JPH0529143B2 - - Google Patents
Info
- Publication number
- JPH0529143B2 JPH0529143B2 JP61279453A JP27945386A JPH0529143B2 JP H0529143 B2 JPH0529143 B2 JP H0529143B2 JP 61279453 A JP61279453 A JP 61279453A JP 27945386 A JP27945386 A JP 27945386A JP H0529143 B2 JPH0529143 B2 JP H0529143B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- lifting
- arm
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Specific Conveyance Elements (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61279453A JPS63132444A (ja) | 1986-11-21 | 1986-11-21 | ウエハハンドリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61279453A JPS63132444A (ja) | 1986-11-21 | 1986-11-21 | ウエハハンドリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63132444A JPS63132444A (ja) | 1988-06-04 |
| JPH0529143B2 true JPH0529143B2 (enExample) | 1993-04-28 |
Family
ID=17611276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61279453A Granted JPS63132444A (ja) | 1986-11-21 | 1986-11-21 | ウエハハンドリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132444A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4232959C2 (de) * | 1992-10-01 | 2001-05-10 | Leybold Ag | Vorrichtung zum Ein- und Ausschleusen scheibenförmiger Substrate |
| JP4991977B2 (ja) * | 2005-05-26 | 2012-08-08 | 株式会社イシダ | 搬送装置およびこれを備えた組合せ計量装置、ランク分別装置 |
| US7344352B2 (en) * | 2005-09-02 | 2008-03-18 | Axcelis Technologies, Inc. | Workpiece transfer device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853149U (ja) * | 1981-10-05 | 1983-04-11 | 株式会社 東京精密 | ウエハ搬送装置 |
| JPS61220349A (ja) * | 1985-03-26 | 1986-09-30 | Toshiba Corp | ウエハ試験装置 |
-
1986
- 1986-11-21 JP JP61279453A patent/JPS63132444A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63132444A (ja) | 1988-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |