JPH0526722B2 - - Google Patents

Info

Publication number
JPH0526722B2
JPH0526722B2 JP59220966A JP22096684A JPH0526722B2 JP H0526722 B2 JPH0526722 B2 JP H0526722B2 JP 59220966 A JP59220966 A JP 59220966A JP 22096684 A JP22096684 A JP 22096684A JP H0526722 B2 JPH0526722 B2 JP H0526722B2
Authority
JP
Japan
Prior art keywords
graphite
gas
heater container
case
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59220966A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61101408A (ja
Inventor
Makoto Ishii
Takashi Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP59220966A priority Critical patent/JPS61101408A/ja
Publication of JPS61101408A publication Critical patent/JPS61101408A/ja
Publication of JPH0526722B2 publication Critical patent/JPH0526722B2/ja
Granted legal-status Critical Current

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Landscapes

  • Carbon And Carbon Compounds (AREA)
JP59220966A 1984-10-19 1984-10-19 黒鉛材の精製法及び精製装置 Granted JPS61101408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59220966A JPS61101408A (ja) 1984-10-19 1984-10-19 黒鉛材の精製法及び精製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59220966A JPS61101408A (ja) 1984-10-19 1984-10-19 黒鉛材の精製法及び精製装置

Publications (2)

Publication Number Publication Date
JPS61101408A JPS61101408A (ja) 1986-05-20
JPH0526722B2 true JPH0526722B2 (en, 2012) 1993-04-19

Family

ID=16759342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59220966A Granted JPS61101408A (ja) 1984-10-19 1984-10-19 黒鉛材の精製法及び精製装置

Country Status (1)

Country Link
JP (1) JPS61101408A (en, 2012)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753635B2 (ja) * 1986-07-08 1995-06-07 電気化学工業株式会社 ガラス状炭素被覆サセプタ−及びその製造方法
JPH0635325B2 (ja) * 1986-09-22 1994-05-11 東洋炭素株式会社 高純度黒鉛材の製造方法
JPH0645446B2 (ja) * 1988-09-19 1994-06-15 東海カーボン株式会社 高純度黒鉛微粉の製造方法
JPH0556739U (ja) * 1991-12-27 1993-07-27 三菱自動車エンジニアリング株式会社 テレスコピック・チルト式ステアリング構造
CA2163221C (en) * 1993-05-21 2001-10-30 Stratmin Inc. Process and apparatus for the purification of graphite
JP4096557B2 (ja) * 2000-04-25 2008-06-04 信越半導体株式会社 シリコン単結晶ウエーハ及びシリコン単結晶の製造方法並びにシリコン単結晶ウエーハの製造方法
US20020144642A1 (en) * 2000-12-26 2002-10-10 Hariprasad Sreedharamurthy Apparatus and process for the preparation of low-iron single crystal silicon substantially free of agglomerated intrinsic point defects

Also Published As

Publication number Publication date
JPS61101408A (ja) 1986-05-20

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