JPH0526753Y2 - - Google Patents

Info

Publication number
JPH0526753Y2
JPH0526753Y2 JP1985139605U JP13960585U JPH0526753Y2 JP H0526753 Y2 JPH0526753 Y2 JP H0526753Y2 JP 1985139605 U JP1985139605 U JP 1985139605U JP 13960585 U JP13960585 U JP 13960585U JP H0526753 Y2 JPH0526753 Y2 JP H0526753Y2
Authority
JP
Japan
Prior art keywords
wafer
vertically moving
heat treatment
arm
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985139605U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247132U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985139605U priority Critical patent/JPH0526753Y2/ja
Publication of JPS6247132U publication Critical patent/JPS6247132U/ja
Application granted granted Critical
Publication of JPH0526753Y2 publication Critical patent/JPH0526753Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Reciprocating Conveyors (AREA)
JP1985139605U 1985-09-12 1985-09-12 Expired - Lifetime JPH0526753Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985139605U JPH0526753Y2 (enEXAMPLES) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985139605U JPH0526753Y2 (enEXAMPLES) 1985-09-12 1985-09-12

Publications (2)

Publication Number Publication Date
JPS6247132U JPS6247132U (enEXAMPLES) 1987-03-23
JPH0526753Y2 true JPH0526753Y2 (enEXAMPLES) 1993-07-07

Family

ID=31045667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985139605U Expired - Lifetime JPH0526753Y2 (enEXAMPLES) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPH0526753Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置
JPS58223340A (ja) * 1982-06-22 1983-12-24 Dainippon Screen Mfg Co Ltd 半導体ウエハの乾燥装置

Also Published As

Publication number Publication date
JPS6247132U (enEXAMPLES) 1987-03-23

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