740 A JP H0529740A
Authority
JP
Japan
Prior art keywords
copper foil
layer
foil
electrolytic copper
copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20229291A
Other languages
Japanese (ja)
Other versions
JP3081026B2 (en
Inventor
Noboru Matsuki
昇 松木
Sadao Matsumoto
貞雄 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FURUKAWA SAAKITSUTO FOIL KK
Original Assignee
FURUKAWA SAAKITSUTO FOIL KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FURUKAWA SAAKITSUTO FOIL KK filed Critical FURUKAWA SAAKITSUTO FOIL KK
Priority to JP03202292A priority Critical patent/JP3081026B2/en
Publication of JPH0529740A publication Critical patent/JPH0529740A/en
Application granted granted Critical
Publication of JP3081026B2 publication Critical patent/JP3081026B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal

Abstract

PURPOSE:To eliminate warpage due to a crystalline distortion by a wide electrolytic copper foil having uniform thickness distribution and to enhance a connecting strength with an insulating board with predetermined surface roughness by forming gloss copper-plated layers on both surfaces of the foil in such a manner that the thickness, surface roughness of the plated layer provided on one surface of the foil fall in special ranges. CONSTITUTION:A ratio of a thickness of a gloss copper-plated layer 2 provided on one surface of an electrolytic copper foil 1 to that of the layer provided on the other surface is desirably 50-150%. The surface of the layer 2 of the foil 1 for a first printed circuit board is roughed to 0.2-5mum of roughness, one or more thin film 3 selected from a group consisting of a zinc layer, a zinc alloy layer, a nickel layer and a nickel alloy layer is provided at the side of the roughed surface at least to be connected to the insulating board, and the surface of the thin film is chromated. Further, the roughed surface or the chromated surface 4 connected to the insulating board of the copper foil for a second printed circuit board is coated with silane coupling agent 5.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プリント配線板用電解
銅箔に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolytic copper foil for printed wiring boards.

【0002】[0002]

【従来の技術】プリント配線板は、ス−パ−コンピュ−
タから玩具にいたるまで、各種電気機器の回路に広く用
いられており、省資源化、材料費節減及び電子機器の小
型高性能化の要請から、薄いプリント配線板が望まれて
いる。プリント配線板を薄くする方法としては、プリン
ト配線板を製造する原板の銅箔部分(のちに回路を構成
する)を薄くするか、あるいは該銅箔に接合する絶縁基
板を薄くする方法がある。
2. Description of the Related Art A printed wiring board is a supercomputer.
From printed circuit boards to toys, they are widely used in circuits of various electric devices, and thin printed wiring boards are desired in view of demands for resource saving, material cost reduction, and miniaturization and high performance of electronic devices. As a method for thinning a printed wiring board, there is a method of thinning a copper foil portion (which later constitutes a circuit) of an original plate for manufacturing a printed wiring board or a method of thinning an insulating substrate joined to the copper foil.

【0003】しかしながら、銅箔自体を薄くすると、形
成した電気回路の通電容量が小さくなるとともに回路自
体の強度が低下するという欠点があり、また銅箔の取扱
いが難しくなるので、製造した原板の歩留まりが低下
し、プリント配線板の製造コストが高くなるという欠点
があった。
However, when the copper foil itself is made thin, there are drawbacks that the current carrying capacity of the formed electric circuit becomes small and the strength of the circuit itself is lowered, and the handling of the copper foil becomes difficult. And the manufacturing cost of the printed wiring board becomes high.

【0004】また、銅箔を2層以上有する原板では、絶
縁基板を薄くすると、対向する銅箔の距離が短くなるの
で、この原板からプリント配線板を作製したときに、回
路間の絶縁抵抗が減少し、電気信号が妨害を受けたり、
電気的な短絡等が起こり易くプリント配線板の品質が低
下するという欠点があった。
Further, in the original plate having two or more layers of copper foil, if the insulating substrate is made thin, the distance between the opposing copper foils becomes short, so that when the printed wiring board is produced from this original plate, the insulation resistance between the circuits is reduced. Decrease, the electrical signal is disturbed,
There is a drawback that the quality of the printed wiring board is deteriorated because an electrical short circuit easily occurs.

【0005】また、プリント配線板の原板には、表面を
粗化処理した電解銅箔が一般的に用いられており、その
表面の微細な凹凸を絶縁基板に食い込ませて基板樹脂と
の接合強度を高めている。
Further, an electrolytic copper foil having a roughened surface is generally used as an original plate of a printed wiring board, and fine irregularities on the surface are eroded into an insulating substrate to bond with a substrate resin. Is increasing.

【0006】しかしながら、このようなプリント配線板
用電解銅箔では、例えば、図3に示すように、電解銅箔
1の表面の凹凸8が絶縁基板10に食い込んだ分だけ、
基板の有効厚さ(L1)が薄くなるので、絶縁基板を薄
くした場合と同様に、プリント配線板の品質が低下する
という欠点があった。
However, in such an electrolytic copper foil for a printed wiring board, for example, as shown in FIG. 3, the unevenness 8 on the surface of the electrolytic copper foil 1 bites into the insulating substrate 10,
Since the effective thickness (L1) of the board becomes thin, there is a drawback that the quality of the printed wiring board deteriorates as in the case where the insulating board is made thin.

【0007】したがって、プリント配線板を薄型化する
ためには、回路導体として十分な厚さを有し、かつ絶縁
基板と高い接合強度を維持することができるとともに、
表面の粗さが十分に小さいプリント配線板用電解銅箔が
要求される。
Therefore, in order to reduce the thickness of the printed wiring board, the printed wiring board can have a sufficient thickness as a circuit conductor and can maintain a high bonding strength with the insulating substrate.
An electrolytic copper foil for printed wiring boards having a sufficiently small surface roughness is required.

【0008】ところで、表面の粗さが十分に小さい銅箔
としては、まず圧延銅箔を挙げることができる。圧延銅
箔は、表面が平滑なものを容易に得ることができ、表面
粗さは、標準的な35μm の圧延銅箔で、0.5〜4μ
m (Rz値)程度である。また、圧延銅箔は、絶縁基板
との接合強度を高めるために、例えば、図4に示すよう
に、圧延銅箔11の表面に電気メッキし、凹凸9を形成
させて粗化処理するか、あるいは表面をエッチングして
粗化処理する(特公昭61−54592号公報参照)こ
とができる。
By the way, as a copper foil having a sufficiently small surface roughness, a rolled copper foil can be mentioned first. A rolled copper foil with a smooth surface can be easily obtained, and the surface roughness is a standard rolled copper foil of 35 μm with a thickness of 0.5-4 μm.
It is about m (Rz value). In order to increase the bonding strength with the insulating substrate, the rolled copper foil may be electroplated on the surface of the rolled copper foil 11 to form irregularities 9 for roughening treatment, as shown in FIG. Alternatively, the surface can be etched and roughened (see Japanese Patent Publication No. 61-54592).

【0009】しかしながら、圧延銅箔は、幅方向に均一
な厚さの箔を製造することが困難であり、この傾向は、
箔が薄くなるほど、また幅が広くなるほど困難になる。
したがって、プリント配線板の生産性の向上に有利な幅
広でありながら、薄い箔においても均一な箔厚分布を有
する電解銅箔と異なり、圧延銅箔は、均一な箔厚分布の
幅広箔を安定して製造することができないという欠点が
あり、また生産コストが電解銅箔に比べて高価であると
いう欠点があった。
However, it is difficult to manufacture a rolled copper foil having a uniform thickness in the width direction, and this tendency is
The thinner the foil and the wider it becomes more difficult.
Therefore, unlike electrolytic copper foil, which has a wide width, which is advantageous for improving the productivity of printed wiring boards, and has a uniform foil thickness distribution even in thin foils, rolled copper foil provides a stable wide foil thickness with a uniform foil thickness distribution. However, there is a drawback that the production cost is higher than that of the electrolytic copper foil.

【0010】一方、電解銅箔は、電解法により、40〜
150A/dm2 という高い電流密度で製造するので、図3
に示すように、そのメッキ面の凹凸8が粗くなり、平滑
な表面の銅箔を得るのが困難であった。また、圧延銅箔
なみの平滑な表面粗さ(Rzが0.5μm 程度)の電解
銅箔を得る方法として、メッキ浴にチオ尿素等の光沢化
剤を添加する方法が知られているが、この方法では、操
業電流密度が1〜5A/dm2 と小さいので、銅箔の生産性
が大幅に低下するという欠点があり、また、光沢化剤
は、電極電位を上昇させる、いわゆる分極により、表面
粗さを小さくする一方で、箔を構成する銅の結晶に歪を
起こすので、内部応力が蓄積し、箔が反り返るという欠
点があった。
On the other hand, the electrolytic copper foil has a thickness of 40
Since it is manufactured with a high current density of 150 A / dm 2 ,
As shown in FIG. 3, the unevenness 8 on the plated surface became rough, and it was difficult to obtain a copper foil having a smooth surface. A method of adding a brightening agent such as thiourea to a plating bath is known as a method for obtaining an electrolytic copper foil having a smooth surface roughness (Rz is about 0.5 μm) similar to that of rolled copper foil. In this method, since the operating current density is as small as 1 to 5 A / dm 2 , there is a drawback that the productivity of the copper foil is significantly reduced, and the brightening agent increases the electrode potential, so-called polarization, While reducing the surface roughness, the copper crystals that make up the foil are distorted, which causes the internal stress to accumulate and the foil to warp.

