JPH0527494Y2 - - Google Patents

Info

Publication number
JPH0527494Y2
JPH0527494Y2 JP1986046698U JP4669886U JPH0527494Y2 JP H0527494 Y2 JPH0527494 Y2 JP H0527494Y2 JP 1986046698 U JP1986046698 U JP 1986046698U JP 4669886 U JP4669886 U JP 4669886U JP H0527494 Y2 JPH0527494 Y2 JP H0527494Y2
Authority
JP
Japan
Prior art keywords
chamber
frequency power
high frequency
electrode unit
power block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986046698U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62157970U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986046698U priority Critical patent/JPH0527494Y2/ja
Publication of JPS62157970U publication Critical patent/JPS62157970U/ja
Application granted granted Critical
Publication of JPH0527494Y2 publication Critical patent/JPH0527494Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986046698U 1986-03-28 1986-03-28 Expired - Lifetime JPH0527494Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986046698U JPH0527494Y2 (enExample) 1986-03-28 1986-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986046698U JPH0527494Y2 (enExample) 1986-03-28 1986-03-28

Publications (2)

Publication Number Publication Date
JPS62157970U JPS62157970U (enExample) 1987-10-07
JPH0527494Y2 true JPH0527494Y2 (enExample) 1993-07-13

Family

ID=30866601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986046698U Expired - Lifetime JPH0527494Y2 (enExample) 1986-03-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPH0527494Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1050622A (ja) * 1996-08-05 1998-02-20 Komatsu Ltd 表面処理装置用ノズル、表面処理装置およびこれを用いた表面処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
US4426348A (en) * 1982-07-29 1984-01-17 Ex-Cell-O Corporation Polyurethane rim system
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置

Also Published As

Publication number Publication date
JPS62157970U (enExample) 1987-10-07

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