JPH0519338Y2 - - Google Patents
Info
- Publication number
- JPH0519338Y2 JPH0519338Y2 JP12247387U JP12247387U JPH0519338Y2 JP H0519338 Y2 JPH0519338 Y2 JP H0519338Y2 JP 12247387 U JP12247387 U JP 12247387U JP 12247387 U JP12247387 U JP 12247387U JP H0519338 Y2 JPH0519338 Y2 JP H0519338Y2
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- crucible
- graphite
- divided
- sealing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 30
- 229910002804 graphite Inorganic materials 0.000 claims description 30
- 239000010439 graphite Substances 0.000 claims description 30
- 239000003566 sealing material Substances 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000007789 sealing Methods 0.000 description 7
- 210000000569 greater omentum Anatomy 0.000 description 5
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000000565 sealant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12247387U JPH0519338Y2 (cs) | 1987-08-12 | 1987-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12247387U JPH0519338Y2 (cs) | 1987-08-12 | 1987-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430366U JPS6430366U (cs) | 1989-02-23 |
| JPH0519338Y2 true JPH0519338Y2 (cs) | 1993-05-21 |
Family
ID=31370439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12247387U Expired - Lifetime JPH0519338Y2 (cs) | 1987-08-12 | 1987-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519338Y2 (cs) |
-
1987
- 1987-08-12 JP JP12247387U patent/JPH0519338Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6430366U (cs) | 1989-02-23 |
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