【0011】[0011]

【発明が解決しようとする課題】本発明の目的は、幅広
で箔厚分布が均一な箔を得ることができる電解法で容易
に製造することができ、また結晶歪による反り返りがな
く、表面の粗さが十分に小さい銅箔であり、絶縁基板と
の接合強度を高めることができるプリント配線板用電解
銅箔を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to easily produce a foil having a wide width and a uniform foil thickness distribution by an electrolysis method, and to prevent warping due to crystal strain, An object of the present invention is to provide an electrolytic copper foil for printed wiring boards, which is a copper foil having a sufficiently small roughness and which can enhance the bonding strength with an insulating substrate.

【0012】[0012]

【課題を解決するための手段】本発明の第一は、電解銅
箔の両面に光沢銅メッキ層を有するプリント配線板用電
解銅箔である。
The first aspect of the present invention is an electrolytic copper foil for a printed wiring board having a bright copper plating layer on both sides of the electrolytic copper foil.

【0013】本発明の第二は、第一のプリント配線板用
電解銅箔の光沢銅メッキ層の表面が粗さ0.2〜5μm
に粗化処理されており、該粗化処理面のうち、少なくと
も絶縁基板と接合する側に、亜鉛層、亜鉛合金層、ニッ
ケル層及びニッケル合金層からなる群より選ばれた一種
以上の薄層を有し、さらに、該薄層表面がクロメ−ト処
理されたプリント配線板用電解銅箔である。
A second aspect of the present invention is that the surface of the bright copper plating layer of the first electrolytic copper foil for printed wiring board has a roughness of 0.2 to 5 μm.
Roughened, and at least one of the roughened surfaces to be joined to the insulating substrate is one or more thin layers selected from the group consisting of a zinc layer, a zinc alloy layer, a nickel layer and a nickel alloy layer. And the surface of the thin layer is chromate-treated, which is an electrolytic copper foil for a printed wiring board.

【0014】本発明の第三は、第二のプリント配線板用
電解銅箔の絶縁基板と接合する粗化処理面又はクロメ−
ト処理面にシランカップリング剤が塗布されたプリント
配線板用電解銅箔である。
The third aspect of the present invention is to provide a roughened surface or chrome which is to be joined to the insulating substrate of the second electrolytic copper foil for printed wiring board.
The electrolytic copper foil for printed wiring boards has a silane coupling agent applied to its treated surface.

【0015】以下、本発明を詳細に説明する。本発明に
用いる電解銅箔としては、電解法により製造した銅箔で
あれば特に制限はない。中でも、JIS B 0601
に規定されたRz値で示される表面粗さ(以下、表面粗
さという)が8μm 以下のものが好ましく、表面粗さが
小さいものは、後述する光沢銅メッキ層を薄くすること
ができるので、箔の生産性を向上させることができる。
The present invention will be described in detail below. The electrolytic copper foil used in the present invention is not particularly limited as long as it is a copper foil manufactured by an electrolytic method. Among them, JIS B 0601
It is preferable that the surface roughness (hereinafter, referred to as surface roughness) indicated by the Rz value specified in 1 is 8 μm or less, and if the surface roughness is small, the glossy copper plating layer described later can be thinned. The foil productivity can be improved.

【0016】本発明に用いる光沢銅メッキ層としては、
電解銅箔の表面粗さを低下させることができるものであ
れば特に制限はなく、例えば、公知の光沢銅メッキ法を
用いて電解銅箔面に形成させることができる。
The bright copper plating layer used in the present invention includes:
There is no particular limitation as long as it can reduce the surface roughness of the electrolytic copper foil, and for example, it can be formed on the electrolytic copper foil surface using a known bright copper plating method.

【0017】光沢銅メッキ浴としては、公知の光沢銅メ
ッキ浴、例えば、市販の装飾用光沢銅メッキ浴を用いる
ことができ、また公知のチオ尿素、糖蜜等の光沢化剤を
添加した電解浴を用いても良い。
As the bright copper plating bath, a known bright copper plating bath, for example, a commercially available bright copper plating bath for decoration can be used, and a known electrolytic bath to which a brightening agent such as thiourea or molasses is added. May be used.

【0018】対極としては、例えば、含リン銅、鉛、鉛
合金、白金族の金属及び白金族の金属の酸化物を被覆し
たチタン電極等を用いることができ、中でも、含リン銅
電極が好ましい。
As the counter electrode, for example, a phosphorus-containing copper, lead, a lead alloy, a titanium electrode coated with a platinum group metal or an oxide of a platinum group metal, and the like can be used. Among them, a phosphorus-containing copper electrode is preferable. .

【0019】メッキ浴の温度は、15〜40℃が好まし
い。メッキ浴の温度が、40℃を超えるときには、添加
剤の消耗が激しくなる場合や、得られたメッキ面の光沢
性が不十分になる場合があり、15℃未満のときには、
メッキ面の光沢性が不十分になる場合がある。
The temperature of the plating bath is preferably 15 to 40 ° C. When the temperature of the plating bath is higher than 40 ° C, the additive may be consumed much, and the glossiness of the obtained plated surface may be insufficient.
The plated surface may have insufficient gloss.

【0020】電流密度は、0.5〜20 A/dm2が好まし
い。電流密度が、20 A/dm2を超えるときには、メッキ
面の光沢性が不十分になる場合があり、0.5 A/dm2
満のときには、得られたメッキ面の光沢性が不十分にな
る場合があるほか、生産性が低下する。
The current density is preferably 0.5 to 20 A / dm 2 . When the current density exceeds 20 A / dm 2 , the plated surface may have insufficient gloss, and when the current density is less than 0.5 A / dm 2 , the obtained plated surface has insufficient gloss. In some cases, productivity will decrease.

【0021】このようにして得られた光沢銅メッキ層の
表面粗さは、0.2〜5μm が好ましい。光沢銅メッキ
層の厚さは、用いる電解銅箔の表面が、粗い場合は厚く
する必要があり、小さい場合は薄くて済む。例えば、前
記表面粗さの範囲内の光沢銅メッキ層を得るには、電解
銅箔の表面粗さが4μm を超え、8μm 以下の場合に
は、光沢銅メッキ層の厚さは、10〜20μmが好まし
く、電解銅箔の表面粗さが4μm 以下の場合には、光沢
銅メッキ層の厚さは、6〜12μm が好ましい。
The surface roughness of the bright copper plating layer thus obtained is preferably 0.2 to 5 μm. The thickness of the bright copper plating layer needs to be thick when the surface of the electrolytic copper foil used is rough, and can be thin when the surface is small. For example, in order to obtain a bright copper plating layer having a surface roughness within the above range, when the surface roughness of the electrolytic copper foil exceeds 4 μm and is 8 μm or less, the thickness of the bright copper plating layer is 10 to 20 μm. Is preferable, and when the surface roughness of the electrolytic copper foil is 4 μm or less, the thickness of the bright copper plating layer is preferably 6 to 12 μm.

【0022】光沢銅メッキは、電解銅箔の表裏同時に行
っても、片面ずつ別々に行ってもよい。電解銅箔の一方
の面に有する光沢銅メッキ層の厚さに対する、他方の面
に有する光沢銅メッキ層の厚さの比率は、50〜150
%が好ましい。メッキ応力が引っ張り応力である場合に
は、この比率が、50%未満のときには、薄い光沢銅メ
ッキ層側が膨らむような状態で箔が反り返る場合があ
り、150%を超えるときには、厚い光沢銅メッキ層側
がへこむような状態で箔が反り返る場合がある。また、
メッキ応力が圧縮応力である場合には、これと逆にな
る。
The bright copper plating may be carried out simultaneously on the front and back of the electrolytic copper foil or separately on each side. The ratio of the thickness of the bright copper plating layer on one surface of the electrolytic copper foil to the thickness of the bright copper plating layer on the other surface is 50 to 150.
% Is preferred. When the plating stress is tensile stress, when the ratio is less than 50%, the foil may warp with the thin bright copper plating layer side swelling, and when it exceeds 150%, the thick bright copper plating layer may be warped. The foil may warp with the sides dented. Also,
The opposite is true when the plating stress is a compressive stress.

【0023】本発明のプリント配線板用電解銅箔は、電
解銅箔の両面に、光沢銅メッキ層を前述した所定の厚さ
で設けることにより、両光沢銅メッキ層がそれぞれの内
部応力を互いに打ち消すので、反り返りを防止する。
The electrolytic copper foil for a printed wiring board according to the present invention is provided with bright copper plating layers on both sides of the electrolytic copper foil so as to have the above-mentioned predetermined thicknesses, so that the both bright copper plating layers have respective internal stresses. Since it cancels, it prevents curling.

【0024】本発明に用いる光沢銅メッキ層としては、
のちに該層と接合させる、絶縁基板や他の層との接合強
度をより高めるために、表面を粗化処理したものが好ま
しい。表面を粗化処理した光沢銅メッキ層は、例えば、
図2に示すように、光沢銅メッキ層2の凹凸6を、さら
に微細な凹凸7にしたものである。
As the bright copper plating layer used in the present invention,
It is preferable that the surface is roughened in order to further increase the bonding strength with the insulating substrate or another layer to be bonded to the layer later. The bright copper plating layer whose surface is roughened is, for example,
As shown in FIG. 2, the unevenness 6 of the bright copper plating layer 2 is made into a finer unevenness 7.

【0025】粗化処理方法としては、光沢銅メッキ層を
形成させた箔を電解液中で、交流、直流又はこれらを組
み合わせて光沢銅メッキ層表面をエッチング処理する方
法(特公昭61−54592号公報参照)及び電解液中
で、限界電流密度近傍の高電流密度で、銅、銅合金、亜
鉛及び亜鉛合金からなる群より選ばれた一種又は二種以
上の金属薄層を、光沢銅メッキ層表面に電着する方法
(英国特許GB203246A、特開昭63−8969
8号公報参照)が好ましい。
As a roughening treatment method, a foil on which a bright copper plating layer is formed is subjected to an etching treatment on the surface of the bright copper plating layer in an electrolytic solution by using alternating current, direct current or a combination thereof (Japanese Patent Publication No. 61-54592). (See Japanese Patent Laid-Open Publication) and an electrolytic solution, at a high current density near the limiting current density, one or more metal thin layers selected from the group consisting of copper, copper alloys, zinc and zinc alloys are used as bright copper plating layers. Method of electrodeposition on the surface (UK Patent GB203246A, JP-A-63-8969)
No. 8) is preferable.

