JPH0526867B2 - - Google Patents
Info
- Publication number
- JPH0526867B2 JPH0526867B2 JP22959685A JP22959685A JPH0526867B2 JP H0526867 B2 JPH0526867 B2 JP H0526867B2 JP 22959685 A JP22959685 A JP 22959685A JP 22959685 A JP22959685 A JP 22959685A JP H0526867 B2 JPH0526867 B2 JP H0526867B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hard carbon
- unit
- electrode plates
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 32
- 229910021385 hard carbon Inorganic materials 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000004215 Carbon black (E152) Substances 0.000 claims description 10
- 229930195733 hydrocarbon Natural products 0.000 claims description 10
- 150000002430 hydrocarbons Chemical class 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 7
- 230000007613 environmental effect Effects 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004433 infrared transmission spectrum Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22959685A JPS6289868A (ja) | 1985-10-15 | 1985-10-15 | 硬質炭素被膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22959685A JPS6289868A (ja) | 1985-10-15 | 1985-10-15 | 硬質炭素被膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6289868A JPS6289868A (ja) | 1987-04-24 |
| JPH0526867B2 true JPH0526867B2 (enExample) | 1993-04-19 |
Family
ID=16894656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22959685A Granted JPS6289868A (ja) | 1985-10-15 | 1985-10-15 | 硬質炭素被膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6289868A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4840655B2 (ja) * | 2006-08-08 | 2011-12-21 | 地方独立行政法人山口県産業技術センター | プラズマ処理装置及び基材の表面処理方法 |
| JP5099693B2 (ja) * | 2008-02-06 | 2012-12-19 | 地方独立行政法人山口県産業技術センター | 非晶質炭素膜及びその成膜方法 |
| JP2011225999A (ja) * | 2011-07-21 | 2011-11-10 | Yamaguchi Prefectural Industrial Technology Institute | プラズマ処理装置及び成膜方法 |
| JP5637119B2 (ja) * | 2011-11-14 | 2014-12-10 | トヨタ自動車株式会社 | プラズマｃｖｄ装置 |
| JP6352787B2 (ja) * | 2014-12-03 | 2018-07-04 | 大同メタル工業株式会社 | 摺動部材、ハウジング及び軸受装置 |
| JP6014941B2 (ja) * | 2015-07-31 | 2016-10-26 | 地方独立行政法人山口県産業技術センター | プラズマ処理装置及び成膜方法 |
-
1985
- 1985-10-15 JP JP22959685A patent/JPS6289868A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6289868A (ja) | 1987-04-24 |
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