JPH0521641A - Ceramic circuit board - Google Patents

Ceramic circuit board

Info

Publication number
JPH0521641A
JPH0521641A JP17281491A JP17281491A JPH0521641A JP H0521641 A JPH0521641 A JP H0521641A JP 17281491 A JP17281491 A JP 17281491A JP 17281491 A JP17281491 A JP 17281491A JP H0521641 A JPH0521641 A JP H0521641A
Authority
JP
Japan
Prior art keywords
circuit board
ceramic
connecting portion
terminal connecting
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17281491A
Other languages
Japanese (ja)
Other versions
JP2955399B2 (en
Inventor
Yutaka Komorida
裕 小森田
Nobuyuki Mizunoya
信幸 水野谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17281491A priority Critical patent/JP2955399B2/en
Priority to US07/911,713 priority patent/US5328751A/en
Priority to EP92111918A priority patent/EP0523598B1/en
Priority to DE69217285T priority patent/DE69217285T2/en
Publication of JPH0521641A publication Critical patent/JPH0521641A/en
Application granted granted Critical
Publication of JP2955399B2 publication Critical patent/JP2955399B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide a ceramic circuit board having little breaking in the bent parts, which are terminal connection parts, of copper circuit boards and having a high strength and a high reliability. CONSTITUTION:In a ceramic circuit board of a structure, wherein copper circuit boards 7a to 7e and 2 are jointed integrally with a ceramic substrate 1 and are formed on the substrate 1 and terminal connection parts 3a to 3e formed in such a way as to float from the substrate 1 by bending the end parts of the boards 7a to 7e for connecting a terminal 4 of a module are provided, the radiuses R1 and R2 of curvature of bent parts P3 and P4 of the end parts 3a to 3e are set in a radius of 0.2mm or longer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はセラミックス回路基板に
係り、特にモジュールを取付けるための端子接続部の破
断が少なく高強度で信頼性が高いセラミックス回路基板
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramics circuit board, and more particularly to a ceramics circuit board with high strength and high reliability in which a terminal connecting portion for mounting a module is not broken.

【0002】[0002]

【従来の技術】近年、パワートランジスタモジュール用
基板や高出力スイッチング電源モジュール用基板等の回
路基板として、セラミックス焼結体で形成した基板本体
表面に、高熱伝導性と高導電性とを併有する銅板等の金
属板を一体に接合したセラミックス回路基板が広く使用
されている。
2. Description of the Related Art In recent years, a copper plate having both high thermal conductivity and high conductivity on a surface of a substrate body formed of a ceramic sintered body as a circuit substrate such as a substrate for a power transistor module or a substrate for a high power switching power supply module. Ceramic circuit boards in which metal plates such as the above are integrally bonded are widely used.

【0003】このセラミックス回路基板は、例えば図3
に示すように、アルミナ(Al2 3 )や窒化アルミニウ
ム(AlN)の焼結体等から成る厚さ0.3〜3mm程度
のセラミックス基板1の両面に、所定形状に打ち抜いて
成形した複数の銅回路板2a,2b,2cを接触配置さ
せて加熱し、両者の接合界面にCu−Cu2 Oから成る
共晶液相を生成させ、この液相により、セラミックス基
板1の表面を濡らし、次いで冷却固化してセラミックス
基板1と銅回路板2a〜2cとを直接接合する、いわゆ
るDBC(Direct Bond Copper)法によって製造され
る。
This ceramic circuit board is shown in FIG.
As shown in FIG. 2, a plurality of ceramic substrates 1 each having a thickness of about 0.3 to 3 mm and made of a sintered body of alumina (Al 2 O 3 ) or aluminum nitride (AlN) are punched and formed into a predetermined shape. The copper circuit boards 2a, 2b, 2c are placed in contact with each other and heated to generate a eutectic liquid phase composed of Cu—Cu 2 O at the bonding interface between the two, and the liquid phase wets the surface of the ceramic substrate 1 and then It is manufactured by a so-called DBC (Direct Bond Copper) method in which the ceramic substrate 1 and the copper circuit boards 2a to 2c are directly joined by cooling and solidifying.