【0026】エッチング粗化処理に用いる浴としては、
塩酸浴、硫酸浴が好ましいが、中でも、塩酸浴は、表面
粗さが小さい処理面を形成することができるとともに、
この処理面と接合する絶縁基板や他の層との接合強度を
高めることができるので、さらに好ましい。
As the bath used for the etching roughening treatment,
A hydrochloric acid bath and a sulfuric acid bath are preferable, but among them, the hydrochloric acid bath can form a treated surface having a small surface roughness,
It is more preferable because the bonding strength with the insulating substrate or another layer bonded to this treated surface can be increased.

【0027】エッチング粗化処理の条件としては、例え
ば、下記の条件が挙げられる。 塩酸浴を用いた場合の条件 浴組成 塩酸・・・・・10〜100 g/l 条件 対極・・・・・ステンレス板又は白金族の金属もしくはその酸 化物を被覆したチタン電極 浴温・・・・・30〜80℃ 周波数・・・・20〜100Hz 電流密度・・・10〜40A/dm2 処理時間・・・10〜60秒
The conditions for the etching roughening treatment include, for example, the following conditions. Conditions when using hydrochloric acid bath Composition of hydrochloric acid: 10 to 100 g / l Conditions Counter electrode: Stainless steel plate or titanium electrode coated with platinum group metal or its oxide Bath temperature:・ ・ 30 to 80 ℃ Frequency ・ ・ ・ ・ ・ ・ 20 to 100Hz Current density ・ ・ ・ 10 to 40A / dm 2 Treatment time ・ ・ ・ 10 to 60 seconds

【0028】また、前記塩酸濃度が10 g/l未満のとき
には、粗化が深くなりすぎる場合があり、100 g/lを
超えるときには、粗化が十分にできない場合がある。電
流密度が10A/dm2 未満のときには、粗化が十分にでき
ない場合があり、40A/dm2を超えるときには、粗化が
深くなりすぎる場合がある。処理時間は、所望の粗さが
得られるように適宜調節することができる。
When the hydrochloric acid concentration is less than 10 g / l, the roughening may be too deep, and when it exceeds 100 g / l, the roughening may not be sufficiently performed. When the current density is less than 10 A / dm 2 , roughening may not be sufficiently performed, and when the current density exceeds 40 A / dm 2 , roughening may be too deep. The treatment time can be appropriately adjusted so as to obtain a desired roughness.

【0029】 硫酸浴を用いた場合の条件 浴組成 硫酸・・・・・30〜150 g/l、又はこれに塩酸を5〜20 g/l 加えたもの 条件 対極・・・・・ステンレス板、白金族の金属もしくはその酸化 物を被覆したチタン電極、鉛又は鉛合金電極 浴温・・・・・30〜80℃ 電流密度・・・10〜70A/dm2 (直流) 処理時間・・・10〜60秒 Condition bath composition when using a sulfuric acid bath : Sulfuric acid : 30 to 150 g / l, or hydrochloric acid added to this: 5 to 20 g / l Conditions: Counter electrode: stainless steel plate, platinum group metal or titanium electrodes coated with the oxide, lead or lead alloy electrode bath temperature · · · · · 30 to 80 ° C. current density ··· 10~70A / dm 2 (DC) processing time ... 10 ~ 60 seconds

【0030】前記電流密度が70A/dm2 を超えるときに
は、粉落ちしやすい表面が得られる場合があり、10A/
dm2 未満のときには、粗化が十分にできない場合があ
る。また、浴が硫酸及び塩酸の混酸浴のときには、浸漬
するだけで良い場合がある。
When the current density exceeds 70 A / dm 2 , a surface on which powder easily falls may be obtained, and 10 A / dm 2 may be obtained.
When it is less than dm 2 , roughening may not be sufficiently performed. Further, when the bath is a mixed acid bath of sulfuric acid and hydrochloric acid, it may be sufficient to immerse it.

【0031】粗面を有する金属の薄層を光沢銅メッキ層
表面に電着する方法において、電着する金属としては、
例えば、銅、銅−亜鉛合金、銅−ニッケル合金、銅−ス
ズ合金、亜鉛−ニッケル合金等を挙げることができ、こ
れらの金属の薄層を2層以上組み合わせて設けても良
い。実用上、さらに好ましいのは、上記粗化銅薄層の上
に、粗化層を固定する通常銅層を設け、さらに粗化銅−
ニッケル合金の薄層を設けたものである。
In the method of electrodepositing a thin layer of a metal having a rough surface on the surface of a bright copper plating layer, the metal to be electrodeposited is
For example, copper, a copper-zinc alloy, a copper-nickel alloy, a copper-tin alloy, a zinc-nickel alloy, etc. can be mentioned, and two or more thin layers of these metals may be provided in combination. In practical use, it is more preferable that a normal copper layer for fixing the roughened layer is provided on the roughened copper thin layer, and further the roughened copper-
A thin layer of nickel alloy is provided.

【0032】銅、銅−ニッケル合金の薄層を設けるため
のメッキ条件としては、例えば、下記の条件を挙げるこ
とができる。
The plating conditions for forming a thin layer of copper or a copper-nickel alloy include, for example, the following conditions.

【0033】 銅のメッキ条件 浴組成 金属銅・・・・3〜8 g/l 硫酸・・・・・20〜70 g/l ひ素・・・・・50〜300 ppm 条件 対極・・・・・白金族の金属もしくはその酸化物を被覆したチ タン電極、鉛又は鉛合金電極 浴温・・・・・10〜35℃ 電流密度・・・2〜25A/dm2 (直流) 処理時間・・・5〜40秒 Copper plating conditions Bath composition Metallic copper: 3 to 8 g / l Sulfuric acid: 20 to 70 g / l Arsenic: 50 to 300 ppm Conditions Counter electrode: Titanium electrode, lead or lead alloy electrode coated with platinum group metal or its oxide Bath temperature ・ ・ ・ 10-35 ℃ Current density ・ ・ ・ 2-25A / dm 2 (DC) Treatment time ・ ・ ・5-40 seconds

【0034】前記電流密度が2A/dm2 未満のときには、
粗化が十分にできない場合があり、25A/dm2 を超える
ときには、粗化が大きすぎたり、粉落ちしやすくなる場
合がある。
When the current density is less than 2 A / dm 2 ,
In some cases, roughening may not be sufficient, and when it exceeds 25 A / dm 2 , roughening may be too large or powder may easily fall off.

【0035】このような条件で電着した銅の粗化薄層上
に、さらに銅の薄層をメッキする条件及び銅−ニッケル
合金のメッキ条件としては、例えば、下記の条件を挙げ
ることができる。
As the conditions for further plating a thin copper layer and the copper-nickel alloy plating conditions on the roughened thin layer of copper electrodeposited under such conditions, the following conditions can be mentioned, for example. .

【0036】 第二層目の銅メッキ条件 浴組成 金属銅・・・・40〜80 g/l 硫酸・・・・・20〜150 g/l 条件 対極・・・・・白金族の金属もしくはその酸化物を被覆したチ タン電極、鉛又は鉛合金電極 浴温・・・・・30〜70℃ 電流密度・・・1〜25A/dm2 (直流) 処理時間・・・5〜40秒 Copper plating conditions for the second layer Bath composition Metallic copper: 40-80 g / l Sulfuric acid: 20-150 g / l Conditions Counter electrode: Platinum group metal or its Titanium electrode coated with oxide, lead or lead alloy electrode Bath temperature ・ ・ ・ 30-70 ℃ Current density ・ ・ ・ 1-25A / dm 2 (DC) Treatment time ・ ・ ・ 5-40 seconds

【0037】第二層目の銅の薄層は、第一層目の銅の粗
化薄層の粉落ちを防止する。
The second thin copper layer prevents the first roughened copper thin layer from falling off.

【0038】 銅−ニッケル合金のメッキ条件 浴組成 硫酸ニッケル・・・・10〜30 g/l 硫酸銅・・・・・・・0.2〜6 g/l 硫酸アンモニウム・・20〜80 g/l ホウ酸・・・・・・・3〜20 g/l 硫酸でpH1.5〜3.5に調整 条件 対極・・・・・白金族の金属もしくはその酸化物を被覆したチ タン電極、鉛又は鉛合金電極 浴温・・・・・15〜35℃ 電流密度・・・1〜25A/dm2 (直流) 処理時間・・・5〜40秒 Copper-Nickel Alloy Plating Conditions Bath Composition Nickel Sulfate ... 10-30 g / l Copper Sulfate ... 0.2-6 g / l Ammonium Sulfate ... 20-80 g / l Boric acid: Adjust the pH to 1.5 to 3.5 with 3 to 20 g / l sulfuric acid Conditions Counter electrode: A titanium electrode coated with a platinum group metal or its oxide, lead or Lead alloy electrode Bath temperature ・ ・ ・ 15-35 ℃ Current density ・ ・ ・ 1-25A / dm 2 (DC) Treatment time ・ ・ ・ 5-40 seconds

【0039】また、銅−ニッケル合金メッキの条件の電
流密度が、1A/dm2 未満のときには、粗化が十分にでき
ない場合があり、25A/dm2 を超えるときには、粗化が
大きすぎる場合がある。
When the current density under the copper-nickel alloy plating condition is less than 1 A / dm 2 , roughening may not be sufficient, and when it exceeds 25 A / dm 2 , roughening may be too large. is there.

