JPH0527504Y2 - - Google Patents

Info

Publication number
JPH0527504Y2
JPH0527504Y2 JP1988122273U JP12227388U JPH0527504Y2 JP H0527504 Y2 JPH0527504 Y2 JP H0527504Y2 JP 1988122273 U JP1988122273 U JP 1988122273U JP 12227388 U JP12227388 U JP 12227388U JP H0527504 Y2 JPH0527504 Y2 JP H0527504Y2
Authority
JP
Japan
Prior art keywords
nozzle
vertically movable
movable nozzle
gas hole
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988122273U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242067U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988122273U priority Critical patent/JPH0527504Y2/ja
Publication of JPH0242067U publication Critical patent/JPH0242067U/ja
Application granted granted Critical
Publication of JPH0527504Y2 publication Critical patent/JPH0527504Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988122273U 1988-09-19 1988-09-19 Expired - Lifetime JPH0527504Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988122273U JPH0527504Y2 (enExample) 1988-09-19 1988-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988122273U JPH0527504Y2 (enExample) 1988-09-19 1988-09-19

Publications (2)

Publication Number Publication Date
JPH0242067U JPH0242067U (enExample) 1990-03-23
JPH0527504Y2 true JPH0527504Y2 (enExample) 1993-07-13

Family

ID=31370050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988122273U Expired - Lifetime JPH0527504Y2 (enExample) 1988-09-19 1988-09-19

Country Status (1)

Country Link
JP (1) JPH0527504Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767017A (en) * 1980-10-09 1982-04-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of thin silicon film
JPS59184519A (ja) * 1983-04-05 1984-10-19 Agency Of Ind Science & Technol イオン化クラスタビーム発生方法

Also Published As

Publication number Publication date
JPH0242067U (enExample) 1990-03-23

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