【0004】また一部の銅回路板2aの端部には、セラ
ミックス回路基板1に搭載するLSI回路素子やモジュ
ールの端子を接続するための端子接続部3が形成されて
いる。この端子接続部3は、図4に示すように、銅回路
板2aをプレスによって打ち抜く際に同時にその端部を
曲折して断面が略コの字形になるように予め形成され
る。そしてDBC法によってセラミックス基板1表面に
銅回路板2aが一体に接合された後は、端子接続部3の
自由端側は、セラミックス基板1表面から浮き上った状
態に保持される。この端子接続部3の上面には図示しな
いモジュールの端子4が半田5によって接合される。
A terminal connecting portion 3 for connecting terminals of an LSI circuit element or a module mounted on the ceramics circuit board 1 is formed at an end portion of a part of the copper circuit board 2a. As shown in FIG. 4, the terminal connecting portion 3 is formed in advance so that when the copper circuit board 2a is punched out by a press, its ends are bent at the same time so that the cross section has a substantially U-shape. Then, after the copper circuit board 2a is integrally joined to the surface of the ceramic substrate 1 by the DBC method, the free end side of the terminal connecting portion 3 is held in a state of floating from the surface of the ceramic substrate 1. A terminal 4 of a module (not shown) is joined to the upper surface of the terminal connecting portion 3 with solder 5.

【0005】また銅製の端子接続部3に対する半田濡れ
性を向上せしめ端子4と上記接続部3との接合強度を高
めるために、銅回路板2〜2cの表面には、例えば無電
解めっき法によって厚さ2〜6μm程度のNiめっき層
6が形成される。
Further, in order to improve the solder wettability with respect to the copper terminal connecting portion 3 and to increase the bonding strength between the terminal 4 and the connecting portion 3, the surfaces of the copper circuit boards 2 to 2c are electroless plated, for example. The Ni plating layer 6 having a thickness of about 2 to 6 μm is formed.

【0006】そして熱膨脹等によって端子4が、図4に
おいて矢印で示すように、上下方向に変位した場合にお
いても、端子接続部3の基端部を中心とした曲がりによ
って変位が吸収される。そのため熱膨脹による応力がセ
ラミックス基板1に集中することが効果的に防止され
る。
Even when the terminal 4 is displaced in the vertical direction as shown by an arrow in FIG. 4 due to thermal expansion or the like, the displacement is absorbed by the bending around the base end portion of the terminal connecting portion 3. Therefore, the stress due to the thermal expansion is effectively prevented from being concentrated on the ceramic substrate 1.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、従来の
セラミックス回路基板においては、前記の通り、半田濡
れ性を向上させるために銅回路板にNiめっき層を形成
している。そのため、銅回路板が硬化し易く破損を生じ
易い問題点がある。すなわちNiめっき層を形成する前
における銅材は軟質で弾性に富んでいるが、Ni自体が
硬いためNiめっき層を形成した場合には銅回路板が硬
化し、図4において、特に曲折部分P1 ,P2 が脆くな
り、その部分の繰り返し曲げ強度が低下してしまう。
However, in the conventional ceramics circuit board, as described above, the Ni plating layer is formed on the copper circuit board in order to improve the solder wettability. Therefore, there is a problem that the copper circuit board is easily hardened and damaged. That is, the copper material before forming the Ni plating layer is soft and rich in elasticity, but since Ni itself is hard, the copper circuit board is hardened when the Ni plating layer is formed. In FIG. 1 and P 2 become brittle, and the repeated bending strength of that portion is reduced.