【0040】このように、前述の第一層目の銅メッキだ
けでも粗さの小さい粗化処理はできるが、さらに第二層
目の通常の銅メッキを施して、その上に上記の銅−ニッ
ケル合金メッキを施せば、前述の第一層目の銅のメッキ
条件で、光沢銅メッキ層表面に電着させた粗化粒子を一
層固定し、、さらに微小な粗化粒子を電着させることが
でき、絶縁基板や他の層との接合強度を、より高めるこ
とができるので好ましい。
As described above, the roughening treatment with a small roughness can be performed only by the above-mentioned first layer copper plating, but the second layer ordinary copper plating is further applied, and the above-mentioned copper If nickel alloy plating is applied, the roughening particles that have been electrodeposited on the surface of the bright copper plating layer can be further fixed under the copper plating conditions for the first layer described above, and then finer roughening particles can be electrodeposited. This is preferable because the bonding strength with the insulating substrate and other layers can be further increased.

【0041】また、本発明のプリント配線板用電解銅箔
として、さらに好ましいのは、このように粗化処理した
光沢銅メッキ層の表面のうち、少なくとも絶縁基板と接
合する側に、亜鉛層、亜鉛合金層、ニッケル層及びニッ
ケル合金層からなる群より選ばれた一種以上の薄層を有
し、かつ該薄層表面がクロメ−ト処理されたものであ
る。
Further, as the electrolytic copper foil for a printed wiring board of the present invention, more preferable is a zinc layer on at least the side of the surface of the roughened copper plating layer thus roughened, which is to be joined to the insulating substrate, It has one or more thin layers selected from the group consisting of a zinc alloy layer, a nickel layer and a nickel alloy layer, and the surface of the thin layer is chromated.

【0042】前記薄層を形成する方法及び該薄層表面を
クロメ−ト処理する方法としては、例えば、特開昭60
−86894号公報に記載された方法を採用することが
できる。
The method for forming the thin layer and the method for chromating the surface of the thin layer are described in, for example, JP-A-60.
The method described in JP-A-86894 can be adopted.

【0043】亜鉛合金としては、例えば、Zn−W、Z
n−V、Zn−Tl、Zn−Sn、Zn−Se、Zn−
Sb、Zn−Pt、Zn−Pb、Zn−Ni、Zn−M
o、Zn−Mn、Zn−In、Zn−Fe、Zn−G
e、Zn−Ga、Zn−Cu、Zn−Cr、Zn−C
o、Zn−Cd、Zn−Au、Zn−Ag等を挙げるこ
とができる。中でも好ましいのは、Zn−Cuである。
As the zinc alloy, for example, Zn-W, Z
n-V, Zn-Tl, Zn-Sn, Zn-Se, Zn-
Sb, Zn-Pt, Zn-Pb, Zn-Ni, Zn-M
o, Zn-Mn, Zn-In, Zn-Fe, Zn-G
e, Zn-Ga, Zn-Cu, Zn-Cr, Zn-C
o, Zn-Cd, Zn-Au, Zn-Ag, etc. can be mentioned. Among them, Zn-Cu is preferable.

【0044】ニッケル合金としては、例えば、Ni−
P、Ni−W、Ni−Co、Ni−Mo、Ni−Pd、
Ni−Sn、Ni−Zn、Ni−Cu、Ni−Mn、N
i−Fe、Ni−Mn−Zn等を挙げることができる。
中でも好ましいのは、Ni−Pである。薄層の厚さは、
0.0005〜0.002μm が好ましい。
As the nickel alloy, for example, Ni-
P, Ni-W, Ni-Co, Ni-Mo, Ni-Pd,
Ni-Sn, Ni-Zn, Ni-Cu, Ni-Mn, N
Examples thereof include i-Fe and Ni-Mn-Zn.
Among them, Ni-P is preferable. The thickness of the thin layer is
It is preferably 0.0005 to 0.002 μm.

【0045】本発明にいうクロメ−ト処理とは、前記薄
層表面にクロム酸化物及びその水和物、又は亜鉛もしく
はその酸化物とクロム酸化物との混合物及びその水和物
を付着させる処理をいう。
The chromate treatment in the present invention is a treatment for adhering chromium oxide and its hydrate, or a mixture of zinc or its oxide and chromium oxide and its hydrate to the surface of the thin layer. Say.

【0046】前記クロム酸化物及びその水和物、又は亜
鉛もしくはその酸化物とクロム酸化物との混合物及びそ
の水和物の付着量は、クロム量換算で、0.01〜0.
2mg/dm2が好ましい。
The amount of the chromium oxide and its hydrate, or the mixture of zinc or its oxide and chromium oxide, and its hydrate, deposited in an amount of 0.01 to 0.
2 mg / dm 2 is preferred.

【0047】前記薄層を形成する方法及び該薄層表面を
クロメ−ト処理する方法としては、例えば、特開昭60
−86894号公報に記載された方法を採用することが
できる。
The method for forming the thin layer and the method for chromating the surface of the thin layer are described in, for example, JP-A-60.
The method described in JP-A-86894 can be adopted.

【0048】本発明のプリント配線板用電解銅箔として
は、図1に示すように、電解銅箔1の両面に、表面を粗
化処理した光沢銅メッキ層2を有し、さらに絶縁基板と
接合する粗化処理面に薄層3を備え、該薄層3のクロメ
−ト処理面4にシランカップリング剤5を塗布したもの
が、防錆力、耐熱性、耐塩酸性等の諸性能を向上させる
ことができるので、特に好ましい。
As an electrolytic copper foil for a printed wiring board of the present invention, as shown in FIG. 1, both surfaces of an electrolytic copper foil 1 are provided with a bright copper plating layer 2 having a roughened surface, and an insulating substrate is further provided. The roughened surface to be joined is provided with a thin layer 3, and the chrome coupling surface 5 of the thin layer 3 is coated with a silane coupling agent 5 to obtain various properties such as rust resistance, heat resistance and hydrochloric acid resistance. It is particularly preferable because it can be improved.

【0049】本発明に用いるシランカップリング剤とし
ては、例えば、次式(I): YRSiX3 (I) (式中、Xは、それぞれ独立して加水分解性の基を表
し、Rは、アルキル基を表し、Yは、有機マトリクスポ
リマ−と結合可能な有機官能基を表す)で示されるもの
を挙げることができる。
Examples of the silane coupling agent used in the present invention include the following formula (I): YRSiX 3 (I) (wherein, X is independently a hydrolyzable group, and R is an alkyl group. Group, and Y represents an organic functional group capable of binding to the organic matrix polymer).

【0050】これらの中でも好ましいのは、Xが塩素原
子、アルコキシ基、アルコキシアルコキシ基であり、Y
がビニル基、エポキシ基、グリシドキシ基、メタクリロ
キシ基、アミノ基、N−(2−アミノエチル)アミノ基
であり、又はYRがビニル基であるシランカップリング
剤である。
Of these, X is preferably a chlorine atom, an alkoxy group or an alkoxyalkoxy group, and Y is preferable.
Is a vinyl group, an epoxy group, a glycidoxy group, a methacryloxy group, an amino group, an N- (2-aminoethyl) amino group, or a silane coupling agent in which YR is a vinyl group.

【0051】その具体例としては、ビニルトリス(2−
メトキシエトキシ)シラン、3−グリシドキシプロピル
トリメトキシシラン、N−(2−アミノエチル)−3−
アミノプロピルトリメトキシシラン、3−アミノプロピ
ルトリエトキシシラン等を挙げることができる。
Specific examples thereof include vinyl tris (2-
Methoxyethoxy) silane, 3-glycidoxypropyltrimethoxysilane, N- (2-aminoethyl) -3-
Aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, etc. can be mentioned.

【0052】シランカップリング剤は、0.001〜5
%水溶液を用いるのが好ましい。この水溶液のシランカ
ップリング剤の濃度が、0.001%未満のときには、
前述のシランカップリング剤の効果が期待できず、5%
を超えるときには、シランカップリング剤が溶解しにく
く、また相応する効果の向上が期待できない。
The silane coupling agent is 0.001 to 5
% Aqueous solution is preferably used. When the concentration of the silane coupling agent in this aqueous solution is less than 0.001%,
The effect of the above-mentioned silane coupling agent cannot be expected, and 5%
When it exceeds, it is difficult to dissolve the silane coupling agent, and it is not possible to expect a corresponding improvement in the effect.

【0053】本発明に用いるシランカップリング剤は、
前記水溶液、空気中の水分又はクロム水和酸化物層表面
に吸着した水分等によって加水分解し、下記反応式に示
すようにシラノ−ル基を有する化合物(YRSi(O
H)3 )を生成する。 YRSiX3 +3H2 O → YRSi(OH)3 +3HX (式中、X、Y及びRは、前記と同じ)
The silane coupling agent used in the present invention is
A compound (YRSi (O) having a silanol group as shown in the following reaction formula is hydrolyzed by the aqueous solution, water in the air or water adsorbed on the surface of the hydrated chromium oxide layer.
H) 3 ) is generated. YRSiX 3 + 3H 2 O → YRSi (OH) 3 + 3HX (wherein X, Y and R are the same as above)

【0054】このシラノ−ル基を有する化合物中、−S
i(OH)3 で示されるシラノ−ル基は、光沢銅メッキ
層の粗化処理面、あるいはクロム水和酸化物又はクロム
水和酸化物分散亜鉛層の表面と結合するとともに、−Y
で示される有機マトリクスポリマ−と結合可能な有機官
能基は、本発明のプリント配線板用電解銅箔を樹脂基板
と接合するときに、基板の樹脂と結合する。
In this compound having a silanol group, --S
The silanol group represented by i (OH) 3 is bonded to the roughened surface of the bright copper plating layer or the surface of the chromium hydrate oxide or the chromium hydrate oxide-dispersed zinc layer, and at the same time, --Y
The organic functional group capable of binding to the organic matrix polymer shown in (3) binds to the resin of the substrate when the electrolytic copper foil for printed wiring board of the present invention is joined to the resin substrate.

