JPH0526358B2 - - Google Patents

Info

Publication number
JPH0526358B2
JPH0526358B2 JP58237813A JP23781383A JPH0526358B2 JP H0526358 B2 JPH0526358 B2 JP H0526358B2 JP 58237813 A JP58237813 A JP 58237813A JP 23781383 A JP23781383 A JP 23781383A JP H0526358 B2 JPH0526358 B2 JP H0526358B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
resist mask
sio
substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58237813A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60130183A (ja
Inventor
Koji Yamada
Fumie Matsudate
Nobuo Myamoto
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58237813A priority Critical patent/JPS60130183A/ja
Publication of JPS60130183A publication Critical patent/JPS60130183A/ja
Publication of JPH0526358B2 publication Critical patent/JPH0526358B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Weting (AREA)
JP58237813A 1983-12-19 1983-12-19 ジヨセフソン集積回路作製用レジストステンシルマスク Granted JPS60130183A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58237813A JPS60130183A (ja) 1983-12-19 1983-12-19 ジヨセフソン集積回路作製用レジストステンシルマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58237813A JPS60130183A (ja) 1983-12-19 1983-12-19 ジヨセフソン集積回路作製用レジストステンシルマスク

Publications (2)

Publication Number Publication Date
JPS60130183A JPS60130183A (ja) 1985-07-11
JPH0526358B2 true JPH0526358B2 (cs) 1993-04-15

Family

ID=17020784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58237813A Granted JPS60130183A (ja) 1983-12-19 1983-12-19 ジヨセフソン集積回路作製用レジストステンシルマスク

Country Status (1)

Country Link
JP (1) JPS60130183A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2980913B1 (fr) * 2011-09-30 2014-04-18 Commissariat Energie Atomique Procede de structuration d'une couche active organique deposee sur un substrat

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136321A (en) * 1981-02-18 1982-08-23 Hitachi Ltd Manufacture of resist stencil mask for lift-off
JPS57204123A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Forming method for resist stencil mask

Also Published As

Publication number Publication date
JPS60130183A (ja) 1985-07-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term