【0008】また曲折部分P1 ,P2 の曲率半径R1
2 がいずれも0.1mm程度と小さいために、この曲折
部分P1 ,P2 に曲げ応力が集中し亀裂が発生し易く端
子接続部3が短期間で破断してしまい、耐久性が低下す
る問題点がある。
Further, the radii of curvature R 1 of the bent portions P 1 and P 2 ,
Since R 2 is as small as about 0.1 mm, bending stress is concentrated on the bent portions P 1 and P 2 , cracks are likely to occur, and the terminal connecting portion 3 is ruptured in a short period of time, resulting in reduced durability. There is a problem to do.

【0009】本発明は、上記の問題点を解決するために
なされたものであり、端子接続部の破断が少なく高強度
で信頼性が高いセラミックス回路基板を提供することを
目的とする。
The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a ceramic circuit board which has few breakages of terminal connection portions and has high strength and high reliability.

【0010】[0010]

【課題を解決するための手段と作用】本願発明者らは、
端子と端子接続部との接合強度を損うことなく、端子接
続部の基端部の耐久性を向上させる方策を種々検討し
た。その結果、端子接続部の基端側における曲折部分の
曲率半径の大小が該部の耐久性に大きな影響を及ぼすこ
とを見出し、その知見に基づいて本願発明を完成した。
[Means and Actions for Solving the Problems]
Various measures have been examined for improving the durability of the base end portion of the terminal connecting portion without impairing the bonding strength between the terminal and the terminal connecting portion. As a result, it was found that the curvature radius of the bent portion on the base end side of the terminal connecting portion had a great influence on the durability of the portion, and the present invention was completed based on this finding.

【0011】すなわち本発明に係るセラミックス回路基
板は、セラミックス基板上に銅回路板を一体に接合して
形成され、モジュールの端子を接続するために、上記銅
回路板の端部を曲折することによりセラミックス基板か
ら浮かして形成した端子接続部を備えたセラミックス回
路基板において、上記端子接続部の曲折部分の曲率半径
を0.2mm以上にしたことを特徴とする。
That is, the ceramics circuit board according to the present invention is formed by integrally bonding a copper circuit board on the ceramics board, and bending the ends of the copper circuit board to connect the terminals of the module. A ceramic circuit board having a terminal connecting portion formed by floating from the ceramic substrate is characterized in that the bending radius of the bent portion of the terminal connecting portion is 0.2 mm or more.

【0012】ここで曲折部分の曲率半径は端子接続部の
基端部に対する応力集中の度合いに大きく影響するもの
であり、0.2mm以上に設定される。曲率半径が0.2
mm未満では、端子接続部の曲折部分に、応力が集中し易
く、短期間に亀裂を生じて破断し易い。一方、曲率半径
を0.5mmを超えるように設定しても耐久性の著しい改
善効果は期待できないため、曲率半径は0.2〜0.5
mmの範囲に設定される。特に曲率半径0.3mm以上とし
た場合には、Niめっき層を形成しない段階の銅回路板
と同等の曲げ強度および繰り返し曲げ疲労強度を得るこ
とができる。
The radius of curvature of the bent portion has a great influence on the degree of stress concentration on the base end portion of the terminal connecting portion, and is set to 0.2 mm or more. Radius of curvature 0.2
If it is less than mm, stress is likely to be concentrated on the bent portion of the terminal connecting portion, and cracks are likely to occur in a short period of time to break. On the other hand, even if the radius of curvature is set to exceed 0.5 mm, a significant improvement effect on durability cannot be expected, so the radius of curvature is 0.2 to 0.5.
It is set in the range of mm. In particular, when the radius of curvature is 0.3 mm or more, it is possible to obtain bending strength and repeated bending fatigue strength equivalent to those of the copper circuit board at the stage where the Ni plating layer is not formed.

【0013】また端子接続部の曲折部分の曲率半径は、
プレス打抜き用の雌雄の両型のエッジ部の半径を調整す
ることにより、任意に設定することができる。
The radius of curvature of the bent portion of the terminal connecting portion is
It can be arbitrarily set by adjusting the radii of the edge portions of the male and female dies for press punching.

