JPH0526753Y2 - - Google Patents
Info
- Publication number
- JPH0526753Y2 JPH0526753Y2 JP1985139605U JP13960585U JPH0526753Y2 JP H0526753 Y2 JPH0526753 Y2 JP H0526753Y2 JP 1985139605 U JP1985139605 U JP 1985139605U JP 13960585 U JP13960585 U JP 13960585U JP H0526753 Y2 JPH0526753 Y2 JP H0526753Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vertically moving
- heat treatment
- arm
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 62
- 238000010438 heat treatment Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 13
- 230000032258 transport Effects 0.000 claims 2
- 230000007246 mechanism Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Reciprocating Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985139605U JPH0526753Y2 (US07709020-20100504-C00032.png) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985139605U JPH0526753Y2 (US07709020-20100504-C00032.png) | 1985-09-12 | 1985-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247132U JPS6247132U (US07709020-20100504-C00032.png) | 1987-03-23 |
| JPH0526753Y2 true JPH0526753Y2 (US07709020-20100504-C00032.png) | 1993-07-07 |
Family
ID=31045667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985139605U Expired - Lifetime JPH0526753Y2 (US07709020-20100504-C00032.png) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526753Y2 (US07709020-20100504-C00032.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
| JPS58223340A (ja) * | 1982-06-22 | 1983-12-24 | Dainippon Screen Mfg Co Ltd | 半導体ウエハの乾燥装置 |
-
1985
- 1985-09-12 JP JP1985139605U patent/JPH0526753Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118125A (ja) * | 1982-01-05 | 1983-07-14 | Tatsumo Kk | 基板の搬送装置 |
| JPS58223340A (ja) * | 1982-06-22 | 1983-12-24 | Dainippon Screen Mfg Co Ltd | 半導体ウエハの乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6247132U (US07709020-20100504-C00032.png) | 1987-03-23 |
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