【0055】[0055]

【実施例】以下に、実施例を示し、本発明をさらに具体
的に説明する。 実施例1 粗面側の表面粗さが3.9μm で厚さが18μm の電解
銅箔の両面に、下記組成のメッキ浴を用い、下記条件で
厚さが片面8.5μm の光沢銅メッキを行った。得られ
た光沢銅メッキの表面粗さ(Rz値)は、0.6μm で
あった。次に、これを水洗乾燥し、厚さが35μm のプ
リント配線板用電解銅箔を作製した。
EXAMPLES The present invention will be described more specifically below with reference to examples. Example 1 On both surfaces of an electrolytic copper foil having a surface roughness of 3.9 μm and a thickness of 18 μm on the rough surface side, a plating bath having the following composition was used and bright copper plating having a thickness of 8.5 μm on one surface was performed under the following conditions. went. The surface roughness (Rz value) of the obtained bright copper plating was 0.6 μm. Next, this was washed with water and dried to prepare an electrolytic copper foil for a printed wiring board having a thickness of 35 μm.

【0056】光沢銅メッキの条件メッキ浴組成 金属銅・・・・・・・・・・・55 g/l 硫酸・・・・・・・・・・・・55 g/l 塩素(塩化ナトリウム)・・・90 ppm 装飾用光沢銅メッキ添加剤・・日本シェ−リング(株)製カパラシド210 メ−キャップ剤・・・・・・5 m/l 光沢剤A・・・・・・・・・0.5 m/lConditions for bright copper plating Plating bath composition Metallic copper 55 g / l Sulfuric acid 55 g / l Chlorine (sodium chloride)・ ・ ・ 90 ppm Bright copper plating additive for decoration ・ ・ Nippon Shering Co., Ltd. Caparaside 210 Mecap agent ・ ・ ・ ・ 5 m / l Brightener A ・ ・ ・ ・0.5 m / l

【0057】メッキ条件 対極・・・・・・・含リン銅板 液温・・・・・・・27℃ 電流密度・・・・・6 A/dm2 Plating conditions Counter electrode: Liquid temperature of phosphorus-containing copper plate: 27 ° C Current density: 6 A / dm 2

【0058】得られたプリント配線板用電解銅箔につい
て、下記に示す引き剥し強さを測定し、反り返りの程度
を下記の基準で評価した。結果を表1に示す。
With respect to the obtained electrolytic copper foil for printed wiring board, the peeling strength shown below was measured, and the degree of warpage was evaluated according to the following criteria. The results are shown in Table 1.

【0059】引き剥し強さ プリント配線板用電解銅箔とFR−4樹脂基板を、プレ
ス接合した後、樹脂基板から該箔を剥離するときの負荷
を測定した。
Peeling strength After the electrolytic copper foil for printed wiring board and the FR-4 resin substrate were press-bonded, the load when peeling the foil from the resin substrate was measured.

【0060】反り返りの評価基準 〇・・・・・・箔の反り返りが全くなかった。 △・・・・・・10cm四方の箔を水平な板の上に置く
と、端部が5〜20mm持上がった。 ×・・・・・・箔が反り返り、放置すると丸まった。
Evaluation Criteria for Curling ◯: There was no curling of the foil. △ ・ ・ ・ ・ When a 10 cm square foil was placed on a horizontal plate, the edge was lifted by 5 to 20 mm. × ・ ・ ・ ・ The foil curled and curled up when left unattended.

【0061】実施例2 実施例1と同様にして得られたプリント配線板用電解銅
箔を、塩酸60 g/l含有する水溶液を浴として用い、下
記条件でエッチング粗化処理した。
Example 2 The electrolytic copper foil for a printed wiring board obtained in the same manner as in Example 1 was subjected to etching roughening treatment under the following conditions using an aqueous solution containing 60 g / l of hydrochloric acid as a bath.

【0062】エッチング粗化処理条件 対極・・・・・・・含リン銅板 液温・・・・・・・60℃ 電流・・・・・・・交流(50Hz) 電流密度・・・・・6 A/dm2 処理時間・・・・・120秒 Etching roughening treatment conditions Counter electrode --- Phosphorus-containing copper plate liquid temperature --- 60 ° C. current --- AC (50 Hz) current density --- 6 A / dm 2 processing time: 120 seconds

【0063】この粗化処理した光沢銅メッキ面の表面粗
さ(Rz値)を測定したところ、0.6μm と変わらな
かったが、電子顕微鏡で観察したところ、光沢銅メッキ
の凹凸面上に、さらに微細な凹凸が形成されていた。こ
のことは、Rz値が、直径2μm の触針を用いて測定し
ているので、粗化処理して形成した微細な凹凸をそのま
ま正確に反映しえないためである。図5に粗化処理前の
光沢銅メッキ面の電子顕微鏡写真を示し、図6に粗化処
理後の光沢銅メッキ面の電子顕微鏡写真を示す(倍率:
800倍)。
When the surface roughness (Rz value) of the roughened bright copper-plated surface was measured, it was 0.6 μm, but it was observed by an electron microscope. Further, fine irregularities were formed. This is because the Rz value is measured using a stylus having a diameter of 2 μm, and therefore the fine unevenness formed by the roughening treatment cannot be accurately reflected as it is. FIG. 5 shows an electron micrograph of the bright copper-plated surface before the roughening treatment, and FIG. 6 shows an electron micrograph of the bright copper-plated surface after the roughening treatment (magnification:
800 times).

【0064】このようにして得られたプリント配線板用
電解銅箔を、実施例1と同様にして、引き剥し強さ及び
反り返りの程度を評価し、さらに粉落ちの有無を観察し
た。結果を表1に示す。
The electrolytic copper foil for a printed wiring board thus obtained was evaluated for peeling strength and degree of warp in the same manner as in Example 1, and further observed for powder falling. The results are shown in Table 1.

【0065】実施例3 実施例2と同様にして得られたプリント配線板用電解銅
箔の樹脂基板と接合する面に、硫酸亜鉛七水塩11 g/l
及び水酸化ナトリウム40 g/lを含有する水溶液を浴と
して用い、下記条件で亜鉛メッキした後、直ちに水洗し
た。
Example 3 11 g / l of zinc sulfate heptahydrate was formed on the surface of the electrolytic copper foil for printed wiring board obtained in the same manner as in Example 2 to be joined to the resin substrate.
An aqueous solution containing 40 g / l of sodium hydroxide was used as a bath, and galvanization was performed under the following conditions, followed by immediate washing with water.

【0066】亜鉛メッキ条件 対極・・・・・・・ステンレス板 液温・・・・・・・室温 電流密度・・・・・0.43 A/dm2 処理時間・・・・・1.6秒 Zinc plating conditions Counter electrode: Stainless plate liquid temperature: Room temperature current density: 0.43 A / dm 2 Treatment time: 1.6 Second

【0067】次に、この銅箔の亜鉛メッキ面を、三酸化
クロム4.75 g/lを含有する水溶液(pH11.3;
水酸化ナトリウムで調整)を浴として用い、下記条件で
クロメ−ト処理した後、水洗乾燥した。得られた銅箔に
ついて、実施例2と同様にして、引き剥し強さ及び反り
返りの程度を評価し、粉落ちの有無を観察した。結果を
表1に示す。
Next, the zinc-plated surface of this copper foil was treated with an aqueous solution containing 4.75 g / l of chromium trioxide (pH 11.3;
Using sodium hydroxide) as a bath, chromate treatment was performed under the following conditions, followed by washing with water and drying. With respect to the obtained copper foil, the peel strength and the degree of warpage were evaluated in the same manner as in Example 2, and the presence or absence of powder drop was observed. The results are shown in Table 1.

【0068】実施例4 実施例3と同様にして得られたプリント配線板用電解銅
箔の基板と接合する面に、エポキシ系シランカップリン
グ剤(3−グリシドキシプロピルトリメトキシシラン)
の1%水溶液を塗布し、柔らかいゴム片でしごいた後、
加熱乾燥させた。得られた銅箔について、実施例2と同
様にして、引き剥し強さ及び反り返りの程度を評価し、
粉落ちの有無を観察した。結果を表1に示す。
Example 4 An epoxy-based silane coupling agent (3-glycidoxypropyltrimethoxysilane) was formed on the surface of the electrolytic copper foil for printed wiring board obtained in the same manner as in Example 3 to be bonded to the substrate.
After applying 1% aqueous solution of and squeezing with a soft rubber piece,
Heat dried. With respect to the obtained copper foil, the peel strength and the degree of warpage were evaluated in the same manner as in Example 2,
The presence or absence of powder drop was observed. The results are shown in Table 1.

【0069】実施例5 実施例4において、エッチング粗化処理に用いた塩酸6
0 g/l含有する水溶液に代えて、硫酸120 g/l含有す
る水溶液を用い、下記条件で光沢銅メッキ層をエッチン
グ粗化処理した。
Example 5 Hydrochloric acid 6 used in the etching roughening treatment in Example 4
An aqueous solution containing 120 g / l of sulfuric acid was used in place of the aqueous solution containing 0 g / l, and the bright copper plating layer was subjected to etching roughening treatment under the following conditions.