【0014】このように本発明に係るセラミックス回路
基板によれば、端子接続部の曲折部分の曲率半径を0.
2mm以上に大きく設定しているため、曲折部分への応力
集中が効果的に防止でき、亀裂の発生や破断が少ない高
強度のセラミックス回路基板を提供することができる。
As described above, according to the ceramics circuit board of the present invention, the radius of curvature of the bent portion of the terminal connecting portion is set to 0.
Since the size is set to 2 mm or more, stress concentration on the bent portion can be effectively prevented, and a high-strength ceramic circuit board with few cracks or breaks can be provided.

【0015】[0015]

【実施例】次に本発明の実施例について添付図面を参照
して説明する。図1は本発明に係るセラミックス回路基
板の一実施例を示す部分断面図であり、図4に示す従来
例と同一要素には同一符号を付している。
Embodiments of the present invention will now be described with reference to the accompanying drawings. FIG. 1 is a partial cross-sectional view showing an embodiment of a ceramics circuit board according to the present invention, and the same elements as those in the conventional example shown in FIG.

【0016】実施例1〜5として下記要領で図1に示す
セラミックス回路基板を多数調製した。すなわち、窒化
アルミニウムに酸化イットリウム5重量%、アルミナ5
重量%、二酸化けい素5重量%を含有させた厚さ0.6
35mmのセラミックス基板1を空気中で温度1100〜
1250℃で1〜5時間加熱して表面に酸化層を形成せ
しめた。
As Examples 1 to 5, a large number of ceramic circuit boards shown in FIG. 1 were prepared as follows. That is, 5% by weight of yttrium oxide and 5% of alumina are added to aluminum nitride.
Weight%, silicon dioxide 5 weight% containing thickness 0.6
The temperature of the ceramic substrate 1 of 35 mm is 1100 in the air.
It was heated at 1250 ° C. for 1 to 5 hours to form an oxide layer on the surface.

【0017】一方、厚さ0.3mmのタフピッチ電解銅板
を、打抜きプレス成形機を使用して打抜き、端子接続部
3a〜3eの曲折部分P3 ,P4 の曲率半径R1 ,R2
がそれぞれ0.2mm,0.3mm,0.4mm,0.5mm,
0.6mmとなるように幅3mmの銅回路板7a〜7eを多
数調製した。
On the other hand, a tough-pitch electrolytic copper plate having a thickness of 0.3 mm is punched out by using a punching press forming machine, and the radii of curvature R 1 , R 2 of the bent portions P 3 , P 4 of the terminal connecting portions 3a to 3e.
Are 0.2mm, 0.3mm, 0.4mm, 0.5mm,
A large number of copper circuit boards 7a to 7e having a width of 3 mm were prepared to have a thickness of 0.6 mm.

【0018】次に上記各銅回路板7a〜7eを上記セラ
ミックス基板1の酸化層に接触させ、DBC法によって
接合した。すなわち各端子接続部3a〜3eを形成した
銅回路板7a〜7eをセラミックス基板1と接触させた
状態で窒素ガス雰囲気中でCuとOの共晶ができる温度で
10分間加熱し両者を一体に接合した。
Next, the copper circuit boards 7a to 7e were brought into contact with the oxide layer of the ceramic substrate 1 and joined by the DBC method. That is, the copper circuit boards 7a to 7e on which the terminal connecting portions 3a to 3e are formed are brought into contact with the ceramics substrate 1 and heated in a nitrogen gas atmosphere at a temperature at which a eutectic of Cu and O can be obtained for 10 minutes to integrate them. Joined.

