JPH0519484B2 - - Google Patents

Info

Publication number
JPH0519484B2
JPH0519484B2 JP61014133A JP1413386A JPH0519484B2 JP H0519484 B2 JPH0519484 B2 JP H0519484B2 JP 61014133 A JP61014133 A JP 61014133A JP 1413386 A JP1413386 A JP 1413386A JP H0519484 B2 JPH0519484 B2 JP H0519484B2
Authority
JP
Japan
Prior art keywords
aluminum
aluminum nitride
plasma
powder
mixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61014133A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62171902A (ja
Inventor
Kazuhiro Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP1413386A priority Critical patent/JPS62171902A/ja
Publication of JPS62171902A publication Critical patent/JPS62171902A/ja
Publication of JPH0519484B2 publication Critical patent/JPH0519484B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C01B21/0724—Preparation by direct nitridation of aluminium using a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP1413386A 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法 Granted JPS62171902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1413386A JPS62171902A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1413386A JPS62171902A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Publications (2)

Publication Number Publication Date
JPS62171902A JPS62171902A (ja) 1987-07-28
JPH0519484B2 true JPH0519484B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=11852634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1413386A Granted JPS62171902A (ja) 1986-01-24 1986-01-24 窒化アルミニウムと炭化アルミニウムよりなる混合微粉末の合成方法

Country Status (1)

Country Link
JP (1) JPS62171902A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6395103A (ja) * 1986-10-03 1988-04-26 Nec Corp 易焼結性窒化アルミニウム粉末及びその製造方法
JPS63195102A (ja) * 1987-02-09 1988-08-12 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160199A (enrdf_load_stackoverflow) * 1974-06-20 1975-12-25
IT1055884B (it) * 1976-02-17 1982-01-11 Montedison Spa Procedimento ad arco plasma di prodotti ceramici metallici e simili

Also Published As

Publication number Publication date
JPS62171902A (ja) 1987-07-28

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