【0070】エッチング粗化処理条件 対極・・・・・・・鉛板 液温・・・・・・・60℃ 電流・・・・・・・直流 電流密度・・・・・30 A/dm2 処理時間・・・・・20秒 Etching roughening treatment conditions Counter electrode: Lead plate liquid temperature: 60 ° C Current: DC current density: 30 A / dm 2 Processing time: 20 seconds

【0071】この粗化処理した光沢銅メッキ面の表面粗
さ(Rz値)を測定したところ、0.8μm とほぼ変わ
らなかったが、電子顕微鏡で観察したところ、光沢銅メ
ッキの凹凸面上に、さらに微細な凹凸が形成されてい
た。
When the surface roughness (Rz value) of the roughened bright copper-plated surface was measured, it was almost the same as 0.8 μm, but when observed by an electron microscope, it was found that the rough copper-plated uneven surface was Further, finer unevenness was formed.

【0072】このように光沢銅メッキ層を粗化処理した
ほかは、実施例4と同様にして、銅箔を作製し、引き剥
し強さ及び反り返りの程度を評価し、さらに、粉落ちの
有無を観察した。結果を表1に示す。
A copper foil was prepared in the same manner as in Example 4 except that the bright copper plating layer was roughened as described above, and the peel strength and the degree of warpage were evaluated. Was observed. The results are shown in Table 1.

【0073】実施例6 実施例4で行ったエッチング粗化処理に代えて、下記
〜の条件で、3層のメッキ層を設けて、光沢銅メッキ
層を粗化処理した。
Example 6 Instead of the etching roughening treatment performed in Example 4, three plating layers were provided under the following conditions to roughen the bright copper plating layer.

【0074】 [0074]

【0075】 [0075]

【0076】 [0076]

【0077】この粗化処理した光沢銅メッキ面の表面粗
さ(Rz値)を測定したところ、0.6μm と変わらな
かったが、電子顕微鏡で観察したところ、光沢銅メッキ
の凹凸面上に、さらに微細な凹凸が形成されていた。
When the surface roughness (Rz value) of the roughened bright copper-plated surface was measured, it did not change to 0.6 μm, but when observed with an electron microscope, the uneven surface of the bright copper-plated surface was Further, fine irregularities were formed.

【0078】このように光沢銅メッキ層を粗化処理した
ほかは、実施例4と同様にして、銅箔を作製し、引き剥
し強さ及び反り返りの程度を評価し、さらに、粉落ちの
有無を観察した。結果を表1に示す。
A copper foil was prepared in the same manner as in Example 4 except that the bright copper plating layer was roughened as described above, and the peel strength and the degree of warpage were evaluated. Was observed. The results are shown in Table 1.

【0079】比較例1 粗面側の表面粗さが3μm で厚さが35μm の電解銅箔
を、実施例5と同様にして、エッチング粗化処理した。
粗化処理した電解銅箔の表面粗さ(Rz値)を測定した
ところ、3.5μm であった。得られた銅箔の反り返り
の程度を評価した。結果を表2に示す。
Comparative Example 1 An electrolytic copper foil having a surface roughness on the rough surface side of 3 μm and a thickness of 35 μm was subjected to etching roughening treatment in the same manner as in Example 5.
The surface roughness (Rz value) of the roughened electrolytic copper foil was measured and found to be 3.5 μm. The degree of warpage of the obtained copper foil was evaluated. The results are shown in Table 2.

【0080】比較例2 電解銅箔の片面に厚さが17μm の光沢銅メッキを行っ
た。光沢銅メッキの表面粗さ(Rz値)を測定したとこ
ろ、0.6μm であった。このように片面に光沢銅メッ
キしたほかは、実施例1と同様にして、プリント配線板
用電解銅箔を作製した。得られた銅箔の反り返りの程度
を評価した。結果を表2に示す。
Comparative Example 2 One side of an electrolytic copper foil was plated with bright copper having a thickness of 17 μm. The surface roughness (Rz value) of the bright copper plating was measured and found to be 0.6 μm. An electrolytic copper foil for a printed wiring board was produced in the same manner as in Example 1 except that one side was plated with bright copper. The degree of warpage of the obtained copper foil was evaluated. The results are shown in Table 2.

【0081】比較例3 実施例1の光沢銅メッキだけで、厚さ35μm の銅箔を
作製した。光沢銅メッキの表面粗さ(Rz値)を測定し
たところ、0.3μm であった。得られた銅箔の反り返
りの程度を評価した。結果を表2に示す。
Comparative Example 3 A copper foil having a thickness of 35 μm was produced only by the bright copper plating of Example 1. The surface roughness (Rz value) of the bright copper plating was 0.3 μm. The degree of warpage of the obtained copper foil was evaluated. The results are shown in Table 2.

【0082】[0082]

【表1】 [Table 1]

【0083】[0083]

【表2】 [Table 2]

【0084】評価 (1) 表1に示すように、実施例1〜6のプリント配
線板用電解銅箔は、電解銅箔の両面に光沢銅メッキ層を
備えているので、反り返りがなく、また、表面の粗さ
が、小さい。
Evaluation (1) As shown in Table 1, the electrolytic copper foils for printed wiring boards of Examples 1 to 6 have bright copper plating layers on both sides of the electrolytic copper foils, so that they do not warp and , The surface roughness is small.

【0085】(2) 実施例2が示すように、光沢銅メ
ッキ層の表面をエッチング粗化処理したものは、引き剥
し強さが、0.7kg/cm2であり、実施例1のエッチング
粗化処理しないもの(0.3kg/cm2)より、箔と絶縁基
板の接合強度が向上し、実施例3が示すように、エッチ
ング粗化処理した光沢銅メッキ層の表面に、亜鉛薄層を
設け、その表面にクロメ−ト処理したものは、引き剥し
強さが、0.9kg/cm2であり、さらに絶縁基板との接合
強度が向上した。また、亜鉛薄層及びその表面のクロメ
−ト処理は、銅箔の防錆力及び耐熱性を向上させること
ができる。
(2) As shown in Example 2, the surface of the bright copper plating layer was roughened by etching, and the peel strength was 0.7 kg / cm 2. The bonding strength between the foil and the insulating substrate was improved more than that of the untreated material (0.3 kg / cm 2 ), and as shown in Example 3, a thin zinc layer was formed on the surface of the bright copper plating layer subjected to the etching roughening treatment. The film provided with the chromate treatment on its surface had a peeling strength of 0.9 kg / cm 2 , and the bonding strength with the insulating substrate was further improved. Further, the zinc thin layer and the chromate treatment of the surface thereof can improve the rust preventive power and heat resistance of the copper foil.

【0086】また、実施例4が示すように、クロメ−ト
処理面をシランカップリング剤で処理したものは、引き
剥し強さが、1.3kg/cm2になり、さらに絶縁基板との
接合強度が向上した。
Further, as shown in Example 4, the chrome-treated surface was treated with a silane coupling agent, and the peel strength was 1.3 kg / cm 2, and it was further bonded to an insulating substrate. Strength improved.

【0087】(3) 実施例4が示すように、光沢銅メ
ッキ層の表面を、塩酸浴でエッチング粗化処理したもの
は、硫酸浴でエッチング粗化処理したもの(実施例5)
に比べ、エッチング処理面の表面粗さが小さく、しか
も、引き剥し強さが大きい。
(3) As shown in Example 4, the surface of the bright copper plating layer was roughened by etching in a hydrochloric acid bath, and the surface was roughened by etching in a sulfuric acid bath (Example 5).
Compared with, the surface roughness of the etched surface is small and the peel strength is large.

【0088】 実施例4・・・表面粗さ:0.6μm 、引き剥し強さ:
1.3kg/cm2 実施例5・・・表面粗さ:0.8μm 、引き剥し強さ:
1.1kg/cm2 これに対し、
Example 4 Surface roughness: 0.6 μm, Peel strength:
1.3 kg / cm 2 Example 5: Surface roughness: 0.8 μm, Peel strength:
1.1kg / cm 2 In contrast,

【0089】(4) 表2に示すように、比較例1で
は、光沢銅メッキを行わずに、電解銅箔の表面を直接粗
化処理したので、表面粗さが低下せず、Rz値の小さな
銅箔を得ることはできなかった。
(4) As shown in Table 2, in Comparative Example 1, the surface of the electrolytic copper foil was directly roughened without performing bright copper plating, so that the surface roughness did not decrease and the Rz value I couldn't get a small copper foil.

【0090】(5) 比較例2では、光沢銅メッキを電
解銅箔の片面だけに行ったので、銅箔の反り返りが激し
く、使用に耐えなかった。また比較例3では、低電流密
度の光沢銅メッキだけで、厚さが35μm の銅箔を作製
したので、銅箔が反り返った。
(5) In Comparative Example 2, since bright copper plating was applied to only one side of the electrolytic copper foil, the copper foil was greatly warped and could not be used. Further, in Comparative Example 3, since a copper foil having a thickness of 35 μm was produced only by bright current copper plating having a low current density, the copper foil was warped.

【0091】[0091]

【発明の効果】本発明によると、幅広で箔厚分布が均一
な箔を得ることができる電解法で容易に製造することが
でき、電着歪による反り返りがなく、また表面の粗さが
小さいので、ファインパタ−ンの回路を形成させること
ができ、しかも絶縁基板との接合強度を高めることがで
きる。
EFFECTS OF THE INVENTION According to the present invention, a foil having a wide width and a uniform foil thickness distribution can be easily manufactured by an electrolysis method, there is no warpage due to electrodeposition strain, and the surface roughness is small. Therefore, a fine pattern circuit can be formed, and moreover, the bonding strength with the insulating substrate can be increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のプリント配線板用電解銅箔を例示する
断面図である。
FIG. 1 is a cross-sectional view illustrating an electrolytic copper foil for a printed wiring board according to the present invention.

【図2】光沢銅メッキ層の表面を粗化処理した後の微細
な凹凸形状を例示する断面図である。
FIG. 2 is a cross-sectional view illustrating a fine concavo-convex shape after roughening the surface of a bright copper plating layer.