【0019】次に無電解めっき法により、銅回路板7a
〜7e,2の表面に厚さ3μmのNiめっき層6を形成
し、さらにモジュールの端子4を各端子接続部3a〜3
cに半田5を使用して接合して図1に示す実施例1〜5
のセラミックス回路基板を製造した。
Next, the copper circuit board 7a is formed by electroless plating.
To 7e, 2 are formed with a Ni plating layer 6 having a thickness of 3 μm, and the terminals 4 of the module are connected to the respective terminal connecting portions 3a to 3
Examples 1 to 5 shown in FIG.
The ceramic circuit board of

【0020】一方比較例1として、端子接続部の曲折部
分の曲率半径R1 ,R2 を従来と同様に0.1mmに設定
した以外は、実施例1と同様に処理してセラミックス回
路基板を得た。
On the other hand, as Comparative Example 1, a ceramic circuit board was processed in the same manner as in Example 1 except that the radius of curvature R 1 , R 2 of the bent portion of the terminal connecting portion was set to 0.1 mm as in the conventional case. Obtained.

【0021】また比較例2として、Niめっき層を形成
しない点以外は、実施例1と同様に処理してセラミック
ス回路基板を調製した。
Further, as Comparative Example 2, a ceramic circuit board was prepared in the same manner as in Example 1 except that the Ni plating layer was not formed.

【0022】こうして得られた実施例1〜5および比較
例1〜2の各セラミックス回路基板の耐久性を評価する
ために振動試験を行った。すなわち各端子接続部に接合
した端子4を図1に示す矢印方向に、振幅が1mmで毎秒
1回の割合で振動せしめ、曲折部分P3 ,P4 のいずれ
かが破断するまでの曲げ回数を測定し、図2に示す結果
を得た。
A vibration test was conducted to evaluate the durability of the ceramic circuit boards of Examples 1 to 5 and Comparative Examples 1 and 2 thus obtained. That is, the terminal 4 joined to each terminal connecting portion is vibrated in the direction of the arrow shown in FIG. 1 at an amplitude of 1 mm at a rate of once per second, and the number of bendings until either of the bent portions P 3 and P 4 is broken is determined. The measurement was performed and the results shown in FIG. 2 were obtained.

【0023】図2に示す結果から明らかなように、曲折
部分P3 ,P4 の曲率半径Rを0.2mm以上と大きく設
定した実施例1〜5のセラミックス回路基板は、曲率半
径Rを0.1mmとした比較例1の回路基板と比較して、
破断までの曲げ回数が大幅に上昇し高い耐久性を有する
ことが判明した。
As is apparent from the results shown in FIG. 2, the ceramic circuit boards of Examples 1 to 5 in which the radius of curvature R of the bent portions P 3 and P 4 is set to 0.2 mm or more, the radius of curvature R is 0. Compared with the circuit board of Comparative Example 1 having a size of 0.1 mm,
It was found that the number of bends until breakage was significantly increased, and that it had high durability.

【0024】特に曲率半径Rを0.3mm以上に設定する
ことにより、Niめっき層を形成しない比較例2の回路
基板と同等以上の曲げ回数を確保することができた。
In particular, by setting the radius of curvature R to 0.3 mm or more, it was possible to secure the number of bends equal to or more than that of the circuit board of Comparative Example 2 in which the Ni plating layer was not formed.

【0025】すなわちNiめっき層を形成したために、
端子接続部が硬化したにも拘らず、Niめっき層を形成
しない、銅回路板と同等の曲げ強度および耐疲労強度が
得られ、信頼性が高いセラミックス回路基板が得られ
た。
That is, since the Ni plating layer is formed,
Although the terminal connection portion was hardened, the bending strength and fatigue strength equivalent to those of the copper circuit board, in which the Ni plating layer was not formed, were obtained, and a highly reliable ceramic circuit board was obtained.

