JPH0528755Y2 - - Google Patents
Info
- Publication number
- JPH0528755Y2 JPH0528755Y2 JP1986097448U JP9744886U JPH0528755Y2 JP H0528755 Y2 JPH0528755 Y2 JP H0528755Y2 JP 1986097448 U JP1986097448 U JP 1986097448U JP 9744886 U JP9744886 U JP 9744886U JP H0528755 Y2 JPH0528755 Y2 JP H0528755Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- quartz glass
- end opening
- glass tube
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 239000012495 reaction gas Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 39
- 239000007789 gas Substances 0.000 description 20
- 229910052736 halogen Inorganic materials 0.000 description 7
- 150000002367 halogens Chemical class 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986097448U JPH0528755Y2 (US06168655-20010102-C00055.png) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986097448U JPH0528755Y2 (US06168655-20010102-C00055.png) | 1986-06-24 | 1986-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS633136U JPS633136U (US06168655-20010102-C00055.png) | 1988-01-11 |
| JPH0528755Y2 true JPH0528755Y2 (US06168655-20010102-C00055.png) | 1993-07-23 |
Family
ID=30964375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986097448U Expired - Lifetime JPH0528755Y2 (US06168655-20010102-C00055.png) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528755Y2 (US06168655-20010102-C00055.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5588323A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Manufacture of semiconductor device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0719136Y2 (ja) * | 1985-03-15 | 1995-05-01 | 東芝機械株式会社 | シリンダ型気相成長装置 |
-
1986
- 1986-06-24 JP JP1986097448U patent/JPH0528755Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5588323A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Manufacture of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS633136U (US06168655-20010102-C00055.png) | 1988-01-11 |
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