【図3】電解銅箔の表面を粗化処理した従来のプリント
配線板用電解銅箔と絶縁基板を接合した原板を例示する
断面図である。
FIG. 3 is a cross-sectional view illustrating an original plate obtained by joining an electrolytic copper foil for a conventional printed wiring board having a roughened surface of an electrolytic copper foil to an insulating substrate.

【図4】圧延銅箔の表面を粗化処理した従来のプリント
配線板用電解銅箔と絶縁基板を接合した原板を例示する
断面図である。
FIG. 4 is a cross-sectional view illustrating an original plate in which an electrolytic copper foil for a conventional printed wiring board in which a surface of a rolled copper foil is roughened and an insulating substrate are joined together.

【図5】粗化処理前の光沢銅メッキ面の電子顕微鏡写真
である。
FIG. 5 is an electron micrograph of a bright copper-plated surface before roughening treatment.

【図6】粗化処理後の光沢銅メッキ面の電子顕微鏡写真
を示す。
FIG. 6 shows an electron micrograph of a bright copper-plated surface after roughening treatment.

【符号の説明】[Explanation of symbols]

1・・・・・電解銅箔 2・・・・・光沢銅メッキ層 3・・・・・薄層 4・・・・・クロメ−ト処理 5・・・・・シランカップリング剤 6・・・・・光沢銅メッキ層の凹凸 7・・・・・凹凸6上に形成した、さらに微細な凹凸 8・・・・・電解銅箔の表面に形成した凹凸 9・・・・・圧延銅箔の表面に形成した凹凸 10・・・・絶縁基板 11・・・・圧延銅箔 L1・・・・基板の有効厚さ 1 ... Electrolytic copper foil 2 ... Bright copper plating layer 3 ... Thin layer 4 ... Chromate processing 5: Silane coupling agent 6 ... Asperity of bright copper plating layer 7 ... Finer irregularities formed on the irregularities 6 8 ... Asperities formed on the surface of electrolytic copper foil 9 ... Asperities formed on the surface of rolled copper foil 10 ... Insulating substrate 11 ... Rolled copper foil L1 ... ・ Effective thickness of substrate

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 電解銅箔の両面に光沢銅メッキ層を有す
るプリント配線板用電解銅箔。
1. An electrolytic copper foil for a printed wiring board, which has bright copper plating layers on both sides of the electrolytic copper foil.
【請求項2】 電解銅箔の一方の面に有する光沢銅メッ
キ層の厚さが、他方の面に有する光沢銅メッキ層の厚さ
の50〜150%である請求項1記載のプリント配線板
用電解銅箔。
2. The printed wiring board according to claim 1, wherein the thickness of the bright copper plating layer on one surface of the electrolytic copper foil is 50 to 150% of the thickness of the bright copper plating layer on the other surface. Electrolytic copper foil for use.
【請求項3】 光沢銅メッキ層の表面が、粗さ0.2〜
5μm に粗化処理された請求項1記載のプリント配線板
用電解銅箔。
3. The surface of the bright copper plating layer has a roughness of 0.2 to
The electrolytic copper foil for a printed wiring board according to claim 1, which has been roughened to a thickness of 5 μm.
【請求項4】 前記粗化処理面のうち、少なくとも絶縁
基板と接合する側に、亜鉛層、亜鉛合金層、ニッケル層
及びニッケル合金層からなる群より選ばれた一種以上の
薄層を有し、さらに、該薄層表面がクロメ−ト処理され
た請求項3記載のプリント配線板用電解銅箔。
4. One or more thin layers selected from the group consisting of a zinc layer, a zinc alloy layer, a nickel layer and a nickel alloy layer on at least the side of the roughened surface that is to be joined to the insulating substrate. The electrolytic copper foil for a printed wiring board according to claim 3, wherein the surface of the thin layer is chromate-treated.
【請求項5】 プリント配線板用電解銅箔の絶縁基板と
接合するクロメ−ト処理面にシランカップリング剤が塗
布された請求項4記載のプリント配線板用電解銅箔。
5. The electrolytic copper foil for a printed wiring board according to claim 4, wherein a silane coupling agent is applied to a chromate-treated surface of the electrolytic copper foil for a printed wiring board which is joined to the insulating substrate.
JP03202292A 1991-07-18 1991-07-18 Electrolytic copper foil for printed wiring boards Expired - Lifetime JP3081026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03202292A JP3081026B2 (en) 1991-07-18 1991-07-18 Electrolytic copper foil for printed wiring boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03202292A JP3081026B2 (en) 1991-07-18 1991-07-18 Electrolytic copper foil for printed wiring boards

Publications (2)

Publication Number Publication Date
JPH0529740A true JPH0529740A (en) 1993-02-05
JP3081026B2 JP3081026B2 (en) 2000-08-28

Family

ID=16455129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03202292A Expired - Lifetime JP3081026B2 (en) 1991-07-18 1991-07-18 Electrolytic copper foil for printed wiring boards

Country Status (1)

Country Link
JP (1) JP3081026B2 (en)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06270331A (en) * 1993-03-19 1994-09-27 Mitsui Mining & Smelting Co Ltd Copper clad laminated sheet and printed wiring board
US5800930A (en) * 1994-01-21 1998-09-01 Olin Corporation Nodular copper/nickel alloy treatment for copper foil
US5989727A (en) * 1998-03-04 1999-11-23 Circuit Foil U.S.A., Inc. Electrolytic copper foil having a modified shiny side
WO2001010178A1 (en) * 1999-08-02 2001-02-08 Ibiden Co., Ltd. Production method of wiring board and wiring board
WO2001045475A1 (en) * 1999-12-15 2001-06-21 Mitsui Mining & Smelting Co., Ltd. Surface-treated copper foil and method for manufacturing the surface-treated copper foil
JP2002030481A (en) * 2000-07-19 2002-01-31 Nippon Denkai Kk Copper or copper alloy foil and its production method
WO2002058442A1 (en) * 2001-01-22 2002-07-25 Sony Chemicals Corp. Flexible printed wiring board
WO2003015483A1 (en) * 2001-08-06 2003-02-20 Mitsui Mining & Smelting Co., Ltd. Printed wiring board-use copper foil and copper clad laminated sheet using the printed wiring board-use copper foil
JP2003096593A (en) * 2001-09-21 2003-04-03 Sumitomo Bakelite Co Ltd Roughening treatment method and copper electroplating device
JP2003201585A (en) * 2001-10-30 2003-07-18 Nikko Materials Co Ltd Surface treated copper foil
JP2003524078A (en) * 2000-02-24 2003-08-12 サーキット フォイル ルクセンブルグ トレーディング エス.エイ アール.エル. Composite copper foil and method for producing the same
WO2003102277A1 (en) * 2002-06-04 2003-12-11 Mitsui Mining & Smelting Co.,Ltd. Surface treatment copper foil for low dielectric substrate, copper clad laminate including the same and printed wiring board
WO2004005588A1 (en) * 2002-07-04 2004-01-15 Mitsui Mining & Smelting Co.,Ltd. Electrolytic copper foil with carrier foil
JP2004256910A (en) * 2003-02-04 2004-09-16 Furukawa Techno Research Kk Copper foil for high-frequency circuit, manufacturing method therefor, manufacturing facility therefor, and high-frequency circuit using the copper foil
JP2006093625A (en) * 2004-09-27 2006-04-06 Matsushita Electric Works Ltd Insulator with metal material, insulator for additive plating, and substrate with additive plated metal film
JP2007194265A (en) * 2006-01-17 2007-08-02 Dainippon Printing Co Ltd Flexible printed wiring board, and its manufacturing method
WO2009093668A1 (en) * 2008-01-22 2009-07-30 Taisei Plas Co., Ltd. Bonded object of metal/alloy and adherend and process for producing the same
US7985485B2 (en) 2003-02-04 2011-07-26 The Furukawa Electric Co., Ltd. Copper foil for high frequency circuit, method of production and apparatus for production of same, and high frequency circuit using copper foil
WO2011090175A1 (en) 2010-01-22 2011-07-28 古河電気工業株式会社 Roughened copper foil, method for producing same, and copper clad laminate and printed circuit board
JP2012207285A (en) * 2011-03-30 2012-10-25 Furukawa Electric Co Ltd:The Surface-treated copper foil and manufacturing method therefor, copper-clad laminated board using surface-treated copper foil and manufacturing method therefor, and printed wiring board
TWI396779B (en) * 2005-02-21 2013-05-21 Copper foil and its manufacturing method, and flexible printed circuit board
US8815387B2 (en) 2003-07-22 2014-08-26 Mitsu Minning & Smelting Co., Ltd. Copper foil with ultra thin adhesive layer, and a method for manufacturing the copper foil with ultra thin adhesive layer
KR20190049818A (en) 2016-09-12 2019-05-09 후루카와 덴키 고교 가부시키가이샤 Copper foil and copper-clad laminate having the copper foil
CN112566373A (en) * 2020-11-13 2021-03-26 广东工业大学 Coarsening method based on tin template
JPWO2021200874A1 (en) * 2020-03-30 2021-10-07
CN115011987A (en) * 2022-08-02 2022-09-06 中国华能集团清洁能源技术研究院有限公司 Water electrolysis hydrogen production anti-corrosion bipolar plate and preparation method and equipment thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101298999B1 (en) * 2009-09-01 2013-08-23 일진머티리얼즈 주식회사 Embedded Copper foil for fine pattern

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06270331A (en) * 1993-03-19 1994-09-27 Mitsui Mining & Smelting Co Ltd Copper clad laminated sheet and printed wiring board
US5800930A (en) * 1994-01-21 1998-09-01 Olin Corporation Nodular copper/nickel alloy treatment for copper foil
US5989727A (en) * 1998-03-04 1999-11-23 Circuit Foil U.S.A., Inc. Electrolytic copper foil having a modified shiny side
WO2001010178A1 (en) * 1999-08-02 2001-02-08 Ibiden Co., Ltd. Production method of wiring board and wiring board
WO2001045475A1 (en) * 1999-12-15 2001-06-21 Mitsui Mining & Smelting Co., Ltd. Surface-treated copper foil and method for manufacturing the surface-treated copper foil
CN100376125C (en) * 1999-12-15 2008-03-19 三井金属鉱业株式会社 Surface-treated copper foil and its preparing method
US6605369B1 (en) * 1999-12-15 2003-08-12 Mitsui Mining & Smelting Co., Ltd. Surface-treated copper foil and method for producing the same
JP2003524078A (en) * 2000-02-24 2003-08-12 サーキット フォイル ルクセンブルグ トレーディング エス.エイ アール.エル. Composite copper foil and method for producing the same
JP2002030481A (en) * 2000-07-19 2002-01-31 Nippon Denkai Kk Copper or copper alloy foil and its production method
JP4524026B2 (en) * 2000-07-19 2010-08-11 日本電解株式会社 Copper or copper alloy foil and method for producing the same
US6835442B2 (en) 2001-01-22 2004-12-28 Sony Chemicals Corp. Flexible printed wiring board
WO2002058442A1 (en) * 2001-01-22 2002-07-25 Sony Chemicals Corp. Flexible printed wiring board
KR100937291B1 (en) * 2001-08-06 2010-01-18 미쓰이 긴조꾸 고교 가부시키가이샤 Method of manufacturing printed wiring board
WO2003015483A1 (en) * 2001-08-06 2003-02-20 Mitsui Mining & Smelting Co., Ltd. Printed wiring board-use copper foil and copper clad laminated sheet using the printed wiring board-use copper foil
US6989199B2 (en) * 2001-08-06 2006-01-24 Mitsui Mining & Smelting Co., Ltd. Copper foil for printed-wiring board and copper-clad laminate using copper foil for printed-wiring board
JP2003096593A (en) * 2001-09-21 2003-04-03 Sumitomo Bakelite Co Ltd Roughening treatment method and copper electroplating device
EP1441046A4 (en) * 2001-10-30 2004-12-22 Nikko Materials Co Ltd Surface-treated copper foil
JP2003201585A (en) * 2001-10-30 2003-07-18 Nikko Materials Co Ltd Surface treated copper foil
US7651783B2 (en) 2001-10-30 2010-01-26 Nikko Materials Co., Ltd. Surface treated copper film
EP1441046A1 (en) * 2001-10-30 2004-07-28 Nikko Materials Company, Limited SURFACE−TREATED COPPER FOIL
WO2003102277A1 (en) * 2002-06-04 2003-12-11 Mitsui Mining & Smelting Co.,Ltd. Surface treatment copper foil for low dielectric substrate, copper clad laminate including the same and printed wiring board
US6969557B2 (en) 2002-06-04 2005-11-29 Mitsui Mining & Smelting Co., Ltd. Surface-treated copper foil low-dielectric substrate and copper-clad laminate and printed wiring board using the same
CN1316066C (en) * 2002-06-04 2007-05-16 三井金属矿业株式会社 Surface treatment copper foil for low dielectric substrate, copper clad laminate including the same and printed wiring board
WO2004005588A1 (en) * 2002-07-04 2004-01-15 Mitsui Mining & Smelting Co.,Ltd. Electrolytic copper foil with carrier foil
US7691487B2 (en) 2002-07-04 2010-04-06 Mitsui Mining & Smelting Co., Ltd. Electrodeposited copper foil with carrier foil
JP2004256910A (en) * 2003-02-04 2004-09-16 Furukawa Techno Research Kk Copper foil for high-frequency circuit, manufacturing method therefor, manufacturing facility therefor, and high-frequency circuit using the copper foil
US7985485B2 (en) 2003-02-04 2011-07-26 The Furukawa Electric Co., Ltd. Copper foil for high frequency circuit, method of production and apparatus for production of same, and high frequency circuit using copper foil
US8815387B2 (en) 2003-07-22 2014-08-26 Mitsu Minning & Smelting Co., Ltd. Copper foil with ultra thin adhesive layer, and a method for manufacturing the copper foil with ultra thin adhesive layer
JP2006093625A (en) * 2004-09-27 2006-04-06 Matsushita Electric Works Ltd Insulator with metal material, insulator for additive plating, and substrate with additive plated metal film
JP4734875B2 (en) * 2004-09-27 2011-07-27 パナソニック電工株式会社 Insulator for additive plating, substrate with additive plating metal film
TWI396779B (en) * 2005-02-21 2013-05-21 Copper foil and its manufacturing method, and flexible printed circuit board
KR101280486B1 (en) * 2005-02-21 2013-07-01 후루카와 덴키 고교 가부시키가이샤 Copper foil and method for manufacturing the same, and flexible printed circuit board
JP2007194265A (en) * 2006-01-17 2007-08-02 Dainippon Printing Co Ltd Flexible printed wiring board, and its manufacturing method
JP4903881B2 (en) * 2008-01-22 2012-03-28 大成プラス株式会社 Joined body of metal alloy and adherend and method for producing the same
JPWO2009093668A1 (en) * 2008-01-22 2011-05-26 大成プラス株式会社 Joined body of metal alloy and adherend and method for producing the same
WO2009093668A1 (en) * 2008-01-22 2009-07-30 Taisei Plas Co., Ltd. Bonded object of metal/alloy and adherend and process for producing the same
WO2011090175A1 (en) 2010-01-22 2011-07-28 古河電気工業株式会社 Roughened copper foil, method for producing same, and copper clad laminate and printed circuit board
JP2012207285A (en) * 2011-03-30 2012-10-25 Furukawa Electric Co Ltd:The Surface-treated copper foil and manufacturing method therefor, copper-clad laminated board using surface-treated copper foil and manufacturing method therefor, and printed wiring board
KR20190049818A (en) 2016-09-12 2019-05-09 후루카와 덴키 고교 가부시키가이샤 Copper foil and copper-clad laminate having the copper foil
JPWO2021200874A1 (en) * 2020-03-30 2021-10-07
WO2021200874A1 (en) * 2020-03-30 2021-10-07 三菱マテリアル株式会社 Bonded body and insulating circuit board
CN112566373A (en) * 2020-11-13 2021-03-26 广东工业大学 Coarsening method based on tin template
CN112566373B (en) * 2020-11-13 2022-11-04 广东工业大学 Coarsening method based on tin template
CN115011987A (en) * 2022-08-02 2022-09-06 中国华能集团清洁能源技术研究院有限公司 Water electrolysis hydrogen production anti-corrosion bipolar plate and preparation method and equipment thereof

Also Published As

Publication number Publication date
JP3081026B2 (en) 2000-08-28

Similar Documents

Publication Publication Date Title
JP3081026B2 (en) Electrolytic copper foil for printed wiring boards
KR100975491B1 (en) Electrolytic copper foil and process for producing electrolytic copper foil
KR101090199B1 (en) Copper foil for fine printed circuit and method for manufacturing the same
JP4429979B2 (en) Ultra-thin copper foil with carrier and method for producing ultra-thin copper foil with carrier
JP2849059B2 (en) Processing method of copper foil for printed circuit
CN1940145B (en) Nickel plating solution and its preparation method, nickel plating method and printed wiring board copper foil
JP3910623B1 (en) Manufacturing method of electrolytic copper foil, electrolytic copper foil obtained by the manufacturing method, surface-treated electrolytic copper foil obtained using the electrolytic copper foil, copper-clad laminate and printed wiring using the surface-treated electrolytic copper foil Board
JP4626390B2 (en) Copper foil for printed wiring boards in consideration of environmental protection
EP2557204A1 (en) Copper foil for printed circuit
EP1531656A2 (en) Ultra-thin copper foil with carrier and printed wiring board using ultra-thin copper foil with carrier
CN109642338B (en) Copper foil and copper-clad plate with same
TW201945598A (en) Surface-treated copper foil, copper clad laminate, and printed wiring board
WO2007125994A1 (en) Electrolytic copper foil, surface treated copper foil using the electrolytic copper foil, copper-clad laminated plate using the surface treated copper foil, and method for manufacturing the electrolytic copper foil
JP2008101267A (en) Electrolytic copper foil, surface treated copper foil using the electrolytic copper foil, copper-clad laminated plate using the surface treated copper foil, and method for manufacturing the electrolytic copper foil
GB2073779A (en) Nickel coated copper foil for a rinted circuit
WO2013065727A1 (en) Copper foil for printed circuit
JP2006319287A (en) Copper foil for printed circuit board, method for manufacturing the same and trivalent chromium chemical conversion treatment liquid to be used for the same manufacture
JP2010180454A (en) Surface-treated copper foil, method for manufacturing the same and copper-clad laminate
JPH0441696A (en) Surface treatment of copper foil for printed circuit
JP4429539B2 (en) Electrolytic copper foil for fine pattern
JP2007146258A (en) Electrolytic copper foil, printed wiring board and multilayer printed wiring board
JP3949871B2 (en) Roughening copper foil and method for producing the same
JP3429290B2 (en) Manufacturing method of copper foil for fine wiring
JPWO2013065713A1 (en) Copper foil for printed circuit, copper-clad laminate, printed wiring board, and electronic equipment
CA2070046A1 (en) Metal foil with improved bonding to substrates and method for making said foil

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313532

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20090623

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20090623

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20090623

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100623

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100623

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20110623

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120623

Year of fee payment: 12

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120623

Year of fee payment: 12