【0026】[0026]

【発明の効果】以上説明の通り、本発明に係るセラミッ
クス回路基板によれば、端子接続部の曲折部分の曲率半
径を0.2mm以上に大きく設定しているため、曲折部分
への応力集中が効果的に防止でき、亀裂の発生や破断が
少ない高強度のセラミックス回路基板を提供することが
できる。
As described above, according to the ceramics circuit board of the present invention, since the radius of curvature of the bent portion of the terminal connecting portion is set to be 0.2 mm or more, stress concentration on the bent portion can be prevented. It is possible to provide a high-strength ceramic circuit board that can be effectively prevented and has few cracks or breaks.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るセラミックス回路基板の一実施例
を示す部分断面図。
FIG. 1 is a partial cross-sectional view showing an embodiment of a ceramics circuit board according to the present invention.

【図2】端子接続部の曲率半径と破断までの曲げ回数と
の関係を示すグラフ。
FIG. 2 is a graph showing the relationship between the radius of curvature of a terminal connecting portion and the number of bends before breaking.

【図3】従来の一般的なセラミックス回路基板の構造を
示す斜視図。
FIG. 3 is a perspective view showing the structure of a conventional general ceramics circuit board.

【図4】図3におけるIV−IV矢視部分断面図。FIG. 4 is a partial sectional view taken along the line IV-IV in FIG.

【符号の説明】[Explanation of symbols]

1 セラミックス基板 2,2a,2b,2c 銅回路板 3,3a,3b,3c,3d,3e 端子接続部 4 端子 5 半田 6 Niめっき層 7a,7b,7c,7d,7e 銅回路板 P1 ,P2 ,P3 ,P4 曲折部分 R,R1 ,R2 , 曲率半径1 Ceramics Substrate 2,2a, 2b, 2c Copper Circuit Board 3,3a, 3b, 3c, 3d, 3e Terminal Connection Part 4 Terminal 5 Solder 6 Ni Plating Layer 7a, 7b, 7c, 7d, 7e Copper Circuit Board P 1 , P 2 , P 3 , P 4 Bent part R, R 1 , R 2 , radius of curvature

Claims (1)

【特許請求の範囲】 【請求項1】 セラミックス基板上に銅回路板を一体に
接合して形成され、モジュールの端子を接続するため
に、上記銅回路板の端部を曲折することによりセラミッ
クス基板から浮かして形成した端子接続部を備えたセラ
ミックス回路基板において、上記端子接続部の曲折部分
の曲率半径を0.2mm以上にしたことを特徴とするセラ
ミックス回路基板。
Claim: What is claimed is: 1. A ceramic circuit board formed by integrally bonding a copper circuit board on a ceramic board, and bending the ends of the copper circuit board to connect the terminals of the module. A ceramic circuit board having a terminal connecting portion formed by floating from above, wherein the radius of curvature of the bent portion of the terminal connecting portion is 0.2 mm or more.
JP17281491A 1991-07-12 1991-07-12 Ceramic circuit board Expired - Lifetime JP2955399B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP17281491A JP2955399B2 (en) 1991-07-12 1991-07-12 Ceramic circuit board
US07/911,713 US5328751A (en) 1991-07-12 1992-07-10 Ceramic circuit board with a curved lead terminal
EP92111918A EP0523598B1 (en) 1991-07-12 1992-07-13 Ceramics circuit board
DE69217285T DE69217285T2 (en) 1991-07-12 1992-07-13 Ceramic circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17281491A JP2955399B2 (en) 1991-07-12 1991-07-12 Ceramic circuit board

Publications (2)

Publication Number Publication Date
JPH0521641A true JPH0521641A (en) 1993-01-29
JP2955399B2 JP2955399B2 (en) 1999-10-04

Family

ID=15948869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17281491A Expired - Lifetime JP2955399B2 (en) 1991-07-12 1991-07-12 Ceramic circuit board

Country Status (1)

Country Link
JP (1) JP2955399B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794623A (en) * 1993-09-21 1995-04-07 Toshiba Corp Circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794623A (en) * 1993-09-21 1995-04-07 Toshiba Corp Circuit board

Also Published As

Publication number Publication date
JP2955399B2 (en) 1999-10-04

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