JPH0527177Y2 - - Google Patents

Info

Publication number
JPH0527177Y2
JPH0527177Y2 JP3416188U JP3416188U JPH0527177Y2 JP H0527177 Y2 JPH0527177 Y2 JP H0527177Y2 JP 3416188 U JP3416188 U JP 3416188U JP 3416188 U JP3416188 U JP 3416188U JP H0527177 Y2 JPH0527177 Y2 JP H0527177Y2
Authority
JP
Japan
Prior art keywords
inner tank
processing agent
chamber
tank
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3416188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01138385U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3416188U priority Critical patent/JPH0527177Y2/ja
Publication of JPH01138385U publication Critical patent/JPH01138385U/ja
Application granted granted Critical
Publication of JPH0527177Y2 publication Critical patent/JPH0527177Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP3416188U 1988-03-14 1988-03-14 Expired - Lifetime JPH0527177Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3416188U JPH0527177Y2 (en, 2012) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3416188U JPH0527177Y2 (en, 2012) 1988-03-14 1988-03-14

Publications (2)

Publication Number Publication Date
JPH01138385U JPH01138385U (en, 2012) 1989-09-21
JPH0527177Y2 true JPH0527177Y2 (en, 2012) 1993-07-09

Family

ID=31260880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3416188U Expired - Lifetime JPH0527177Y2 (en, 2012) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH0527177Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH01138385U (en, 2012) 1989-09-21

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